GB1244759A - Improvements in and relating to methods of manufacturing semiconductor devices - Google Patents

Improvements in and relating to methods of manufacturing semiconductor devices

Info

Publication number
GB1244759A
GB1244759A GB58828/68A GB5882868A GB1244759A GB 1244759 A GB1244759 A GB 1244759A GB 58828/68 A GB58828/68 A GB 58828/68A GB 5882868 A GB5882868 A GB 5882868A GB 1244759 A GB1244759 A GB 1244759A
Authority
GB
United Kingdom
Prior art keywords
semi
groove
etching
plug
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB58828/68A
Other languages
English (en)
Inventor
Maurice Greenlick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASSOCIATED SEMICONDUCTOR MFT
Original Assignee
ASSOCIATED SEMICONDUCTOR MFT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASSOCIATED SEMICONDUCTOR MFT filed Critical ASSOCIATED SEMICONDUCTOR MFT
Priority to GB58828/68A priority Critical patent/GB1244759A/en
Priority to NL6918363A priority patent/NL6918363A/xx
Priority to BE742883D priority patent/BE742883A/xx
Priority to FR6942894A priority patent/FR2025892A1/fr
Publication of GB1244759A publication Critical patent/GB1244759A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/43—Layouts of interconnections
    • H10W20/432—Layouts of interconnections comprising crossing interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/021—Manufacture or treatment of air gaps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/20—Air gaps

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
GB58828/68A 1968-12-11 1968-12-11 Improvements in and relating to methods of manufacturing semiconductor devices Expired GB1244759A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB58828/68A GB1244759A (en) 1968-12-11 1968-12-11 Improvements in and relating to methods of manufacturing semiconductor devices
NL6918363A NL6918363A (https=) 1968-12-11 1969-12-06
BE742883D BE742883A (https=) 1968-12-11 1969-12-09
FR6942894A FR2025892A1 (https=) 1968-12-11 1969-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB58828/68A GB1244759A (en) 1968-12-11 1968-12-11 Improvements in and relating to methods of manufacturing semiconductor devices

Publications (1)

Publication Number Publication Date
GB1244759A true GB1244759A (en) 1971-09-02

Family

ID=10482499

Family Applications (1)

Application Number Title Priority Date Filing Date
GB58828/68A Expired GB1244759A (en) 1968-12-11 1968-12-11 Improvements in and relating to methods of manufacturing semiconductor devices

Country Status (4)

Country Link
BE (1) BE742883A (https=)
FR (1) FR2025892A1 (https=)
GB (1) GB1244759A (https=)
NL (1) NL6918363A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5455448A (en) * 1992-09-03 1995-10-03 Sgs-Thomson Microelectronics, Inc. Bipolar, monolithic, high-power RF transistor with isolated top collector

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2106540A1 (de) * 1970-02-13 1971-08-19 Texas Instruments Inc Halbleiterschaltung und Verfahren zu ihrer Herstellung
FR2469804A1 (fr) * 1979-11-07 1981-05-22 Labo Electronique Physique Procede de realisation d'un dispositif semi-conducteur comprenant un assemblage de diodes en serie et dispositif en resultant

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5455448A (en) * 1992-09-03 1995-10-03 Sgs-Thomson Microelectronics, Inc. Bipolar, monolithic, high-power RF transistor with isolated top collector

Also Published As

Publication number Publication date
NL6918363A (https=) 1970-06-15
FR2025892A1 (https=) 1970-09-11
BE742883A (https=) 1970-06-09

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