GB1232747A - - Google Patents

Info

Publication number
GB1232747A
GB1232747A GB1232747DA GB1232747A GB 1232747 A GB1232747 A GB 1232747A GB 1232747D A GB1232747D A GB 1232747DA GB 1232747 A GB1232747 A GB 1232747A
Authority
GB
United Kingdom
Prior art keywords
scanning
work
window
windows
april
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1232747A publication Critical patent/GB1232747A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB1232747D 1969-04-18 1969-04-18 Expired GB1232747A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1992169 1969-04-18

Publications (1)

Publication Number Publication Date
GB1232747A true GB1232747A (enExample) 1971-05-19

Family

ID=10137360

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1232747D Expired GB1232747A (enExample) 1969-04-18 1969-04-18

Country Status (5)

Country Link
CH (1) CH508981A (enExample)
DE (1) DE2018320A1 (enExample)
FR (1) FR2043428A5 (enExample)
GB (1) GB1232747A (enExample)
NL (1) NL7005618A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19642116C2 (de) * 1996-10-12 2000-12-07 Fraunhofer Ges Forschung Verfahren zur strukturierten Energieübertragung mit Elektronenstrahlen

Also Published As

Publication number Publication date
NL7005618A (enExample) 1970-10-20
FR2043428A5 (enExample) 1971-02-12
DE2018320A1 (de) 1970-10-22
CH508981A (de) 1971-06-15

Similar Documents

Publication Publication Date Title
JPS52115681A (en) Method of improving crystallinity of semiconductor coating by scanning laser beam
GB1483171A (en) Producing patterns with an electron beam
GB1454817A (en) Irradiation apparatus
CA1005176A (en) Method and apparatus for electron beam alignment with a semiconductor member
GB1232747A (enExample)
GB1324850A (en) Electron accelerator
GB2041639B (en) Electron beam lithography
CA943617A (en) Cylindrical electrode system for focusing and deflecting an electron beam
CA1005172A (en) Method and apparatus for electron beam alignment with a member by detecting cathodoluminescence from oxide layers
GB1463006A (en) Electron deflecting arrangements
CA961175A (en) Induced electron emission spectrometer using plural radiation sources
GB1238565A (enExample)
JPS5235977A (en) Scanning particle beam microscope
IL48720A0 (en) An electron beam vapor source
AU458279B2 (en) Scanning beam guidance method and apparatus
JPS5439561A (en) Turning off system of thyristor
GB1318273A (en) Apparatus for tracing the contour of a pattern
JPS5326192A (en) Compound analyzer
AT381600B (de) Elektromagnetische anordnung zum fokussieren und ablenken von elektronenstrahlen
SU780820A1 (ru) Устройство дл формировани импульсных равномерных полей облучени электронами
JPS52117578A (en) Electron beam exposing method
GB1341912A (en) Electric function generator
JPS51116400A (en) An electron beam radiation apparatus
GB1355973A (en) Method of esuring a reproducible adjustment of dose homogeneity in the radiation field of a particle accelerator
JPS5227995A (en) Rotating device for electron beam irradiation

Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees