GB1226278A - - Google Patents

Info

Publication number
GB1226278A
GB1226278A GB3549669A GB1226278DA GB1226278A GB 1226278 A GB1226278 A GB 1226278A GB 3549669 A GB3549669 A GB 3549669A GB 1226278D A GB1226278D A GB 1226278DA GB 1226278 A GB1226278 A GB 1226278A
Authority
GB
United Kingdom
Prior art keywords
slots
resonator
waveguide
long axis
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3549669A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1226278A publication Critical patent/GB1226278A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32247—Resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB3549669A 1969-05-07 1969-07-15 Expired GB1226278A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82245069A 1969-05-07 1969-05-07

Publications (1)

Publication Number Publication Date
GB1226278A true GB1226278A (enrdf_load_stackoverflow) 1971-03-24

Family

ID=25236065

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3549669A Expired GB1226278A (enrdf_load_stackoverflow) 1969-05-07 1969-07-15

Country Status (4)

Country Link
US (1) US3577207A (enrdf_load_stackoverflow)
DE (1) DE1924790A1 (enrdf_load_stackoverflow)
FR (1) FR2050610A5 (enrdf_load_stackoverflow)
GB (1) GB1226278A (enrdf_load_stackoverflow)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3757518A (en) * 1970-11-03 1973-09-11 Messerschmitt Boelkow Blohm Ion engine
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
CA1024246A (en) * 1973-08-22 1978-01-10 Donald M. Spero Apparatus and method for generating radiation
JPS5211175A (en) * 1975-07-18 1977-01-27 Toshiba Corp Activated gas reacting apparatus
US4042850A (en) * 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
JPS5939178B2 (ja) * 1977-04-25 1984-09-21 株式会社東芝 活性化ガス発生装置
FR2432820A2 (fr) * 1977-11-08 1980-02-29 Anvar Dispositif et procede de generation d'un gaz ionise ou plasma par ondes hyperfrequences
US4292344A (en) * 1979-02-23 1981-09-29 Union Carbide Corporation Fluidized bed heating process and apparatus
FR2473833A1 (fr) * 1980-01-11 1981-07-17 Petrov Evgeny Plasmatron a ultra-haute frequence
AT388814B (de) * 1985-11-15 1989-09-11 Paar Anton Kg Verfahren und vorrichtung zum erzeugen eines hf-induzierten edelgasplasmas
DE3712971A1 (de) * 1987-04-16 1988-11-03 Plasonic Oberflaechentechnik G Verfahren und vorrichtung zum erzeugen eines plasmas
US4883570A (en) * 1987-06-08 1989-11-28 Research-Cottrell, Inc. Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves
DE4235914A1 (de) * 1992-10-23 1994-04-28 Juergen Prof Dr Engemann Vorrichtung zur Erzeugung von Mikrowellenplasmen
US5470541A (en) * 1993-12-28 1995-11-28 E. I. Du Pont De Nemours And Company Apparatus and process for the preparation of hydrogen cyanide
GB9414561D0 (en) * 1994-07-19 1994-09-07 Ea Tech Ltd Method of and apparatus for microwave-plasma production
EP0702393A3 (en) * 1994-09-16 1997-03-26 Daihen Corp Plasma processing apparatus for introducing a micrometric wave from a rectangular waveguide, through an elongated sheet into the plasma chamber
US6193878B1 (en) * 1995-01-25 2001-02-27 Zpm, Inc. Multi-modal method and apparatus for treating a solution
US5798137A (en) * 1995-06-07 1998-08-25 Advanced Silicon Materials, Inc. Method for silicon deposition
DE19600223A1 (de) * 1996-01-05 1997-07-17 Ralf Dr Dipl Phys Spitzl Vorrichtung zur Erzeugung von Plasmen mittels Mikrowellen
DE19608949A1 (de) * 1996-03-08 1997-09-11 Ralf Dr Spitzl Vorrichtung zur Erzeugung von leistungsfähigen Mikrowellenplasmen
US6049170A (en) * 1996-11-01 2000-04-11 Matsushita Electric Industrial Co., Ltd. High frequency discharge energy supply means and high frequency electrodeless discharge lamp device
TW385623B (en) * 1997-10-20 2000-03-21 Sumitomo Metal Ind Apparatus and method for microwave plasma process
US6057645A (en) * 1997-12-31 2000-05-02 Eaton Corporation Plasma discharge device with dynamic tuning by a movable microwave trap
US6362449B1 (en) 1998-08-12 2002-03-26 Massachusetts Institute Of Technology Very high power microwave-induced plasma
US6870123B2 (en) 1998-10-29 2005-03-22 Canon Kabushiki Kaisha Microwave applicator, plasma processing apparatus having same, and plasma processing method
EP0997927A3 (en) * 1998-10-29 2003-06-25 Canon Kabushiki Kaisha Microwave applicator with annular waveguide, plasma processing apparatus having the same, and plasma processing method
US6537493B1 (en) * 2000-09-06 2003-03-25 Microlizer Ltd. Sterilization apparatus
KR20040020893A (ko) * 2001-04-27 2004-03-09 데이비드 시스템즈 앤드 테크놀로지, 에스. 엘. 내연엔진 또는 가스터빈 내에서 사용가능한 연료를합성가스로 플라즈마 촉매식 변환하기 위한 방법 및 이를위한 플라즈마 촉매식변환기
US20030104139A1 (en) * 2001-11-30 2003-06-05 House Keith L. Apparatus for depositing a plasma chemical vapor deposition coating on the inside of an optical fiber preform
US6657171B1 (en) * 2002-11-20 2003-12-02 Maytag Corporation Toroidal waveguide for a microwave cooking appliance
EP2086285A1 (en) * 2008-02-01 2009-08-05 Anton Paar GmbH Applicator and Apparatus for heating samples by microwave radiation
JP5349923B2 (ja) * 2008-11-27 2013-11-20 東海ゴム工業株式会社 マイクロ波プラズマ処理装置
NL2007968C2 (en) * 2011-12-14 2013-06-17 Draka Comteq Bv An apparatus for performing a plasma chemical vapour deposition process.
NL2017575B1 (en) 2016-10-04 2018-04-13 Draka Comteq Bv A method and an apparatus for performing a plasma chemical vapour deposition process and a method
US20230080243A1 (en) 2020-06-02 2023-03-16 Tamara Renee WEBB Method for processing waste using low-temperature plasma and device therefor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1150717B (de) * 1961-06-29 1963-06-27 Max Planck Gesellschaft Anordnung zur Erzeugung hoechstfrequenter elektromagnetischer Schwingungen, vorzugsweise im Millimeter- und Submillimeterwellengebiet, mittels einer Gasentladung vom Penning-Typ
GB1020224A (en) * 1962-01-22 1966-02-16 Hitachi Ltd Improvements relating to an electron cyclotron resonance ultra-violet lamp
US3378723A (en) * 1964-01-02 1968-04-16 Rca Corp Fast wave transmission line coupled to a plasma

Also Published As

Publication number Publication date
US3577207A (en) 1971-05-04
FR2050610A5 (enrdf_load_stackoverflow) 1971-04-02
DE1924790A1 (de) 1970-11-19

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees