GB1217443A - Apparatus for evaporation by levitation in an ultra-vacuum - Google Patents
Apparatus for evaporation by levitation in an ultra-vacuumInfo
- Publication number
- GB1217443A GB1217443A GB01803/69A GB1180369A GB1217443A GB 1217443 A GB1217443 A GB 1217443A GB 01803/69 A GB01803/69 A GB 01803/69A GB 1180369 A GB1180369 A GB 1180369A GB 1217443 A GB1217443 A GB 1217443A
- Authority
- GB
- United Kingdom
- Prior art keywords
- window
- chamber
- inductor
- mask
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/10—Vacuum distillation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/22—Furnaces without an endless core
- H05B6/32—Arrangements for simultaneous levitation and heating
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE713308 | 1968-04-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1217443A true GB1217443A (en) | 1970-12-31 |
Family
ID=3852706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB01803/69A Expired GB1217443A (en) | 1968-04-05 | 1969-03-05 | Apparatus for evaporation by levitation in an ultra-vacuum |
Country Status (8)
Country | Link |
---|---|
US (1) | US3575133A (xx) |
BE (1) | BE713308A (xx) |
CH (1) | CH494582A (xx) |
FR (1) | FR2005635A1 (xx) |
GB (1) | GB1217443A (xx) |
LU (1) | LU58103A1 (xx) |
NL (1) | NL6905225A (xx) |
SE (1) | SE346338B (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1020059C2 (nl) * | 2002-02-21 | 2003-08-25 | Corus Technology B V | Werkwijze en inrichting voor het bekleden van een substraat. |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2917841A1 (de) * | 1979-05-03 | 1980-11-13 | Leybold Heraeus Gmbh & Co Kg | Verdampfer fuer vakuumaufdampfanlagen |
EP0392067A1 (de) * | 1989-04-14 | 1990-10-17 | Vsesojuzny Nauchno-Issledovatelsky Proektno-Konstruktorsky I Tekhnologichesky Inst. Elektrotermicheskogo Oborudovania Vniieto | Vakuuminduktionsofen |
US5254173A (en) * | 1992-01-31 | 1993-10-19 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Turntable mechanism |
KR100461283B1 (ko) * | 2000-12-30 | 2004-12-14 | 현대엘씨디주식회사 | 유기전기발광소자 제조장치용 유기물증발보트구조 |
US9920418B1 (en) | 2010-09-27 | 2018-03-20 | James Stabile | Physical vapor deposition apparatus having a tapered chamber |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2584660A (en) * | 1949-09-24 | 1952-02-05 | Eastman Kodak Co | Vacuum coating process and apparatus therefor |
US2686864A (en) * | 1951-01-17 | 1954-08-17 | Westinghouse Electric Corp | Magnetic levitation and heating of conductive materials |
US3290567A (en) * | 1960-09-23 | 1966-12-06 | Technical Ind Inc | Controlled deposition and growth of polycrystalline films in a vacuum |
FR1273518A (fr) * | 1960-10-28 | 1961-10-13 | Ass Elect Ind | Perfectionnements aux appareils de vaporisation sous vide |
US3173283A (en) * | 1960-12-27 | 1965-03-16 | Vogtmann Hans | Process and apparatus for loading extrusion presses |
US3476170A (en) * | 1967-05-15 | 1969-11-04 | Traub Co The | Casting method with laser beam melting of levitated mass |
-
1968
- 1968-04-05 BE BE713308D patent/BE713308A/xx unknown
-
1969
- 1969-02-26 LU LU58103D patent/LU58103A1/xx unknown
- 1969-03-05 CH CH336669A patent/CH494582A/fr not_active IP Right Cessation
- 1969-03-05 GB GB01803/69A patent/GB1217443A/en not_active Expired
- 1969-03-19 US US808580A patent/US3575133A/en not_active Expired - Lifetime
- 1969-03-21 SE SE4006/69A patent/SE346338B/xx unknown
- 1969-04-03 FR FR6910279A patent/FR2005635A1/fr not_active Withdrawn
- 1969-04-03 NL NL6905225A patent/NL6905225A/xx unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1020059C2 (nl) * | 2002-02-21 | 2003-08-25 | Corus Technology B V | Werkwijze en inrichting voor het bekleden van een substraat. |
WO2003071000A1 (en) * | 2002-02-21 | 2003-08-28 | Corus Technology Bv | Method and device for coating a substrate |
US7323229B2 (en) | 2002-02-21 | 2008-01-29 | Corus Technology Bv | Method and device for coating a substrate |
CN100545299C (zh) * | 2002-02-21 | 2009-09-30 | 科鲁斯技术有限公司 | 衬底镀膜的方法和设备 |
Also Published As
Publication number | Publication date |
---|---|
LU58103A1 (xx) | 1969-06-03 |
SE346338B (xx) | 1972-07-03 |
FR2005635A1 (xx) | 1969-12-12 |
CH494582A (fr) | 1970-08-15 |
NL6905225A (xx) | 1969-10-07 |
DE1907542B2 (de) | 1976-10-28 |
DE1907542A1 (de) | 1969-10-30 |
BE713308A (xx) | 1968-10-07 |
US3575133A (en) | 1971-04-13 |
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