FR2231773A1 - Vacuum evapn. of metals by levitation - for thin film mfr. using rod to lift metal into high-frequency coil - Google Patents

Vacuum evapn. of metals by levitation - for thin film mfr. using rod to lift metal into high-frequency coil

Info

Publication number
FR2231773A1
FR2231773A1 FR7319269A FR7319269A FR2231773A1 FR 2231773 A1 FR2231773 A1 FR 2231773A1 FR 7319269 A FR7319269 A FR 7319269A FR 7319269 A FR7319269 A FR 7319269A FR 2231773 A1 FR2231773 A1 FR 2231773A1
Authority
FR
France
Prior art keywords
rod
levitation
metals
thin film
frequency coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7319269A
Other languages
French (fr)
Other versions
FR2231773B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laboratoires dElectronique Philips SAS
Original Assignee
Laboratoires dElectronique et de Physique Appliquee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laboratoires dElectronique et de Physique Appliquee filed Critical Laboratoires dElectronique et de Physique Appliquee
Priority to FR7319269A priority Critical patent/FR2231773A1/en
Publication of FR2231773A1 publication Critical patent/FR2231773A1/en
Application granted granted Critical
Publication of FR2231773B1 publication Critical patent/FR2231773B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The device consists of a vertical lifting rod, coaxial with a high-frequency induction-heating coil, and a horizontal rotary plate, the periphery of which carries at least two containers for the metal to be evaporated and two crucibles for receiving the metal. The novelty is that a combined system of blades and notches is used for the simultaneous raising and lowering of the rod and the stepwise rotation of the plate e.g. by 45 degrees, the result being a simple and reliable appts.
FR7319269A 1973-05-28 1973-05-28 Vacuum evapn. of metals by levitation - for thin film mfr. using rod to lift metal into high-frequency coil Granted FR2231773A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7319269A FR2231773A1 (en) 1973-05-28 1973-05-28 Vacuum evapn. of metals by levitation - for thin film mfr. using rod to lift metal into high-frequency coil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7319269A FR2231773A1 (en) 1973-05-28 1973-05-28 Vacuum evapn. of metals by levitation - for thin film mfr. using rod to lift metal into high-frequency coil

Publications (2)

Publication Number Publication Date
FR2231773A1 true FR2231773A1 (en) 1974-12-27
FR2231773B1 FR2231773B1 (en) 1976-06-11

Family

ID=9120069

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7319269A Granted FR2231773A1 (en) 1973-05-28 1973-05-28 Vacuum evapn. of metals by levitation - for thin film mfr. using rod to lift metal into high-frequency coil

Country Status (1)

Country Link
FR (1) FR2231773A1 (en)

Also Published As

Publication number Publication date
FR2231773B1 (en) 1976-06-11

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Legal Events

Date Code Title Description
ST Notification of lapse