GB1201861A - Method of producing semiconductor devices - Google Patents

Method of producing semiconductor devices

Info

Publication number
GB1201861A
GB1201861A GB1105068A GB1105068A GB1201861A GB 1201861 A GB1201861 A GB 1201861A GB 1105068 A GB1105068 A GB 1105068A GB 1105068 A GB1105068 A GB 1105068A GB 1201861 A GB1201861 A GB 1201861A
Authority
GB
United Kingdom
Prior art keywords
devices
semiconductor devices
producing semiconductor
glass
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1105068A
Inventor
Robert James Hyde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB1105068A priority Critical patent/GB1201861A/en
Publication of GB1201861A publication Critical patent/GB1201861A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)

Abstract

1,201,861. Etching. STANDARD TELEPHONES & CABLES Ltd. 7 March, 1968 [No. 11050/68. Addition to 1,195,259. Heading B6J. [Also in Divisions G2-G3 and H1] Semi-conductor devices are prepared by the method of Specification 1,195,259, using a composite master having thereon the auxiliary blocking out patterns as well as the patterns for forming the different areas of the devices. The devices may be formed on germanium coated with glass, the glass being etched with ammonium bifluoride.
GB1105068A 1968-03-07 1968-03-07 Method of producing semiconductor devices Expired GB1201861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1105068A GB1201861A (en) 1968-03-07 1968-03-07 Method of producing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1105068A GB1201861A (en) 1968-03-07 1968-03-07 Method of producing semiconductor devices

Publications (1)

Publication Number Publication Date
GB1201861A true GB1201861A (en) 1970-08-12

Family

ID=9979092

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1105068A Expired GB1201861A (en) 1968-03-07 1968-03-07 Method of producing semiconductor devices

Country Status (1)

Country Link
GB (1) GB1201861A (en)

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees