GB1185953A - Interferometer - Google Patents

Interferometer

Info

Publication number
GB1185953A
GB1185953A GB2823/68A GB282368A GB1185953A GB 1185953 A GB1185953 A GB 1185953A GB 2823/68 A GB2823/68 A GB 2823/68A GB 282368 A GB282368 A GB 282368A GB 1185953 A GB1185953 A GB 1185953A
Authority
GB
United Kingdom
Prior art keywords
pencils
light
receivers
photo
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2823/68A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ernst Leitz Wetzlar GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Ernst Leitz GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH, Ernst Leitz GmbH filed Critical Ernst Leitz Wetzlar GmbH
Publication of GB1185953A publication Critical patent/GB1185953A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
GB2823/68A 1967-01-25 1968-01-18 Interferometer Expired GB1185953A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0055585 1967-01-25

Publications (1)

Publication Number Publication Date
GB1185953A true GB1185953A (en) 1970-04-02

Family

ID=7277079

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2823/68A Expired GB1185953A (en) 1967-01-25 1968-01-18 Interferometer

Country Status (6)

Country Link
US (1) US3529894A (enExample)
JP (1) JPS4816377B1 (enExample)
CH (1) CH492195A (enExample)
DE (1) DE1547403A1 (enExample)
FR (1) FR1565437A (enExample)
GB (1) GB1185953A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083869A (en) * 1988-07-27 1992-01-28 Hitachi, Ltd. Photocoustic signal detecting device

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881823A (en) * 1967-06-02 1975-05-06 Philips Corp Apparatus for measuring the variation of an optical path length with the aid of an interferometer
DE2127483A1 (de) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten
US3976379A (en) * 1972-12-28 1976-08-24 Olympus Optical Co., Ltd. Interferometers
US3937578A (en) * 1974-02-11 1976-02-10 Raytheon Company Laser gyroscope
GB1510788A (en) * 1974-09-03 1978-05-17 Decca Ltd Optical pathlength modulators
JPS6024404B2 (ja) * 1978-01-13 1985-06-12 ナシヨナル・リサ−チ・デイベロツプメント・コ−ポレイシヨン 干渉計システム
DD234070A1 (de) * 1985-01-18 1986-03-19 Ilmenau Tech Hochschule Interferometrische mehrkoordinatenmesseinrichtung
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
DE3623244A1 (de) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen
DE4233336C2 (de) * 1992-10-05 2001-08-23 Zeiss Carl Verfahren und Vorrichtung zur Detektion von Fokusablagen
CN102353325B (zh) 2011-07-22 2013-08-14 中国科学院上海光学精密机械研究所 四轴4细分干涉仪
CN102288104B (zh) * 2011-07-22 2014-02-12 中国科学院上海光学精密机械研究所 六轴4细分干涉仪

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3182292A (en) * 1961-06-29 1965-05-04 Link Division Of General Prec Noise-rejecting counter circuit
US3225644A (en) * 1961-10-16 1965-12-28 Zeiss Jena Veb Carl Apparatus producing interferential test data for measuring and control instruments
US3409375A (en) * 1964-10-21 1968-11-05 Cutler Hammer Inc Gauging interferometer systems
US3434787A (en) * 1965-11-15 1969-03-25 Optomechanisms Inc Double axes interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083869A (en) * 1988-07-27 1992-01-28 Hitachi, Ltd. Photocoustic signal detecting device

Also Published As

Publication number Publication date
CH492195A (de) 1970-06-15
DE1547403A1 (de) 1969-12-18
FR1565437A (enExample) 1969-05-02
JPS4816377B1 (enExample) 1973-05-22
US3529894A (en) 1970-09-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees