GB1183310A - Improvements in Ionic Microanalysers - Google Patents

Improvements in Ionic Microanalysers

Info

Publication number
GB1183310A
GB1183310A GB827869A GB827869A GB1183310A GB 1183310 A GB1183310 A GB 1183310A GB 827869 A GB827869 A GB 827869A GB 827869 A GB827869 A GB 827869A GB 1183310 A GB1183310 A GB 1183310A
Authority
GB
United Kingdom
Prior art keywords
respect
type
feb
dispersive
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB827869A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of GB1183310A publication Critical patent/GB1183310A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,183,310. Ion microscopes; particle spectrometers. CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE and THOMSON-CSF. 14 Feb., 1969 [16 Feb., 1968], No. 8278/69. Heading H1D. In an ion beam microanalyser in which the characteristic secondary ions emitted from a sample 5 bombarded with primary ions are filtered with respect to momentum and energy by means of a magnetic sector I, I<SP>1</SP> and an electrostatic sector i, i<SP>1</SP> in the form of a spherical capacitor, the arrangement, including lenses at 6 and 9, is designed to form an achromatic system, i.e. a system dispersive with respect to mass, but non-dispersive with respect to energy or velocity. In the system shown D + r = 2R and, in particular D = r = R. Astigmatism of the image at the diaphragm 13 in the transverse direction is corrected by a stigmator 8. The positions of the magnetic and electric sectors may be interchanged and the system need not be "C" type as shown with the optical axes of the two sectors lying on the same side of the common axis Z<SP>1</SP>z 1 , but "S" type with the optical axes on opposite sides of the common axis. In an "S" type system two intermediate lenses replace the lens 13 of the arrangement shown.
GB827869A 1968-02-16 1969-02-14 Improvements in Ionic Microanalysers Expired GB1183310A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR140143 1968-02-16

Publications (1)

Publication Number Publication Date
GB1183310A true GB1183310A (en) 1970-03-04

Family

ID=8646087

Family Applications (1)

Application Number Title Priority Date Filing Date
GB827869A Expired GB1183310A (en) 1968-02-16 1969-02-14 Improvements in Ionic Microanalysers

Country Status (4)

Country Link
JP (1) JPS5130480B1 (en)
DE (1) DE1907093C3 (en)
FR (1) FR1576381A (en)
GB (1) GB1183310A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2942072B1 (en) * 2009-02-06 2011-11-25 Cameca ACHROMATIC MAGNETIC MASS SPECTROMETER WITH DOUBLE FOCUSING.

Also Published As

Publication number Publication date
DE1907093C3 (en) 1979-03-29
JPS5130480B1 (en) 1976-09-01
DE1907093B2 (en) 1978-07-20
FR1576381A (en) 1969-08-01
DE1907093A1 (en) 1969-09-11

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees
PE20 Patent expired after termination of 20 years