GB1176708A - Lens Arrangement for Corpuscular Ray Apparatus. - Google Patents

Lens Arrangement for Corpuscular Ray Apparatus.

Info

Publication number
GB1176708A
GB1176708A GB2482567A GB2482567A GB1176708A GB 1176708 A GB1176708 A GB 1176708A GB 2482567 A GB2482567 A GB 2482567A GB 2482567 A GB2482567 A GB 2482567A GB 1176708 A GB1176708 A GB 1176708A
Authority
GB
United Kingdom
Prior art keywords
lens
superconducting
end faces
screening
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2482567A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1176708A publication Critical patent/GB1176708A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses
    • H01J37/1416Electromagnetic lenses with superconducting coils
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00Superconducting magnets; Superconducting coils

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB2482567A 1966-09-21 1967-05-30 Lens Arrangement for Corpuscular Ray Apparatus. Expired GB1176708A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0105968 1966-09-21
DE19702059417 DE2059417B2 (de) 1966-09-21 1970-12-02 Magnetische Linsenanordnung für Korpuskularstrahlgeräte mit Mitteln zur Korrektur von Linsenfehlern und Verfahren zur Justierung

Publications (1)

Publication Number Publication Date
GB1176708A true GB1176708A (en) 1970-01-07

Family

ID=25760129

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2482567A Expired GB1176708A (en) 1966-09-21 1967-05-30 Lens Arrangement for Corpuscular Ray Apparatus.

Country Status (3)

Country Link
DE (2) DE1564714C3 (enrdf_load_stackoverflow)
GB (1) GB1176708A (enrdf_load_stackoverflow)
NL (1) NL155126B (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2307822C3 (de) * 1973-02-16 1982-03-18 Siemens AG, 1000 Berlin und 8000 München Supraleitendes Linsensystem für Korpuskularstrahlung

Also Published As

Publication number Publication date
DE2059417B2 (de) 1978-09-21
DE1564714C3 (de) 1975-04-24
DE2059417A1 (de) 1972-06-08
DE1564714A1 (de) 1969-12-11
NL155126B (nl) 1977-11-15
NL6704131A (enrdf_load_stackoverflow) 1968-03-22
DE2059417C3 (enrdf_load_stackoverflow) 1979-05-17
DE1564714B2 (de) 1974-09-12

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