GB1156768A - Method of Producing a Film of a Rare Earth Iron Garnet. - Google Patents

Method of Producing a Film of a Rare Earth Iron Garnet.

Info

Publication number
GB1156768A
GB1156768A GB25422/68A GB2542268A GB1156768A GB 1156768 A GB1156768 A GB 1156768A GB 25422/68 A GB25422/68 A GB 25422/68A GB 2542268 A GB2542268 A GB 2542268A GB 1156768 A GB1156768 A GB 1156768A
Authority
GB
United Kingdom
Prior art keywords
garnet
rare earth
film
earth iron
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB25422/68A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1156768A publication Critical patent/GB1156768A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/186—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering for applying a magnetic garnet film
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

1,156,768. Sputtered films of rare earth iron garnets. INTERNATIONAL BUSINESS MACHINES CORP. May 28, 1968 [June 26, 1967], No. 25422/68. Heading C7F. A film of a rare earth iron garnet is produced by sputtering a garnet source on to a substrate maintained below 50‹ C in an atmosphere having a partial pressure of oxygen of at least 10%, and then crystallizing the deposited film. The rare earth iron garnets have the formula M 3 Fe 3 O 12 where M is one of the rare earths and to ensure that the deposited garnet has the same formula the source cathode must be kept at a temperature below the vaporization temperature of the garnet. The substrate should have a thermal expansion coefficient between 80 x 10<SP>-7</SP> /‹ C to 130 x 10<SP>-7</SP> /‹ C and suitable substrates are single crystal quartz, magnesium oxide or the same garnet as that being deposited. The sputtered film is crystallized by heating to 700‹ -1100‹ C in an oxygen atmosphere or in a vacuum. The sputtering is carried out with a 50 watt R. F. oscillator and RF power amplifier at a frequency of 13À56 megacycles/sec. A magnetic field perpendicular to the target is superposed by a set of Helmboltz coils outside the vacuum chamber.
GB25422/68A 1967-06-26 1968-05-28 Method of Producing a Film of a Rare Earth Iron Garnet. Expired GB1156768A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64881167A 1967-06-26 1967-06-26

Publications (1)

Publication Number Publication Date
GB1156768A true GB1156768A (en) 1969-07-02

Family

ID=24602340

Family Applications (1)

Application Number Title Priority Date Filing Date
GB25422/68A Expired GB1156768A (en) 1967-06-26 1968-05-28 Method of Producing a Film of a Rare Earth Iron Garnet.

Country Status (4)

Country Link
US (1) US3437577A (en)
DE (1) DE1765644A1 (en)
FR (1) FR1575931A (en)
GB (1) GB1156768A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3607390A (en) * 1969-09-29 1971-09-21 Ibm Single crystal ferrimagnetic films
US3887451A (en) * 1972-12-29 1975-06-03 Ibm Method for sputtering garnet compound layer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA690586A (en) * 1964-07-14 Eckert Oskar Method of producing thin ferromagnetic layers of uniaxial anisotropy
CA712576A (en) * 1965-06-29 R. Sinclair William Reactive sputtering procedure
US3073770A (en) * 1961-04-24 1963-01-15 Bell Telephone Labor Inc Mullite synthesis

Also Published As

Publication number Publication date
FR1575931A (en) 1969-07-25
US3437577A (en) 1969-04-08
DE1765644A1 (en) 1971-08-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee