GB1145876A - Method of electrochemically etching silicon - Google Patents

Method of electrochemically etching silicon

Info

Publication number
GB1145876A
GB1145876A GB2029266A GB2029266A GB1145876A GB 1145876 A GB1145876 A GB 1145876A GB 2029266 A GB2029266 A GB 2029266A GB 2029266 A GB2029266 A GB 2029266A GB 1145876 A GB1145876 A GB 1145876A
Authority
GB
United Kingdom
Prior art keywords
silicon
ticl
organic liquid
etching silicon
methanol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2029266A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Publication of GB1145876A publication Critical patent/GB1145876A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C25F1/02—Pickling; Descaling
    • C25F1/12—Pickling; Descaling in melts
    • C25F1/14—Iron or steel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Weting (AREA)
GB2029266A 1965-05-07 1966-05-06 Method of electrochemically etching silicon Expired GB1145876A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR16295A FR1442535A (fr) 1965-05-07 1965-05-07 Procédé d'attaque sélective du silicium

Publications (1)

Publication Number Publication Date
GB1145876A true GB1145876A (en) 1969-03-19

Family

ID=8578284

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2029266A Expired GB1145876A (en) 1965-05-07 1966-05-06 Method of electrochemically etching silicon

Country Status (7)

Country Link
BE (1) BE679812A (xx)
CH (1) CH450856A (xx)
DE (1) DE1496764A1 (xx)
FR (1) FR1442535A (xx)
GB (1) GB1145876A (xx)
LU (1) LU50965A1 (xx)
NL (1) NL6605960A (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090184092A1 (en) * 2005-10-28 2009-07-23 Kanto Kagaku Kabuashiki Kaisha Palladium-Selective Etching Solution and Method for Controlling Etching Selectivity
US9184364B2 (en) 2005-03-02 2015-11-10 Rosemount Inc. Pipeline thermoelectric generator assembly

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9184364B2 (en) 2005-03-02 2015-11-10 Rosemount Inc. Pipeline thermoelectric generator assembly
US20090184092A1 (en) * 2005-10-28 2009-07-23 Kanto Kagaku Kabuashiki Kaisha Palladium-Selective Etching Solution and Method for Controlling Etching Selectivity

Also Published As

Publication number Publication date
BE679812A (xx) 1966-10-21
DE1496764A1 (de) 1969-04-10
LU50965A1 (xx) 1966-10-25
FR1442535A (fr) 1966-06-17
CH450856A (fr) 1968-04-30
NL6605960A (xx) 1966-11-08

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