GB1142405A - Method of making a semiconductor device having two insulating coatings - Google Patents
Method of making a semiconductor device having two insulating coatingsInfo
- Publication number
- GB1142405A GB1142405A GB1030467A GB1030467A GB1142405A GB 1142405 A GB1142405 A GB 1142405A GB 1030467 A GB1030467 A GB 1030467A GB 1030467 A GB1030467 A GB 1030467A GB 1142405 A GB1142405 A GB 1142405A
- Authority
- GB
- United Kingdom
- Prior art keywords
- coating
- silicon
- openings
- insulating material
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3085—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by their behaviour during the process, e.g. soluble masks, redeposited masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
Abstract
1,142,405. Etching. RADIO CORPORATION OF AMERICA. 3 March, 1967 [8 March, 1966; 9 June, 1966], No. 10304/67. Heading B6J. [Also in Division H1] In the manufacture of semi-conductor devices a coating of a first insulating material is formed on a semi-conductor body, and a pattern of openings formed in it. A coating of a second insulating material is then formed over the first coating and in the openings and a corresponding pattern of openings, formed in it by treatment with an etchant which etches the second insulating material at least twice as fast as the first. In a typical case using a silicon body the first coating is thermally grown silicon oxide and the second coating silicon oxide deposited pyrolytically from a silane and oxygen atmosphere. The pattern of openings is formed in both layers photo-lithographically using a specified etchant consisting of ammonium fluoride, hydrofluoric acid and water. Impurity is diffused in through the first openings and the areas exposed by the openings in the second layer are metallized after etching or pre-doping, or merely etched or rendered more conductive by impurity diffusion. Where the body is of silicon, germanium or gallium arsenide other suitable materials for the first coating are titanium carbide, silicon carbide, silicon oxynitride, and silicon nitride produced by reaction of ammonia and silane. Silicon monoxide, magnesium oxide and hydroxide and silicon oxide formed by the thermal decomposition of siloxanes are suitable for the second coating. Both coatings may include dopant materials if desired.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US53273166A | 1966-03-08 | 1966-03-08 | |
US55649766A | 1966-06-09 | 1966-06-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1142405A true GB1142405A (en) | 1969-02-05 |
Family
ID=27063931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1030467A Expired GB1142405A (en) | 1966-03-08 | 1967-03-03 | Method of making a semiconductor device having two insulating coatings |
Country Status (6)
Country | Link |
---|---|
BR (2) | BR6787596D0 (en) |
DE (1) | DE1614358C3 (en) |
ES (2) | ES337635A1 (en) |
FR (1) | FR1516406A (en) |
GB (1) | GB1142405A (en) |
SE (1) | SE346659B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2658304A1 (en) * | 1975-12-24 | 1977-06-30 | Tokyo Shibaura Electric Co | SEMI-CONDUCTOR DEVICE |
US4161743A (en) * | 1977-03-28 | 1979-07-17 | Tokyo Shibaura Electric Co., Ltd. | Semiconductor device with silicon carbide-glass-silicon carbide passivating overcoat |
US4560642A (en) * | 1976-08-27 | 1985-12-24 | Toyko Shibaura Electric Co., Ltd. | Method of manufacturing a semiconductor device |
US9577045B2 (en) | 2014-08-04 | 2017-02-21 | Fairchild Semiconductor Corporation | Silicon carbide power bipolar devices with deep acceptor doping |
-
1967
- 1967-03-01 DE DE19671614358 patent/DE1614358C3/en not_active Expired
- 1967-03-03 GB GB1030467A patent/GB1142405A/en not_active Expired
- 1967-03-03 FR FR97314A patent/FR1516406A/en not_active Expired
- 1967-03-06 ES ES337635A patent/ES337635A1/en not_active Expired
- 1967-03-07 SE SE310467A patent/SE346659B/xx unknown
- 1967-03-07 BR BR18759667A patent/BR6787596D0/en unknown
- 1967-03-07 BR BR18759567A patent/BR6787595D0/en unknown
-
1968
- 1968-01-16 ES ES349369A patent/ES349369A1/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2658304A1 (en) * | 1975-12-24 | 1977-06-30 | Tokyo Shibaura Electric Co | SEMI-CONDUCTOR DEVICE |
US4224636A (en) * | 1975-12-24 | 1980-09-23 | Tokyo Shibaura Electric Co., Ltd. | Semiconductor device with thermally compensating SiO2 -silicate glass-SiC passivation layer |
US4560642A (en) * | 1976-08-27 | 1985-12-24 | Toyko Shibaura Electric Co., Ltd. | Method of manufacturing a semiconductor device |
US4161743A (en) * | 1977-03-28 | 1979-07-17 | Tokyo Shibaura Electric Co., Ltd. | Semiconductor device with silicon carbide-glass-silicon carbide passivating overcoat |
US9577045B2 (en) | 2014-08-04 | 2017-02-21 | Fairchild Semiconductor Corporation | Silicon carbide power bipolar devices with deep acceptor doping |
Also Published As
Publication number | Publication date |
---|---|
BR6787595D0 (en) | 1973-01-11 |
SE346659B (en) | 1972-07-10 |
DE1614358B2 (en) | 1973-04-05 |
ES349369A1 (en) | 1969-09-16 |
ES337635A1 (en) | 1968-06-16 |
DE1614358A1 (en) | 1971-05-19 |
BR6787596D0 (en) | 1973-02-15 |
DE1614358C3 (en) | 1974-08-22 |
FR1516406A (en) | 1968-03-08 |
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