GB1108699A - Improvements in or relating to furnaces - Google Patents

Improvements in or relating to furnaces

Info

Publication number
GB1108699A
GB1108699A GB41897/66A GB4189766A GB1108699A GB 1108699 A GB1108699 A GB 1108699A GB 41897/66 A GB41897/66 A GB 41897/66A GB 4189766 A GB4189766 A GB 4189766A GB 1108699 A GB1108699 A GB 1108699A
Authority
GB
United Kingdom
Prior art keywords
shell
helix
fingers
connections
quartz tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB41897/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rck Inc
Original Assignee
Rck Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rck Inc filed Critical Rck Inc
Publication of GB1108699A publication Critical patent/GB1108699A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H05B3/66—Supports or mountings for heaters on or in the wall or roof

Abstract

1,108,699. Electric furnaces. R. C. K. Inc. 20 Sept., 1966 [2 Dec., 1965], No. 41897/66. Heading H5H. [Also in Division F4] A cylindrical furnace for surrounding and supporting a removable quartz tube (16, Fig. 1, not shown) containing objects (for example, semi-conductor wafers) to be heated in a controlled atmosphere, comprises a helical resistance heating element 20 located inside a refractory ceramic shell 26 by fingers 27, the tips of which project within the helix to support the quartz tube (16). The shell 26 consists of a plurality of sections, each not more than one tenth (preferably one twentieth) of the surface area of the shell, fitted together to provide grooves in which longitudinal strips of fingers 27 are held. An outer metal (e.g. aluminium) casing encloses the heating unit and the annular space between is filled with soft ceramic fibrous material supported by mouldings 30 of similar material but in a hardened form. Connections 24 and 25 at one end of the helix 20 and connections 22 and 23 at the other end are differentialy spaced so as to provide a long uniform temperature zone.
GB41897/66A 1965-12-02 1966-09-20 Improvements in or relating to furnaces Expired GB1108699A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US511086A US3406275A (en) 1965-12-02 1965-12-02 Furnace having fingers interdigitatedly engaged with its heating elements

Publications (1)

Publication Number Publication Date
GB1108699A true GB1108699A (en) 1968-04-03

Family

ID=24033417

Family Applications (1)

Application Number Title Priority Date Filing Date
GB41897/66A Expired GB1108699A (en) 1965-12-02 1966-09-20 Improvements in or relating to furnaces

Country Status (3)

Country Link
US (1) US3406275A (en)
DE (1) DE1565778A1 (en)
GB (1) GB1108699A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2121660A (en) * 1982-06-04 1983-12-21 Airelec Ind Electric heating element
CN104713358A (en) * 2015-02-13 2015-06-17 中国科学院上海硅酸盐研究所 Low-power-dissipation high-temperature resistance furnace

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560709A (en) * 1968-10-04 1971-02-02 Burgess Norton Mfg Co Electrical furnace for heating a metallic sleeve
FR2029354A1 (en) * 1969-01-20 1970-10-23 Comp Generale Electricite
US3735008A (en) * 1970-03-20 1973-05-22 Kokusai Electric Co Ltd Electric furnace
US4445024A (en) * 1981-03-24 1984-04-24 Research Technology Canberra Pty. Ltd. Electric kiln
DE10227566B4 (en) * 2002-06-20 2007-09-27 Dentsply Detrey Gmbh Heating muffle for a kiln for producing a titanium-containing dental ceramic product, process for its production and use, and kiln containing the heating muffle
US20070289961A1 (en) * 2002-06-20 2007-12-20 Wigbert Hauner Device for firing ceramic dental prostheses
US20110129205A1 (en) * 2009-11-30 2011-06-02 Emerson Electric Co. Flow-through heater
US10880954B2 (en) * 2010-11-05 2020-12-29 Tutco, Llc Foldable electric resistance heater and method of use
JP2014082014A (en) * 2012-10-12 2014-05-08 Tokyo Electron Ltd Heater device and heat treatment device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1678875A (en) * 1924-12-15 1928-07-31 Siemens Schuckertwerke Gmbh Electric bright annealing furnace
US1959358A (en) * 1932-04-18 1934-05-22 Minor F H Gouverneur Electric oven
US2254047A (en) * 1939-06-23 1941-08-26 Westinghouse Electric & Mfg Co Built-in gas generator for industrial furnaces
US2823292A (en) * 1956-07-31 1958-02-11 Heberlein Patent Corp Device for the continuous heat treatment of textile yarns
US3361863A (en) * 1965-04-12 1968-01-02 Karl A. Lang Furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2121660A (en) * 1982-06-04 1983-12-21 Airelec Ind Electric heating element
CN104713358A (en) * 2015-02-13 2015-06-17 中国科学院上海硅酸盐研究所 Low-power-dissipation high-temperature resistance furnace

Also Published As

Publication number Publication date
DE1565778A1 (en) 1970-05-21
US3406275A (en) 1968-10-15

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