GB1104614A - Improvements in or relating to corpuscular beam microscopes - Google Patents

Improvements in or relating to corpuscular beam microscopes

Info

Publication number
GB1104614A
GB1104614A GB8835/66A GB883566A GB1104614A GB 1104614 A GB1104614 A GB 1104614A GB 8835/66 A GB8835/66 A GB 8835/66A GB 883566 A GB883566 A GB 883566A GB 1104614 A GB1104614 A GB 1104614A
Authority
GB
United Kingdom
Prior art keywords
section
pin
march
engages
predetermined distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8835/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1104614A publication Critical patent/GB1104614A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
GB8835/66A 1965-03-02 1966-03-01 Improvements in or relating to corpuscular beam microscopes Expired GB1104614A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0095735 1965-03-02

Publications (1)

Publication Number Publication Date
GB1104614A true GB1104614A (en) 1968-02-28

Family

ID=7519583

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8835/66A Expired GB1104614A (en) 1965-03-02 1966-03-01 Improvements in or relating to corpuscular beam microscopes

Country Status (4)

Country Link
US (1) US3586855A (enrdf_load_html_response)
DE (1) DE1514408B1 (enrdf_load_html_response)
GB (1) GB1104614A (enrdf_load_html_response)
NL (1) NL6516978A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
JPS595179B2 (ja) * 1979-05-18 1984-02-03 富士通株式会社 真空機器の防振構造
SG74599A1 (en) * 1997-09-27 2000-08-22 Inst Of Material Res & Enginee Portable high resolution scanning electron microscope column using permanent magnet electron lenses

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE437593A (enrdf_load_html_response) * 1939-01-17

Also Published As

Publication number Publication date
US3586855A (en) 1971-06-22
DE1514408B1 (de) 1970-01-29
NL6516978A (enrdf_load_html_response) 1966-09-05

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