US3586855A - Corpuscular ray microscope with means to insert specimen chambers of various sizes in the column thereof - Google Patents

Corpuscular ray microscope with means to insert specimen chambers of various sizes in the column thereof Download PDF

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Publication number
US3586855A
US3586855A US530055A US3586855DA US3586855A US 3586855 A US3586855 A US 3586855A US 530055 A US530055 A US 530055A US 3586855D A US3586855D A US 3586855DA US 3586855 A US3586855 A US 3586855A
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United States
Prior art keywords
specimen chamber
microscope
top portion
column
lifting device
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Expired - Lifetime
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US530055A
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English (en)
Inventor
Ekkehard Fuchs
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Siemens and Halske AG
Siemens Corp
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Siemens Corp
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Publication date
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers

Definitions

  • a lifting mechanism raises the top portion a rectilinear distance above the lower portion sufficient to accommodate the highest specimen chamber to be used with the microscope. Upon reaching this elevation, a continued actuation of a drive means causes the top portion to follow a curvilinear upward path which moves it laterally away from the column axis thereby rendering the specimen chamber accessible from above.
  • the top portion can be positioned to accommodate any of several chambers having different heights.
  • Fig.2 ls/bi CORPUSCUILAR RAY MICROSCOPE WITH MEANS TO HNSERT SPECIMEN CHAMBERS OF VARIOUS SIZES IN THE COLUMN THEREOF
  • My invention relates to corpuscular ray microscopes, particularly electron microscopes.
  • the microscope column of such apparatus comprises a top portion, containing the ray generating system and the condenser lens, which can be removed from the specimen chamber portion of the column by means of a lifting device which permits raising the top portion and then swinging it laterally away from the specimen chamber.
  • the raising travel is in the direction of the microscope ray axis, where as the swinging motion is in a plane transverse to the axis.
  • a lifting travel of no more than about 2 cm. is sufficient for the upper portion to reach a position in which it can be freely swung away to permit removing the columnar portion containing the specimen chamber.
  • investigation techniques such as research relating to ferromagnetic materials, it has been found desirable to observe the specimens under defined external influences which cause changes in the specimen. These techniques make it necessary to keep the specimen chamber more readily accessible, such as for introducing coils for heating the specimen or producing defined magnetic fields, or for introducing stress producing devices and the like. This leads to providing a larger specimen accommodating space than needed for the conventional investigation techniques, particularly a specimen chamber of greater axial height than that of the conventional specimen chambers.
  • Another object of the invention is to permit an exchange of differently high specimen chambers in an electron microscope or other corpuscular ray microscope while retaining the well proven construction of the lifting device for raising the upper portion in the abovedescribed manner.
  • 1 provide the microscope column of a corpuscular-ray microscope with several specimen-chamber portions of respectively different heights which are selectively insertable into the column; and I give the device for raising the top portion of the microscope column in the direction of the microscope axis such a design that the top portion, regardless of the selected specimen chamber, is always lifted to the position required for insertion of the highest specimen chamber, before the device commences to swing the top portion away from the microscope axis.
  • my invention provides for compensation between the different heights of the various specimen chambers by correspondingly different clearances between the fixed fully raised position of the lifting device and the top of the particular specimen chamber portion located in the microscope column.
  • the lifting device is dimensioned for a lifting travel of about 6 to 10 cm. This, as a rule, covers the largest difference in height between the specimen chambers required for the various investigations.
  • the abutment or supporting point of the crane device may be shifted in accordance with the particular height of the specimen chamber portion inserted into the microscope column. This, however, results in the necessity of fundamentally changing the construction of the equipment; and such considerable change can be avoided by designing the device in the manner described presently with reference to the accompanying drawing in which:
  • FIG. 1 shows schematically and partly in section a microscope column with a device according to the invention
  • FIG. 2 shows separately two specimen chamber portions, one in front of the other, having respective axial heights different from that of the chamber portion illustratedin FIG. 1.
  • the illustrated apparatus comprises a vertical rod 1 whose upper end carries a laterally protruding holder 2 which is bifurcated to freely straddle the specimen chamber portion 5 of the microscope column beneath the top portion 3 of the column containing the ray generating system and the condenser lens system.
  • the microscope column 4 further comprises a portion 6, which contains the objective lens system, and a nonillustrated bottom portion with the further image producing lenses, such as the projection lens and in some cases an intermediate lens, as well as the tubular end portion in which the ultimate image is formed.
  • the bottom end of the vertical rod 1 is provided with a screw thread 7 which engages an interiorly threaded sleeve 8.
  • the sleeve 8 is rotatably mounted and can be placed in rotation about its axis with the aid of a conical gear transmission 9 and a hand crank 10.
  • the crank When the crank is being actuated, the rotary motion imparted to the sleeve 8 causes the threaded end 7 to be gradually raised.
  • the upward motion of the rod 1 thus produced is constrainedly guided by a cam mechanism which comprises a fixed cam sleeve 13 in which the rod 1 is vertically displaceable and which has a cam slot 12 whose lower portion 11 extends straight upwardly and whose top portion curves laterally as shown at 16.
  • the vertical portion ll of the cam slot 12 is slightly longer than the height of the highest specimen chamber portion to be inserted into the microscope. Operation of the crank 10, therefore, has the effect that the top portion 3 of the microscope column is always lifted to the position required for inserting the highest specimen chamber portion, regardless of whether this particular chamber portion or a lower chamber portion is inserted.
  • the vertical length of the slot portion 11 is 6 to 10 cm., although a greater length of the slot must be chosen in cases where a still higher specimen chamber is required.
  • the height of the straight portion 11 of the cam slot corresponds to the height of the specimen chamber portion 5b, this height being larger than that of the specimen chamber portion 5 inserted into the microscope column.
  • the same microscope is provided with a lower specimen chamber portion 5a.
  • top portion 3 of the microscope column is shown connected by a corrugated and flexible conduit 17 to a vacuum pump (not shown), the flexibility of the conduit permitting the above-mentioned vertical and lateral displacement of top portion 3.
  • a corpuscular ray microscope comprising a microscope column having a top portion containing a ray generating system, a specimen chamber portion beneath and adjacent said top portion, a lower portion beneath and adjacent said specimen chamber portion, and a lifting device for removing said top portion from said specimen chamber portion and said lower portion by raising said top portion from said specimen chamber portion and swinging it away therefrom transversely of the column axis
  • said microscope comprises a plurality of specimen chamber portions of respectively different axial heights selectively insertable into said column between said top portion and said lower portion
  • said lifting device comprises a holder structure having a laterally extending holding portion which surrounds the specimen chamber adjacent to said top portion for holding said top portion of said microscope column, said holder structure also having a downwardly extending threaded rod member, and having a follower pin radially protruding from said rod member, a fixed sleeve traversed by said rod member and having a cam slot engaged by said follower pin, said cam slot having a straight lower portion
  • said lifting device comprising a cam member having a straight cam portion extending up to said given height and having a curved portion extending transversely away from said straight portion beginning at said given height, a follower member in engagement with said cam member, means connecting one of said two members to said top portion of said microscope column, and drive means connected with said other member for actuating said lifting device.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
US530055A 1965-03-02 1966-02-25 Corpuscular ray microscope with means to insert specimen chambers of various sizes in the column thereof Expired - Lifetime US3586855A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0095735 1965-03-02

Publications (1)

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US3586855A true US3586855A (en) 1971-06-22

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US530055A Expired - Lifetime US3586855A (en) 1965-03-02 1966-02-25 Corpuscular ray microscope with means to insert specimen chambers of various sizes in the column thereof

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US (1) US3586855A (enrdf_load_html_response)
DE (1) DE1514408B1 (enrdf_load_html_response)
GB (1) GB1104614A (enrdf_load_html_response)
NL (1) NL6516978A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
EP0019426A1 (en) * 1979-05-18 1980-11-26 Fujitsu Limited A structure for vibration isolation in an apparatus with a vacuum system
US6057553A (en) * 1997-09-27 2000-05-02 Institute Of Materials Research & Engineering Portable high resolution scanning electron microscope column using permanent magnet electron lenses

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL118005B (enrdf_load_html_response) * 1939-01-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
EP0019426A1 (en) * 1979-05-18 1980-11-26 Fujitsu Limited A structure for vibration isolation in an apparatus with a vacuum system
US6057553A (en) * 1997-09-27 2000-05-02 Institute Of Materials Research & Engineering Portable high resolution scanning electron microscope column using permanent magnet electron lenses

Also Published As

Publication number Publication date
NL6516978A (enrdf_load_html_response) 1966-09-05
GB1104614A (en) 1968-02-28
DE1514408B1 (de) 1970-01-29

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