NL6516978A - - Google Patents

Info

Publication number
NL6516978A
NL6516978A NL6516978A NL6516978A NL6516978A NL 6516978 A NL6516978 A NL 6516978A NL 6516978 A NL6516978 A NL 6516978A NL 6516978 A NL6516978 A NL 6516978A NL 6516978 A NL6516978 A NL 6516978A
Authority
NL
Netherlands
Application number
NL6516978A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6516978A publication Critical patent/NL6516978A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
NL6516978A 1965-03-02 1965-12-27 NL6516978A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0095735 1965-03-02

Publications (1)

Publication Number Publication Date
NL6516978A true NL6516978A (enrdf_load_html_response) 1966-09-05

Family

ID=7519583

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6516978A NL6516978A (enrdf_load_html_response) 1965-03-02 1965-12-27

Country Status (4)

Country Link
US (1) US3586855A (enrdf_load_html_response)
DE (1) DE1514408B1 (enrdf_load_html_response)
GB (1) GB1104614A (enrdf_load_html_response)
NL (1) NL6516978A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024402A (en) * 1970-09-18 1977-05-17 Siemens Aktiengesellschaft Specimen cartridge for a particle beam device
JPS595179B2 (ja) * 1979-05-18 1984-02-03 富士通株式会社 真空機器の防振構造
SG74599A1 (en) * 1997-09-27 2000-08-22 Inst Of Material Res & Enginee Portable high resolution scanning electron microscope column using permanent magnet electron lenses

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL118005B (enrdf_load_html_response) * 1939-01-17

Also Published As

Publication number Publication date
GB1104614A (en) 1968-02-28
DE1514408B1 (de) 1970-01-29
US3586855A (en) 1971-06-22

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