GB1096261A - Apparatus for electronic bombardment of a target - Google Patents
Apparatus for electronic bombardment of a targetInfo
- Publication number
- GB1096261A GB1096261A GB625565A GB625565A GB1096261A GB 1096261 A GB1096261 A GB 1096261A GB 625565 A GB625565 A GB 625565A GB 625565 A GB625565 A GB 625565A GB 1096261 A GB1096261 A GB 1096261A
- Authority
- GB
- United Kingdom
- Prior art keywords
- shafts
- feb
- wheels
- frames
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6401328A NL6401328A (pt) | 1964-02-14 | 1964-02-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1096261A true GB1096261A (en) | 1967-12-20 |
Family
ID=19789292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB625565A Expired GB1096261A (en) | 1964-02-14 | 1965-02-12 | Apparatus for electronic bombardment of a target |
Country Status (5)
Country | Link |
---|---|
BE (1) | BE659687A (pt) |
DE (1) | DE1224853B (pt) |
GB (1) | GB1096261A (pt) |
LU (1) | LU47965A1 (pt) |
NL (1) | NL6401328A (pt) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2793882A (en) * | 1955-10-21 | 1957-05-28 | Charles L Keck | Manifolding device |
NL255393A (pt) * | 1960-07-12 | |||
LU34882A1 (pt) * | 1964-04-15 |
-
1964
- 1964-02-14 NL NL6401328A patent/NL6401328A/xx unknown
-
1965
- 1965-02-11 LU LU47965A patent/LU47965A1/xx unknown
- 1965-02-12 GB GB625565A patent/GB1096261A/en not_active Expired
- 1965-02-12 BE BE659687A patent/BE659687A/xx unknown
- 1965-02-12 DE DEE28693A patent/DE1224853B/de active Pending
Also Published As
Publication number | Publication date |
---|---|
NL6401328A (pt) | 1965-08-16 |
LU47965A1 (pt) | 1966-08-11 |
DE1224853B (de) | 1966-09-15 |
BE659687A (pt) | 1965-05-28 |
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