GB1078826A - Improvements in or relating to the treatment of work-pieces with beams of charged particles - Google Patents

Improvements in or relating to the treatment of work-pieces with beams of charged particles

Info

Publication number
GB1078826A
GB1078826A GB4998/65A GB499865A GB1078826A GB 1078826 A GB1078826 A GB 1078826A GB 4998/65 A GB4998/65 A GB 4998/65A GB 499865 A GB499865 A GB 499865A GB 1078826 A GB1078826 A GB 1078826A
Authority
GB
United Kingdom
Prior art keywords
beams
relating
pieces
treatment
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4998/65A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1078826A publication Critical patent/GB1078826A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Abstract

1,078,826. Cutting by electron beam. NIHON DENSHI KABUSHIKI KAISHA. Feb. 4, 1965 [Feb. 4, 1964], No. 4998/65. Heading B3V. [Also in Division H1] In an electron beam apparatus for boring or milling a workpiece in which the beam is deflected over the workpiece, a correction comprising three or more pairs of electric or magnetic poles is provided to compensate for distortion of the beam cross-section due to the deflection.
GB4998/65A 1964-02-04 1965-02-04 Improvements in or relating to the treatment of work-pieces with beams of charged particles Expired GB1078826A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP552164 1964-02-04

Publications (1)

Publication Number Publication Date
GB1078826A true GB1078826A (en) 1967-08-09

Family

ID=11613475

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4998/65A Expired GB1078826A (en) 1964-02-04 1965-02-04 Improvements in or relating to the treatment of work-pieces with beams of charged particles

Country Status (3)

Country Link
US (1) US3371206A (en)
DE (1) DE1540974A1 (en)
GB (1) GB1078826A (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing
DE1514706C2 (en) * 1966-03-15 1975-11-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Deflection system for corpuscular beam devices
US3497602A (en) * 1966-12-16 1970-02-24 Air Reduction Apparatus for producing and directing an electron beam in an electron beam furnace
GB1191191A (en) * 1968-05-08 1970-05-06 Hitachi Ltd Improvements in Electron Microscopes
DE1912235B1 (en) * 1969-03-05 1970-03-19 Siemens Ag Corpuscular beam device with a deflection system and a stigmator
US4090077A (en) * 1969-03-05 1978-05-16 Siemens Aktiengesellschaft Particle beam device with a deflection system and a stigmator
NL7012671A (en) * 1970-08-27 1972-02-29
FR2341922A1 (en) * 1976-02-17 1977-09-16 Cgr Mev IMPROVEMENT TO A TARGET SCANNING DEVICE BY A CHARGED PARTICLE BEAM
US4097745A (en) * 1976-10-13 1978-06-27 General Electric Company High resolution matrix lens electron optical system
JPS542623A (en) * 1977-06-08 1979-01-10 Toshiba Corp Color picture tube of beam-index type
US4180738A (en) * 1977-07-30 1979-12-25 National Research Development Corporation Astigmatism in electron beam probe instruments
US4125772A (en) * 1977-10-13 1978-11-14 American Optical Corporation Scanning electron microscope with eddy-current compensation
NL7711392A (en) * 1977-10-18 1979-04-20 Philips Nv FURNISHINGS WITH A ROOM TUBE.
US4303864A (en) * 1979-10-25 1981-12-01 The United States Of America As Represented By The United States Department Of Energy Sextupole system for the correction of spherical aberration
US4389571A (en) * 1981-04-01 1983-06-21 The United States Of America As Represented By The United States Department Of Energy Multiple sextupole system for the correction of third and higher order aberration
US4958078A (en) * 1989-01-05 1990-09-18 The University Of Michigan Large aperture ion-optical lens system
DE3923899A1 (en) * 1989-07-19 1991-01-31 Leybold Ag METHOD FOR REGULATING THE HIT POSITIONS OF SEVERAL ELECTRON BEAMS ON A MOLT BATH
EP0551027B1 (en) * 1992-01-10 1997-09-17 THOMSON TUBES & DISPLAYS S.A. Magnetic focusing device
SG92590A1 (en) * 1992-03-27 2002-11-19 Thomson Tubes & Displays Permanent magnet focus unit wihh integral astigmatism corrector
US10395887B1 (en) * 2018-02-20 2019-08-27 Technische Universiteit Delft Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
US10504687B2 (en) * 2018-02-20 2019-12-10 Technische Universiteit Delft Signal separator for a multi-beam charged particle inspection apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE481554A (en) * 1947-06-26
NL219031A (en) * 1956-09-07
US2890379A (en) * 1956-09-18 1959-06-09 Chromatic Television Lab Inc Distortion correction in cathode-ray tubes
FR1188277A (en) * 1957-12-12 1959-09-21 Csf Improvements to electrostatic deflection tubes of an electron beam

Also Published As

Publication number Publication date
DE1540974A1 (en) 1970-03-05
US3371206A (en) 1968-02-27

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