GB1065564A - Sputter-ion vacuum pump apparatus - Google Patents

Sputter-ion vacuum pump apparatus

Info

Publication number
GB1065564A
GB1065564A GB7590/65A GB759065A GB1065564A GB 1065564 A GB1065564 A GB 1065564A GB 7590/65 A GB7590/65 A GB 7590/65A GB 759065 A GB759065 A GB 759065A GB 1065564 A GB1065564 A GB 1065564A
Authority
GB
United Kingdom
Prior art keywords
magnets
channels
envelope
bake
anodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7590/65A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1065564A publication Critical patent/GB1065564A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB7590/65A 1964-03-10 1965-02-22 Sputter-ion vacuum pump apparatus Expired GB1065564A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US350848A US3249290A (en) 1964-03-10 1964-03-10 Vacuum pump apparatus

Publications (1)

Publication Number Publication Date
GB1065564A true GB1065564A (en) 1967-04-19

Family

ID=23378447

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7590/65A Expired GB1065564A (en) 1964-03-10 1965-02-22 Sputter-ion vacuum pump apparatus

Country Status (4)

Country Link
US (1) US3249290A (enrdf_load_stackoverflow)
DE (1) DE1302292B (enrdf_load_stackoverflow)
FR (1) FR1423484A (enrdf_load_stackoverflow)
GB (1) GB1065564A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2608365A (en) * 2021-06-25 2023-01-04 Thermo Fisher Scient Bremen Gmbh Improvements relating to Time-of-Flight mass analysers
GB2628048A (en) * 2021-06-25 2024-09-11 Thermo Fisher Scient Bremen Gmbh Improvements relating to Time-of-Flight mass analysers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10840077B2 (en) 2018-06-05 2020-11-17 Trace Matters Scientific Llc Reconfigureable sequentially-packed ion (SPION) transfer device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
NL111716C (enrdf_load_stackoverflow) * 1958-08-01
NL256013A (enrdf_load_stackoverflow) * 1959-09-25
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2608365A (en) * 2021-06-25 2023-01-04 Thermo Fisher Scient Bremen Gmbh Improvements relating to Time-of-Flight mass analysers
GB2628048A (en) * 2021-06-25 2024-09-11 Thermo Fisher Scient Bremen Gmbh Improvements relating to Time-of-Flight mass analysers
GB2608365B (en) * 2021-06-25 2024-11-27 Thermo Fisher Scient Bremen Gmbh Improvements relating toTime-of-Flight mass analysers

Also Published As

Publication number Publication date
US3249290A (en) 1966-05-03
DE1302292B (enrdf_load_stackoverflow)
FR1423484A (fr) 1966-01-03

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