GB1063305A - Pyrolytic silicon nitride - Google Patents

Pyrolytic silicon nitride

Info

Publication number
GB1063305A
GB1063305A GB35033/63A GB3503363A GB1063305A GB 1063305 A GB1063305 A GB 1063305A GB 35033/63 A GB35033/63 A GB 35033/63A GB 3503363 A GB3503363 A GB 3503363A GB 1063305 A GB1063305 A GB 1063305A
Authority
GB
United Kingdom
Prior art keywords
ammonia
hot surface
silicon nitride
nitride
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35033/63A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of GB1063305A publication Critical patent/GB1063305A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
GB35033/63A 1962-09-10 1963-09-05 Pyrolytic silicon nitride Expired GB1063305A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US222662A US3226194A (en) 1962-09-10 1962-09-10 Process for producing silicon nitride and a product thereof

Publications (1)

Publication Number Publication Date
GB1063305A true GB1063305A (en) 1967-03-30

Family

ID=22833171

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35033/63A Expired GB1063305A (en) 1962-09-10 1963-09-05 Pyrolytic silicon nitride

Country Status (4)

Country Link
US (1) US3226194A (de)
CH (1) CH444831A (de)
DE (1) DE1251287C2 (de)
GB (1) GB1063305A (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050932A (de) * 1963-05-30
GB1117788A (en) * 1964-11-27 1968-06-26 Plessey Uk Ltd Improvements relating to silicon nitride
US3413090A (en) * 1965-03-19 1968-11-26 Mallory & Co Inc P R Preparation of silicon nitride whiskers
US4089992A (en) * 1965-10-11 1978-05-16 International Business Machines Corporation Method for depositing continuous pinhole free silicon nitride films and products produced thereby
JPS5128983B1 (de) * 1966-10-28 1976-08-23
US3472689A (en) * 1967-01-19 1969-10-14 Rca Corp Vapor deposition of silicon-nitrogen insulating coatings
US3637423A (en) * 1969-02-10 1972-01-25 Westinghouse Electric Corp Pyrolytic deposition of silicon nitride films
US3983198A (en) * 1975-02-12 1976-09-28 Ford Motor Company Method of increasing the oxidation resistance of silicon nitride
US4058579A (en) * 1975-02-27 1977-11-15 Union Carbide Corporation Process for producing an improved boron nitride crucible
US4036653A (en) * 1975-05-28 1977-07-19 E. I. Du Pont De Nemours And Company Amorphous silicon nitride composition containing carbon, and vapor phase process
GB1518564A (en) * 1975-11-25 1978-07-19 Motorola Inc Method for the low pressure pyrolytic deposition of silicon nitride
JPS6047202B2 (ja) * 1976-01-13 1985-10-21 東北大学金属材料研究所長 超硬高純度の配向多結晶質窒化珪素
US4090851A (en) * 1976-10-15 1978-05-23 Rca Corporation Si3 N4 Coated crucible and die means for growing single crystalline silicon sheets
US4099924A (en) * 1977-03-16 1978-07-11 Rca Corporation Apparatus improvements for growing single crystalline silicon sheets
US4289801A (en) * 1980-05-21 1981-09-15 United Technologies Corporation Method for producing fine grained pyrolytic silicon nitride
US4500483A (en) * 1982-03-19 1985-02-19 United Technologies Corporation Manufacture of hollow CVD silicon nitride articles
DE3448429C2 (de) * 1984-07-20 1993-10-07 United Technologies Corp Verfahren zum Aufbringen eines Schutzüberzugs auf einen Kohlenstoff-Kohlenstoff-Verbundgegenstand
DE3426911A1 (de) * 1984-07-20 1986-01-30 United Technologies Corp., Hartford, Conn. Kohlenstoff-kohlenstoff-verbundgegenstand mit hoher bestaendigkeit gegen einen abbau durch umgebungseinwirkung bei erhoehten temperaturen
US4671845A (en) * 1985-03-22 1987-06-09 The United States Of America As Represented By The Secretary Of The Navy Method for producing high quality germanium-germanium nitride interfaces for germanium semiconductors and device produced thereby
DE3902628A1 (de) * 1989-01-30 1990-08-02 Hauni Elektronik Gmbh Duennschichtmaterial fuer sensoren oder aktuatoren und verfahren zu dessen herstellung
US5298287A (en) * 1993-02-05 1994-03-29 United Technologies Corporation Method of making CVD Si3 N4

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2618565A (en) * 1948-02-26 1952-11-18 Carborundum Co Manufacture of silicon nitride-bonded articles
US2750268A (en) * 1952-05-01 1956-06-12 Union Carbide & Carbon Corp Silicon nitride

Also Published As

Publication number Publication date
DE1251287C2 (de) 1975-10-09
US3226194A (en) 1965-12-28
CH444831A (de) 1967-10-15
DE1251287B (de)

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