GB1050409A - - Google Patents

Info

Publication number
GB1050409A
GB1050409A GB1050409DA GB1050409A GB 1050409 A GB1050409 A GB 1050409A GB 1050409D A GB1050409D A GB 1050409DA GB 1050409 A GB1050409 A GB 1050409A
Authority
GB
United Kingdom
Prior art keywords
geo2
layer
deposited
pattern
amorphuos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of GB1050409A publication Critical patent/GB1050409A/en
Active legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/017Clean surfaces
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/106Masks, special
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/118Oxide films

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Catalysts (AREA)
  • ing And Chemical Polishing (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
GB1050409D 1964-09-04 Active GB1050409A (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB3629064 1964-09-04
GB3629065 1965-07-12

Publications (1)

Publication Number Publication Date
GB1050409A true GB1050409A (https=)

Family

ID=26263065

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1050409D Active GB1050409A (https=) 1964-09-04

Country Status (6)

Country Link
US (1) US3436285A (https=)
BE (1) BE669096A (https=)
CH (1) CH473237A (https=)
DE (1) DE1546171A1 (https=)
GB (1) GB1050409A (https=)
NL (1) NL6511337A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026907B1 (https=) * 1967-12-08 1975-09-04
GB2120278A (en) * 1982-05-14 1983-11-30 Rolls Royce Removing surface oxide layer
US4528043A (en) * 1982-05-14 1985-07-09 Rolls-Royce Limited Surface oxide layer treatment
GB2250517A (en) * 1990-12-06 1992-06-10 Dornier Gmbh Microstructuring superconductive oxide by irradiation using a resist masking technique

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1187611A (en) * 1966-03-23 1970-04-08 Matsushita Electronics Corp Method of manufacturing Semiconductors Device
US3977071A (en) * 1969-09-29 1976-08-31 Texas Instruments Incorporated High depth-to-width ratio etching process for monocrystalline germanium semiconductor materials
US7611588B2 (en) * 2004-11-30 2009-11-03 Ecolab Inc. Methods and compositions for removing metal oxides

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026907B1 (https=) * 1967-12-08 1975-09-04
GB2120278A (en) * 1982-05-14 1983-11-30 Rolls Royce Removing surface oxide layer
US4528043A (en) * 1982-05-14 1985-07-09 Rolls-Royce Limited Surface oxide layer treatment
GB2250517A (en) * 1990-12-06 1992-06-10 Dornier Gmbh Microstructuring superconductive oxide by irradiation using a resist masking technique
GB2250517B (en) * 1990-12-06 1994-09-21 Dornier Gmbh Process for the microstructuring of superconductive oxide ceramics

Also Published As

Publication number Publication date
US3436285A (en) 1969-04-01
CH473237A (de) 1969-05-31
DE1546171A1 (de) 1970-04-16
BE669096A (https=) 1966-03-02
NL6511337A (https=) 1966-03-07

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