GB1034484A - Improvements in or relating to the electrodeposition of copper - Google Patents
Improvements in or relating to the electrodeposition of copperInfo
- Publication number
- GB1034484A GB1034484A GB14632/63A GB1463263A GB1034484A GB 1034484 A GB1034484 A GB 1034484A GB 14632/63 A GB14632/63 A GB 14632/63A GB 1463263 A GB1463263 A GB 1463263A GB 1034484 A GB1034484 A GB 1034484A
- Authority
- GB
- United Kingdom
- Prior art keywords
- compounds
- group
- copper
- compound
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Abstract
Copper plating baths include a poly-ether compound containing at least 3 and preferably 6 ether groups and no aliphatic chain exceeding 6 C atoms together with an organic sulphide group which may be linked to an -SO3H group. Alternatively the polyether and the S-compound may be added as separate compounds. The polyethers include polymers of 1:3 dioxolane as described in Specification 1,020,168, preferably of mol. wt. about 5000. They may contain the group (-C2H4OC2H4O-)x where x is 3 or more, or (-C3H6OC3H6O-)y where y is 3 to 10. The S-compounds include thiols, phenyl disulphides, and have present halogen, alkoxy, and other groups. Phenazine dyes may also be added. The copper salt may be sulphate, fluoborate, or a copper alkyl sulphonate or di-sulphonate. The poly-ethers having a terminal OH group form compounds with alcohols, chlorhydrin, nitriles, sulphonic acids, amides, alkanolamines and other compounds. The S-compound when added as a separate compound, preferably has a sulphonic group which may be used as a salt e.g. of triethanolamine, guanidine, ethylene diamine, or pyridine. A range of examples of poly-ethers and S-compounds are given with graphic formulae. In plating iron and steel, a preliminary flash coat of Cu or Ni is desirable. Preferably phosphorized copper anodes are used in the main plating process.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US187926A US3267010A (en) | 1962-04-16 | 1962-04-16 | Electrodeposition of copper from acidic baths |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1034484A true GB1034484A (en) | 1966-06-29 |
Family
ID=22691053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB14632/63A Expired GB1034484A (en) | 1962-04-16 | 1963-04-11 | Improvements in or relating to the electrodeposition of copper |
Country Status (6)
Country | Link |
---|---|
US (1) | US3267010A (en) |
DE (1) | DE1521062B2 (en) |
FR (1) | FR1361558A (en) |
GB (1) | GB1034484A (en) |
NL (1) | NL291575A (en) |
SE (1) | SE301576B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2141141A (en) * | 1983-06-10 | 1984-12-12 | Omi Int Corp | Electrodepositing copper |
EP1897975A1 (en) * | 2006-09-07 | 2008-03-12 | Enthone, Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
EP1897973A1 (en) * | 2006-09-07 | 2008-03-12 | Enthone, Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
US8366901B2 (en) | 2006-09-07 | 2013-02-05 | Enthone Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3373095A (en) * | 1967-06-05 | 1968-03-12 | Dayton Bright Copper Company | Electroplating of copper |
US3542655A (en) * | 1968-04-29 | 1970-11-24 | M & T Chemicals Inc | Electrodeposition of copper |
DE2028803C3 (en) * | 1970-06-06 | 1980-08-14 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Polymeric phenazonium compounds |
US3715289A (en) * | 1971-02-08 | 1973-02-06 | Stauffer Chemical Co | Brightener composition for acid copper electroplating baths |
US3770598A (en) * | 1972-01-21 | 1973-11-06 | Oxy Metal Finishing Corp | Electrodeposition of copper from acid baths |
US3966565A (en) * | 1972-12-14 | 1976-06-29 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956084A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956079A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956078A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3956120A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
US3940320A (en) * | 1972-12-14 | 1976-02-24 | M & T Chemicals Inc. | Electrodeposition of copper |
US4014760A (en) * | 1974-11-21 | 1977-03-29 | M & T Chemicals Inc. | Electrodeposition of copper |
US4036710A (en) * | 1974-11-21 | 1977-07-19 | M & T Chemicals Inc. | Electrodeposition of copper |
US4036711A (en) * | 1975-12-18 | 1977-07-19 | M & T Chemicals Inc. | Electrodeposition of copper |
US4272335A (en) * | 1980-02-19 | 1981-06-09 | Oxy Metal Industries Corporation | Composition and method for electrodeposition of copper |
US4316778A (en) * | 1980-09-24 | 1982-02-23 | Rca Corporation | Method for the manufacture of recording substrates for capacitance electronic discs |
US4336114A (en) * | 1981-03-26 | 1982-06-22 | Hooker Chemicals & Plastics Corp. | Electrodeposition of bright copper |
US4376685A (en) * | 1981-06-24 | 1983-03-15 | M&T Chemicals Inc. | Acid copper electroplating baths containing brightening and leveling additives |
AU554236B2 (en) * | 1983-06-10 | 1986-08-14 | Omi International Corp. | Electrolyte composition and process for electrodepositing copper |
US4555315A (en) * | 1984-05-29 | 1985-11-26 | Omi International Corporation | High speed copper electroplating process and bath therefor |
US4551212A (en) * | 1985-03-11 | 1985-11-05 | Rca Corporation | Bath and process for the electrodeposition of micromachinable copper and additive for said bath |
US4673467A (en) * | 1986-09-02 | 1987-06-16 | Cbs Inc. | Method of manufacturing fine-grained copper substrate for optical information carrier |
DE4032864A1 (en) * | 1990-10-13 | 1992-04-16 | Schering Ag | ACIDIC BATH FOR THE GALVANIC DEPOSITION OF COPPER COVERS AND METHODS USING THIS COMBINATION |
DE4126502C1 (en) * | 1991-08-07 | 1993-02-11 | Schering Ag Berlin Und Bergkamen, 1000 Berlin, De | |
US5252196A (en) * | 1991-12-05 | 1993-10-12 | Shipley Company Inc. | Copper electroplating solutions and processes |
US5328589A (en) * | 1992-12-23 | 1994-07-12 | Enthone-Omi, Inc. | Functional fluid additives for acid copper electroplating baths |
US6203582B1 (en) * | 1996-07-15 | 2001-03-20 | Semitool, Inc. | Modular semiconductor workpiece processing tool |
US6358388B1 (en) | 1996-07-15 | 2002-03-19 | Semitool, Inc. | Plating system workpiece support having workpiece-engaging electrodes with distal contact-part and dielectric cover |
US5980706A (en) * | 1996-07-15 | 1999-11-09 | Semitool, Inc. | Electrode semiconductor workpiece holder |
US6936153B1 (en) | 1997-09-30 | 2005-08-30 | Semitool, Inc. | Semiconductor plating system workpiece support having workpiece-engaging electrode with pre-conditioned contact face |
US6454926B1 (en) * | 1997-09-30 | 2002-09-24 | Semitool Inc. | Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas |
DE19758121C2 (en) * | 1997-12-17 | 2000-04-06 | Atotech Deutschland Gmbh | Aqueous bath and method for electrolytic deposition of copper layers |
US7244677B2 (en) | 1998-02-04 | 2007-07-17 | Semitool. Inc. | Method for filling recessed micro-structures with metallization in the production of a microelectronic device |
US6197181B1 (en) | 1998-03-20 | 2001-03-06 | Semitool, Inc. | Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece |
US6565729B2 (en) | 1998-03-20 | 2003-05-20 | Semitool, Inc. | Method for electrochemically depositing metal on a semiconductor workpiece |
TWI223678B (en) | 1998-03-20 | 2004-11-11 | Semitool Inc | Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper |
US7247229B2 (en) * | 1999-06-28 | 2007-07-24 | Eltech Systems Corporation | Coatings for the inhibition of undesirable oxidation in an electrochemical cell |
JP2001073182A (en) * | 1999-07-15 | 2001-03-21 | Boc Group Inc:The | Improved acidic copper electroplating solution |
US6391209B1 (en) | 1999-08-04 | 2002-05-21 | Mykrolis Corporation | Regeneration of plating baths |
US6596148B1 (en) | 1999-08-04 | 2003-07-22 | Mykrolis Corporation | Regeneration of plating baths and system therefore |
US6942779B2 (en) * | 2000-05-25 | 2005-09-13 | Mykrolis Corporation | Method and system for regenerating of plating baths |
DE60038061T2 (en) * | 2000-08-18 | 2009-02-12 | Ti Group Automotive Systems Ltd. | Method for plating a metal strip to produce a multi-walled pipe |
US6652731B2 (en) * | 2001-10-02 | 2003-11-25 | Shipley Company, L.L.C. | Plating bath and method for depositing a metal layer on a substrate |
JP3964263B2 (en) * | 2002-05-17 | 2007-08-22 | 株式会社デンソー | Blind via hole filling method and through electrode forming method |
US7025866B2 (en) * | 2002-08-21 | 2006-04-11 | Micron Technology, Inc. | Microelectronic workpiece for electrochemical deposition processing and methods of manufacturing and using such microelectronic workpieces |
DE10261852B3 (en) | 2002-12-20 | 2004-06-03 | Atotech Deutschland Gmbh | Mixture of di-, tri- and other oligomeric phenazinium compounds, used in copper electroplating bath for decorative plating or plating circuit board or semiconductor substrate, is prepared from monomer by diazotization and boiling |
US20040211657A1 (en) * | 2003-04-11 | 2004-10-28 | Ingelbrecht Hugo Gerard Eduard | Method of purifying 2,6-xylenol and method of producing poly(arylene ether) therefrom |
DE10337669B4 (en) * | 2003-08-08 | 2006-04-27 | Atotech Deutschland Gmbh | Aqueous, acid solution and process for the electrodeposition of copper coatings and use of the solution |
US20050092611A1 (en) * | 2003-11-03 | 2005-05-05 | Semitool, Inc. | Bath and method for high rate copper deposition |
DE10354860B4 (en) * | 2003-11-19 | 2008-06-26 | Atotech Deutschland Gmbh | Halogenated or pseudohalogenated monomeric phenazinium compounds, process for their preparation and acid bath containing these compounds and process for the electrolytic deposition of a copper precipitate |
CN1997776A (en) * | 2004-08-18 | 2007-07-11 | 荏原优莱特科技股份有限公司 | Additive for copper plating and process for producing electronic circuit substrate therewith |
DE102005011708B3 (en) | 2005-03-11 | 2007-03-01 | Atotech Deutschland Gmbh | A polyvinylammonium compound and process for the production thereof, and an acidic solution containing the compound and a process for electrolytically depositing a copper precipitate |
JP5525762B2 (en) * | 2008-07-01 | 2014-06-18 | 上村工業株式会社 | Electroless plating solution, electroless plating method using the same, and method for manufacturing wiring board |
TWI433964B (en) | 2010-10-08 | 2014-04-11 | Water Star Inc | Multi-layer mixed metal oxide electrode and method for making same |
CN102523785B (en) * | 2012-01-19 | 2013-10-02 | 南京农业大学 | Application of safranine T in seed dye mark tracing aspect |
ES2761883T3 (en) * | 2017-06-16 | 2020-05-21 | Atotech Deutschland Gmbh | Aqueous acid copper electroplating bath and method for electrolytically depositing a copper coating |
US11668017B2 (en) | 2018-07-30 | 2023-06-06 | Water Star, Inc. | Current reversal tolerant multilayer material, method of making the same, use as an electrode, and use in electrochemical processes |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL178453B (en) * | 1952-05-26 | Mita Industrial Co Ltd | PROCEDURE FOR ELECTROSTATIC COPYING. | |
DE1075398B (en) * | 1954-03-22 | 1960-02-11 | DEHYDAG Deutsche Hydrierwerke G.m.b.H., Düsseldorf | Bath for the galvanic production of metal coatings |
NL110592C (en) * | 1956-06-15 | |||
US3021266A (en) * | 1957-08-12 | 1962-02-13 | Barnet D Ostrow | Additive for copper plating bath |
US3030282A (en) * | 1961-05-02 | 1962-04-17 | Metal & Thermit Corp | Electrodeposition of copper |
DE1133610B (en) * | 1959-06-06 | 1962-07-19 | Dehydag Gmbh | Acid galvanic copper baths |
-
0
- NL NL291575D patent/NL291575A/xx unknown
-
1962
- 1962-04-16 US US187926A patent/US3267010A/en not_active Expired - Lifetime
-
1963
- 1963-04-09 SE SE3974/63A patent/SE301576B/xx unknown
- 1963-04-11 GB GB14632/63A patent/GB1034484A/en not_active Expired
- 1963-04-16 DE DE19631521062 patent/DE1521062B2/en not_active Ceased
- 1963-04-16 FR FR931603A patent/FR1361558A/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2141141A (en) * | 1983-06-10 | 1984-12-12 | Omi Int Corp | Electrodepositing copper |
EP1897975A1 (en) * | 2006-09-07 | 2008-03-12 | Enthone, Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
EP1897973A1 (en) * | 2006-09-07 | 2008-03-12 | Enthone, Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
US8366901B2 (en) | 2006-09-07 | 2013-02-05 | Enthone Inc. | Deposition of conductive polymer and metallization of non-conductive substrates |
Also Published As
Publication number | Publication date |
---|---|
DE1521062A1 (en) | 1969-08-14 |
NL291575A (en) | |
US3267010A (en) | 1966-08-16 |
SE301576B (en) | 1968-06-10 |
DE1521062B2 (en) | 1971-11-18 |
FR1361558A (en) | 1964-05-22 |
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