GB1000560A - Electron probe system - Google Patents

Electron probe system

Info

Publication number
GB1000560A
GB1000560A GB35345/61A GB3534561A GB1000560A GB 1000560 A GB1000560 A GB 1000560A GB 35345/61 A GB35345/61 A GB 35345/61A GB 3534561 A GB3534561 A GB 3534561A GB 1000560 A GB1000560 A GB 1000560A
Authority
GB
United Kingdom
Prior art keywords
cathode
scan
specimen
line
sawtooth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35345/61A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ELION INSTRUMENTS Inc
Original Assignee
ELION INSTRUMENTS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ELION INSTRUMENTS Inc filed Critical ELION INSTRUMENTS Inc
Publication of GB1000560A publication Critical patent/GB1000560A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Details Of Television Scanning (AREA)
GB35345/61A 1961-03-02 1961-09-29 Electron probe system Expired GB1000560A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US92889A US3235727A (en) 1961-03-02 1961-03-02 Electron probe system

Publications (1)

Publication Number Publication Date
GB1000560A true GB1000560A (en) 1965-08-04

Family

ID=22235657

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35345/61A Expired GB1000560A (en) 1961-03-02 1961-09-29 Electron probe system

Country Status (3)

Country Link
US (1) US3235727A (enExample)
GB (1) GB1000560A (enExample)
NL (1) NL270945A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034439B1 (enExample) * 1969-05-16 1975-11-08
JPS515315B1 (enExample) * 1969-05-16 1976-02-19

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (de) * 1964-07-24 1969-07-17 Steigerwald Strahltech Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten
US3337729A (en) * 1964-11-27 1967-08-22 Richard E Thomas Method and apparatus for investigating variations in surface work function by electron beam scanning
US3435211A (en) * 1966-01-04 1969-03-25 Stanford Research Inst Gaseous glow discharge tube with cathode means surrounding anode means
US3341704A (en) * 1966-02-07 1967-09-12 Richard E Thomas System for investigating work function distribution and field distribution of a surface by electron beam scanning
US3488494A (en) * 1967-06-15 1970-01-06 Atomic Energy Commission Ion microscope the image of which represents the intensity of secondary radiation as a function of the position of the primary ions causing the radiation
US3502870A (en) * 1967-07-05 1970-03-24 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
GB1280013A (en) * 1969-09-05 1972-07-05 Atomic Energy Authority Uk Improvements in or relating to apparatus bombarding a target with ions
US3761676A (en) * 1971-05-20 1973-09-25 Farland G Mc Portable electron beam welding apparatus
US3986027A (en) * 1975-04-07 1976-10-12 American Optical Corporation Stereo scanning microprobe
US4214267A (en) * 1977-11-23 1980-07-22 Roese John A Stereofluoroscopy system
JPH0238850A (ja) * 1988-07-28 1990-02-08 Jeol Ltd Ｘ線分光器を用いた定性分析方法
US6826255B2 (en) * 2003-03-26 2004-11-30 General Electric Company X-ray inspection system and method of operating

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2418029A (en) * 1943-10-08 1947-03-25 Rca Corp Electron probe analysis employing X-ray spectrography
US2439324A (en) * 1945-08-01 1948-04-06 Us Sec War Electrical circuit
US2916621A (en) * 1958-04-24 1959-12-08 California Inst Res Found Electron probe microanalyzer
US2914697A (en) * 1959-04-08 1959-11-24 Vernon L Smith Time calibrated oscilloscope sweep circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034439B1 (enExample) * 1969-05-16 1975-11-08
JPS515315B1 (enExample) * 1969-05-16 1976-02-19

Also Published As

Publication number Publication date
US3235727A (en) 1966-02-15
NL270945A (enExample)

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