GB1000456A - Semiconductor piezoresistance device - Google Patents

Semiconductor piezoresistance device

Info

Publication number
GB1000456A
GB1000456A GB39639/61A GB3963961A GB1000456A GB 1000456 A GB1000456 A GB 1000456A GB 39639/61 A GB39639/61 A GB 39639/61A GB 3963961 A GB3963961 A GB 3963961A GB 1000456 A GB1000456 A GB 1000456A
Authority
GB
United Kingdom
Prior art keywords
type
bar
active
regions
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB39639/61A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of GB1000456A publication Critical patent/GB1000456A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R21/00—Variable-resistance transducers
    • H04R21/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
GB39639/61A 1960-11-15 1961-11-06 Semiconductor piezoresistance device Expired GB1000456A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6949360A 1960-11-15 1960-11-15

Publications (1)

Publication Number Publication Date
GB1000456A true GB1000456A (en) 1965-08-04

Family

ID=22089358

Family Applications (1)

Application Number Title Priority Date Filing Date
GB39639/61A Expired GB1000456A (en) 1960-11-15 1961-11-06 Semiconductor piezoresistance device

Country Status (2)

Country Link
GB (1) GB1000456A (enrdf_load_stackoverflow)
NL (1) NL271209A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493912A (en) * 1966-10-25 1970-02-03 Ether Eng Ltd Strain responsive transducer means of the diaphragm type
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
EP0269759A1 (en) * 1986-12-02 1988-06-08 B.E.E. Co. Ltd. Semiconductor strain gauge
US4825696A (en) * 1986-03-20 1989-05-02 Robert Bosch Gmbh Acceleration detector
US4955234A (en) * 1988-05-03 1990-09-11 Robert Bosch Gmbh Sensor
US5212986A (en) * 1990-11-30 1993-05-25 Mitsubishi Denki Kabushiki Kaisha Semiconductor acceleration sensor including off axis acceleration cancellation
WO2006055731A1 (en) * 2004-11-17 2006-05-26 The Regents Of The University Of California Microelectromechanical systems contact stress sensor
EP2398264A2 (en) 2010-06-17 2011-12-21 Vodafone IP Licensing Limited Fallback between radio access technologies

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493912A (en) * 1966-10-25 1970-02-03 Ether Eng Ltd Strain responsive transducer means of the diaphragm type
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
US4825696A (en) * 1986-03-20 1989-05-02 Robert Bosch Gmbh Acceleration detector
EP0269759A1 (en) * 1986-12-02 1988-06-08 B.E.E. Co. Ltd. Semiconductor strain gauge
US4955234A (en) * 1988-05-03 1990-09-11 Robert Bosch Gmbh Sensor
US5212986A (en) * 1990-11-30 1993-05-25 Mitsubishi Denki Kabushiki Kaisha Semiconductor acceleration sensor including off axis acceleration cancellation
WO2006055731A1 (en) * 2004-11-17 2006-05-26 The Regents Of The University Of California Microelectromechanical systems contact stress sensor
EP2398264A2 (en) 2010-06-17 2011-12-21 Vodafone IP Licensing Limited Fallback between radio access technologies

Also Published As

Publication number Publication date
NL271209A (enrdf_load_stackoverflow)

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