FR94791E - Appareil servant a positionner des articles sur un substrat. - Google Patents
Appareil servant a positionner des articles sur un substrat.Info
- Publication number
- FR94791E FR94791E FR9198A FR06009198A FR94791E FR 94791 E FR94791 E FR 94791E FR 9198 A FR9198 A FR 9198A FR 06009198 A FR06009198 A FR 06009198A FR 94791 E FR94791 E FR 94791E
- Authority
- FR
- France
- Prior art keywords
- substrate
- positioning articles
- articles
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
- B23Q1/4852—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
- B23Q1/4866—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single sliding pair
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Position Or Direction (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64870467A | 1967-06-26 | 1967-06-26 | |
US64881467A | 1967-06-26 | 1967-06-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR94791E true FR94791E (fr) | 1969-11-21 |
Family
ID=24602352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9198A Expired FR94791E (fr) | 1967-06-26 | 1968-06-11 | Appareil servant a positionner des articles sur un substrat. |
Country Status (4)
Country | Link |
---|---|
US (1) | US3466514A (fr) |
DE (1) | DE1752620A1 (fr) |
FR (1) | FR94791E (fr) |
GB (1) | GB1218855A (fr) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3786332A (en) * | 1969-03-19 | 1974-01-15 | Thomson Houston Comp Francaise | Micro positioning apparatus |
US3622856A (en) * | 1969-08-18 | 1971-11-23 | Computervision Corp | Automatic planar photoelectric registration assembly and servo driving apparatus therefor |
FR2069876A1 (fr) * | 1969-11-25 | 1971-09-10 | Thomson Csf | |
US3626769A (en) * | 1970-04-06 | 1971-12-14 | Ibm | Apparatus for positioning workpieces in selected translational and rotational orientations |
US3700901A (en) * | 1970-08-21 | 1972-10-24 | Crest Foam Corp | Apparatus for locating the geometric center of a workpiece |
US3739247A (en) * | 1971-05-17 | 1973-06-12 | Canon Kk | Positioning device using photoelectric scanning |
FR2146106B1 (fr) * | 1971-07-16 | 1977-08-05 | Thomson Csf | |
US3796497A (en) * | 1971-12-01 | 1974-03-12 | Ibm | Optical alignment method and apparatus |
US3889164A (en) * | 1973-01-24 | 1975-06-10 | Handotai Kenkyu Shinkokai | Position control system using magnetic forces for correcting the inclination of a controlled member including a torsional mounting |
US3838274A (en) * | 1973-03-30 | 1974-09-24 | Western Electric Co | Electro-optical article positioning system |
US3809987A (en) * | 1973-04-06 | 1974-05-07 | Magnetic Analysis Corp | Automatic centering of objects in non-destructive test apparatus |
US3864564A (en) * | 1973-09-26 | 1975-02-04 | Corning Glass Works | Acquisition system for slide analysis |
US3920949A (en) * | 1974-03-13 | 1975-11-18 | Mallory & Co Inc P R | Beam leaded device welding machine |
US4019109A (en) * | 1974-05-13 | 1977-04-19 | Hughes Aircraft Company | Alignment system and method with micromovement stage |
JPS51131274A (en) * | 1975-05-10 | 1976-11-15 | Fujitsu Ltd | Tip bonding method |
CH595941A5 (fr) * | 1976-03-02 | 1978-02-28 | Fischer Ag Georg | |
US4203064A (en) * | 1977-04-05 | 1980-05-13 | Tokyo Shibaura Electric Co., Ltd. | Method for automatically controlling the position of small objects |
US4125798A (en) * | 1977-04-11 | 1978-11-14 | Miller C Fredrick | Method and means for locating process points on miniaturized circuits |
US4191916A (en) * | 1977-11-23 | 1980-03-04 | Fujitsu Limited | Table positioning system including optical reference position measuring transducer |
JPS5478581A (en) * | 1977-12-05 | 1979-06-22 | Toshiba Mach Co Ltd | Centering method in lathe and its device |
JPS55154740A (en) * | 1979-05-23 | 1980-12-02 | Hitachi Ltd | Wire bonding device |
CH633740A5 (fr) * | 1980-01-25 | 1982-12-31 | Charmilles Sa Ateliers | Machine-outil comprenant une table mobile. |
US4302267A (en) * | 1980-02-20 | 1981-11-24 | General Dynamics, Pomona Division | Optical fiber mating apparatus and method |
JPS5890732A (ja) * | 1981-11-25 | 1983-05-30 | Toshiba Corp | 搬送装置 |
DE3219502C2 (de) * | 1982-05-25 | 1990-04-19 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Vorrichtung zum automatischen Transport scheibenförmiger Objekte |
US4691987A (en) * | 1983-07-08 | 1987-09-08 | Itek Graphix Corp. | Optical fiber cable producer and method of bonding optical fibers to light emitting diodes |
DE3443945A1 (de) * | 1984-12-01 | 1986-06-05 | Scharmann GmbH & Co, 4050 Mönchengladbach | Verfahren und vorrichtung zum spanabhebenden bearbeiten von gussrohlingen |
NL8500930A (nl) * | 1985-03-29 | 1986-10-16 | Philips Nv | Verplaatsingsinrichting met voorgespannen contactloze lagers. |
US4981409A (en) * | 1985-04-16 | 1991-01-01 | Canon Kabushiki Kaisha | Cartridge auto changer |
US4657475A (en) * | 1985-09-23 | 1987-04-14 | Sumitomo Rubber Industries, Ltd. | Method for positioning seamed balls |
DE3605110A1 (de) * | 1986-02-18 | 1987-08-20 | Hbs Heberle Bolzenschweiss Sys | Verfahren zur nullpunkt-ermittlung eines schweisselementehalters auf einem koordinaten-schweisstisch und vorrichtung zur durchfuehrung des verfahrens |
IT1196884B (it) * | 1986-12-30 | 1988-11-25 | Prima Ind Spa | Dispositivo manipolatore robotizzato ed impianto di piegatura di lamiere munito di tale dispositivo |
ATE69318T1 (de) * | 1987-02-27 | 1991-11-15 | Hbs Heberle Bolzenschweiss Sys | Verfahren zur nullpunkt-ermittlung eines schweisselementehalters auf einem koordinatenschweisstisch und vorrichtung zur durchfuehrung des verfahrens. |
JP2508540B2 (ja) * | 1987-11-02 | 1996-06-19 | 三菱マテリアル株式会社 | ウェ―ハの位置検出装置 |
DE68911330T2 (de) * | 1988-02-08 | 1994-05-26 | Toshiba Kawasaki Kk | Vorrichtung mit einem Ausrichtungsgestell. |
US5140242A (en) * | 1990-04-30 | 1992-08-18 | International Business Machines Corporation | Servo guided stage system |
IT1241889B (it) * | 1990-08-08 | 1994-02-01 | Giben Impianti Spa | Apparato per ruotare un pannello o pacco di pannelli, per diversamente orientare il pacco stesso nei confronti della linea di taglio di una sezionatrice |
DE4114284C2 (de) * | 1991-05-02 | 1993-10-07 | Juergen Dipl Ing Pickenhan | Vorrichtung zum Behandeln oder Bearbeiten eines Werkstückes, insbesondere einer Schaltkarte |
DE4137015A1 (de) * | 1991-11-11 | 1993-05-13 | Hilger & Kern Gmbh | Vorrichtung zum positionieren einer funktionseinheit |
DE4202989C2 (de) * | 1992-02-03 | 1995-04-13 | Trummer Achim Dr Ing Habil | Flexibles Vorrichtungssystem in modularer Bauweise |
WO1993022099A1 (fr) * | 1992-05-07 | 1993-11-11 | Fankhauser, Peter | Dispositif permettant le positionnement en parallele d'un systeme de fraisage et procede permettant de faire fonctionner ledit dispositif |
DE4325450A1 (de) * | 1993-07-29 | 1995-02-02 | Bacher Graphische Geraete Gmbh | Tischverstellvorrichtung |
US5660381A (en) * | 1994-02-07 | 1997-08-26 | Ushiodenki Kabushiki Kaisha | Carrier device |
US6764272B1 (en) | 1999-05-27 | 2004-07-20 | Micron Technology, Inc. | Adjustable coarse alignment tooling for packaged semiconductor devices |
IT1320963B1 (it) * | 2000-03-30 | 2003-12-18 | Giben Impianti Spa | Procedimento e dispositivo per effettuare una serie di tagli aventidifferenti orientazioni su uno o piu' pannelli per mezzo di una |
KR100613168B1 (ko) * | 2004-10-01 | 2006-08-17 | 삼성전자주식회사 | 반도체소자 테스트용 인서트 블럭 |
US7726540B2 (en) * | 2005-12-12 | 2010-06-01 | Asm Assembly Automation Ltd. | Apparatus and method for arranging devices for processing |
US20080127848A1 (en) * | 2006-03-28 | 2008-06-05 | Deis Robert M | Methods and apparatuses for making lithographic plates |
JP4849227B2 (ja) * | 2006-07-31 | 2012-01-11 | 株式会社ダイフク | 荷位置ずれ自動矯正装置 |
CN101689492B (zh) * | 2007-07-12 | 2012-04-04 | 应用材料公司 | 处理基板边缘区域的装置与方法 |
DE102012205805B4 (de) * | 2012-04-10 | 2020-11-19 | Vitesco Technologies GmbH | Vorrichtung zur Ausrichtung eines Aktuators eines Abgasturboladers |
US10679883B2 (en) * | 2012-04-19 | 2020-06-09 | Intevac, Inc. | Wafer plate and mask arrangement for substrate fabrication |
CN103465057A (zh) * | 2013-08-30 | 2013-12-25 | 安徽池州家用机床股份有限公司 | 一种掛脚车夹具 |
US10041973B2 (en) * | 2013-09-04 | 2018-08-07 | Infineon Technologies Ag | Method and apparatus for dynamic alignment of semiconductor devices |
KR101650398B1 (ko) * | 2015-09-11 | 2016-08-24 | (주)코맷 | 계측기용 웨이퍼 센터링 디바이스 |
CN110876237A (zh) * | 2018-08-30 | 2020-03-10 | 八目科技有限公司 | 一种电路板的自动定位方法与结构 |
CN114043000B (zh) * | 2021-12-01 | 2022-12-06 | 广东珩佳智能科技有限公司 | 一种用于模具加工生产中的切割加工装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3188879A (en) * | 1961-07-03 | 1965-06-15 | Conley micromanipulator | |
US3390315A (en) * | 1963-04-05 | 1968-06-25 | Giddings & Lewis | Apparatus for numerical control of a multiaxes machine tool including interpolation and feedrate control |
US3371256A (en) * | 1964-12-07 | 1968-02-27 | Seneca Falls Machine Co | Machine control system including control in two directions and about a third axis |
-
1967
- 1967-06-26 US US648814A patent/US3466514A/en not_active Expired - Lifetime
-
1968
- 1968-06-11 FR FR9198A patent/FR94791E/fr not_active Expired
- 1968-06-14 GB GB28406/68A patent/GB1218855A/en not_active Expired
- 1968-06-24 DE DE19681752620 patent/DE1752620A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
DE1752620A1 (de) | 1971-05-27 |
US3466514A (en) | 1969-09-09 |
GB1218855A (en) | 1971-01-13 |
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