FR1496697A - Appareil de revêtement de la surface d'un substrat - Google Patents

Appareil de revêtement de la surface d'un substrat

Info

Publication number
FR1496697A
FR1496697A FR80229A FR80229A FR1496697A FR 1496697 A FR1496697 A FR 1496697A FR 80229 A FR80229 A FR 80229A FR 80229 A FR80229 A FR 80229A FR 1496697 A FR1496697 A FR 1496697A
Authority
FR
France
Prior art keywords
coating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR80229A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Precision Inc
Original Assignee
General Precision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US498958A external-priority patent/US3404084A/en
Application filed by General Precision Inc filed Critical General Precision Inc
Priority to FR80229A priority Critical patent/FR1496697A/fr
Application granted granted Critical
Publication of FR1496697A publication Critical patent/FR1496697A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
FR80229A 1965-10-20 1966-10-17 Appareil de revêtement de la surface d'un substrat Expired FR1496697A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR80229A FR1496697A (fr) 1965-10-20 1966-10-17 Appareil de revêtement de la surface d'un substrat

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US498958A US3404084A (en) 1965-10-20 1965-10-20 Apparatus for depositing ionized electron beam evaporated material on a negatively biased substrate
FR80229A FR1496697A (fr) 1965-10-20 1966-10-17 Appareil de revêtement de la surface d'un substrat

Publications (1)

Publication Number Publication Date
FR1496697A true FR1496697A (fr) 1967-09-29

Family

ID=26173692

Family Applications (1)

Application Number Title Priority Date Filing Date
FR80229A Expired FR1496697A (fr) 1965-10-20 1966-10-17 Appareil de revêtement de la surface d'un substrat

Country Status (1)

Country Link
FR (1) FR1496697A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0158972A2 (fr) * 1984-04-12 1985-10-23 Plasco Dr. Ehrich Plasma-Coating GmbH Procédé et dispositif pour vaporiser un matériau dans une enceinte sous vide à l'aide d'une décharge d'arc
DE4042337C1 (en) * 1990-08-22 1991-09-12 Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De Controlling degree of ionisation of vapour for surface coating - by preventing straight line current flow between hot anode target surface and cold cathode by using movable wall between them
US5096558A (en) * 1984-04-12 1992-03-17 Plasco Dr. Ehrich Plasma - Coating Gmbh Method and apparatus for evaporating material in vacuum

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0158972A2 (fr) * 1984-04-12 1985-10-23 Plasco Dr. Ehrich Plasma-Coating GmbH Procédé et dispositif pour vaporiser un matériau dans une enceinte sous vide à l'aide d'une décharge d'arc
EP0158972A3 (en) * 1984-04-12 1987-03-25 Horst Dr. Ehrich Method and apparatus for the vaporisation of a material in a vacuum chamber by an arc discharge
US5096558A (en) * 1984-04-12 1992-03-17 Plasco Dr. Ehrich Plasma - Coating Gmbh Method and apparatus for evaporating material in vacuum
DE4042337C1 (en) * 1990-08-22 1991-09-12 Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De Controlling degree of ionisation of vapour for surface coating - by preventing straight line current flow between hot anode target surface and cold cathode by using movable wall between them
DE4026494A1 (de) * 1990-08-22 1992-02-27 Ehrich Plasma Coating Vorrichtung zur materialverdampfung mittels vakuumlichtbogenentladung und verfahren

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