FR94385E - Source pour évaporation sous vide. - Google Patents
Source pour évaporation sous vide.Info
- Publication number
- FR94385E FR94385E FR139874A FR139874A FR94385E FR 94385 E FR94385 E FR 94385E FR 139874 A FR139874 A FR 139874A FR 139874 A FR139874 A FR 139874A FR 94385 E FR94385 E FR 94385E
- Authority
- FR
- France
- Prior art keywords
- source
- vacuum evaporation
- evaporation
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR139874A FR94385E (fr) | 1967-11-06 | 1968-02-14 | Source pour évaporation sous vide. |
GB48427/68A GB1220110A (en) | 1967-11-06 | 1968-10-11 | Apparatus for producing a metallic vapour |
BE722796D BE722796A (xx) | 1967-11-06 | 1968-10-24 | |
DE19681805246 DE1805246C3 (de) | 1967-11-06 | 1968-10-25 | Vorrichtung zum Aufdampfen von Metallen unter Vakuum |
US772281A US3541301A (en) | 1967-11-06 | 1968-10-31 | Source for evaporation in a vacuum |
NL6815791A NL6815791A (xx) | 1967-11-06 | 1968-11-06 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR127093 | 1967-11-06 | ||
FR139874A FR94385E (fr) | 1967-11-06 | 1968-02-14 | Source pour évaporation sous vide. |
Publications (1)
Publication Number | Publication Date |
---|---|
FR94385E true FR94385E (fr) | 1969-08-08 |
Family
ID=26180552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR139874A Expired FR94385E (fr) | 1967-11-06 | 1968-02-14 | Source pour évaporation sous vide. |
Country Status (5)
Country | Link |
---|---|
US (1) | US3541301A (xx) |
BE (1) | BE722796A (xx) |
FR (1) | FR94385E (xx) |
GB (1) | GB1220110A (xx) |
NL (1) | NL6815791A (xx) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4264803A (en) * | 1978-01-10 | 1981-04-28 | Union Carbide Corporation | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
US5182567A (en) * | 1990-10-12 | 1993-01-26 | Custom Metallizing Services, Inc. | Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means |
US5383969A (en) * | 1993-04-05 | 1995-01-24 | Cvd, Inc. | Process and apparatus for supplying zinc vapor continuously to a chemical vapor deposition process from a continuous supply of solid zinc |
US6229956B1 (en) * | 2000-03-22 | 2001-05-08 | Advanced Ceramics Corporation | Flash evaporator vessel |
CN1332061C (zh) * | 2000-12-14 | 2007-08-15 | 通用电气公司 | 闪蒸器皿 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2664853A (en) * | 1952-05-12 | 1954-01-05 | Nat Res Corp | Apparatus for vapor coating |
US3036549A (en) * | 1957-05-08 | 1962-05-29 | Sumitomo Electric Industries | Apparatus for vacuum evaporation of metals |
GB900205A (en) * | 1957-07-15 | 1962-07-04 | Richard John Fletcher | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum |
-
1968
- 1968-02-14 FR FR139874A patent/FR94385E/fr not_active Expired
- 1968-10-11 GB GB48427/68A patent/GB1220110A/en not_active Expired
- 1968-10-24 BE BE722796D patent/BE722796A/xx unknown
- 1968-10-31 US US772281A patent/US3541301A/en not_active Expired - Lifetime
- 1968-11-06 NL NL6815791A patent/NL6815791A/xx not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
BE722796A (xx) | 1969-04-24 |
DE1805246A1 (de) | 1969-06-19 |
US3541301A (en) | 1970-11-17 |
GB1220110A (en) | 1971-01-20 |
DE1805246B2 (de) | 1977-02-03 |
NL6815791A (xx) | 1969-05-08 |
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