FR3129991B1 - Ligne de vide, dispositif de pompage destiné à être raccordé à la ligne de vide et installation comportant la ligne de vide - Google Patents

Ligne de vide, dispositif de pompage destiné à être raccordé à la ligne de vide et installation comportant la ligne de vide Download PDF

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Publication number
FR3129991B1
FR3129991B1 FR2113165A FR2113165A FR3129991B1 FR 3129991 B1 FR3129991 B1 FR 3129991B1 FR 2113165 A FR2113165 A FR 2113165A FR 2113165 A FR2113165 A FR 2113165A FR 3129991 B1 FR3129991 B1 FR 3129991B1
Authority
FR
France
Prior art keywords
vacuum line
pumping device
installation
device intended
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2113165A
Other languages
English (en)
Other versions
FR3129991A1 (fr
Inventor
Pascal Moine
Emmanuel Beaujon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2113165A priority Critical patent/FR3129991B1/fr
Priority to PCT/EP2022/082460 priority patent/WO2023104476A1/fr
Publication of FR3129991A1 publication Critical patent/FR3129991A1/fr
Application granted granted Critical
Publication of FR3129991B1 publication Critical patent/FR3129991B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06—Cooling; Heating; Prevention of freezing
    • F04B39/062—Cooling by injecting a liquid in the gas to be compressed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
    • F04C29/0014—Injection of a fluid in the working chamber for sealing, cooling and lubricating with control systems for the injection of the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L’invention se rapporte à une ligne de vide (1) comportant un dispositif (3) de pompage comprenant au moins une pompe à vide (4) primaire. Selon l’invention, la ligne de vide (1) comporte un système (5) d’injection d’éléments en suspension dans la ligne de vide (1) afin de former un aérosol dans la ligne de vide (1) pour utiliser au moins une partie des éléments en suspension dans l’aérosol pour absorber, par changement d’état, au moins une partie de la chaleur induite par compression ayant lieu dans la pompe à vide (4) primaire. Figure pour l’abrégé : figure 1
FR2113165A 2021-12-08 2021-12-08 Ligne de vide, dispositif de pompage destiné à être raccordé à la ligne de vide et installation comportant la ligne de vide Active FR3129991B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2113165A FR3129991B1 (fr) 2021-12-08 2021-12-08 Ligne de vide, dispositif de pompage destiné à être raccordé à la ligne de vide et installation comportant la ligne de vide
PCT/EP2022/082460 WO2023104476A1 (fr) 2021-12-08 2022-11-18 Conduite à vide, dispositif de pompage destiné à être raccordé à la conduite à vide, et installation comprenant la conduite à vide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2113165A FR3129991B1 (fr) 2021-12-08 2021-12-08 Ligne de vide, dispositif de pompage destiné à être raccordé à la ligne de vide et installation comportant la ligne de vide
FR2113165 2021-12-08

Publications (2)

Publication Number Publication Date
FR3129991A1 FR3129991A1 (fr) 2023-06-09
FR3129991B1 true FR3129991B1 (fr) 2024-04-19

Family

ID=80786452

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2113165A Active FR3129991B1 (fr) 2021-12-08 2021-12-08 Ligne de vide, dispositif de pompage destiné à être raccordé à la ligne de vide et installation comportant la ligne de vide

Country Status (2)

Country Link
FR (1) FR3129991B1 (fr)
WO (1) WO2023104476A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB966752A (en) * 1959-09-08 1964-08-12 Svenska Rotor Maskiner Ab Improvements in and relating to screw rotor compressors or vacuum pumps
DE2853264A1 (de) * 1978-12-09 1980-06-19 Rietschle Masch App Verfahren und einrichtung zur einspritzkuehlung von vakuumpumpen
US10047747B2 (en) * 2013-01-21 2018-08-14 Sterling Industry Consult Gmbh Pump assembly and method for evacuating a vapor-filled chamber
JP2018513296A (ja) * 2015-03-30 2018-05-24 ハイコア テクノロジーズ インク．Ｈｉｃｏｒ Ｔｅｃｈｎｏｌｏｇｉｅｓ，Ｉｎｃ． 液体噴射冷却機能を備えた圧縮機
EP3387258B1 (fr) * 2015-12-11 2020-02-12 Atlas Copco Airpower Procédé de régulation de l'injection de liquide d'un compresseur, compresseur à injection de liquide et élément compresseur à injection de liquide

Also Published As

Publication number Publication date
FR3129991A1 (fr) 2023-06-09
WO2023104476A1 (fr) 2023-06-15

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