FR3120489B1 - Dispositif capteur à ondes acoustiques à deux ports - Google Patents

Dispositif capteur à ondes acoustiques à deux ports Download PDF

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Publication number
FR3120489B1
FR3120489B1 FR2102073A FR2102073A FR3120489B1 FR 3120489 B1 FR3120489 B1 FR 3120489B1 FR 2102073 A FR2102073 A FR 2102073A FR 2102073 A FR2102073 A FR 2102073A FR 3120489 B1 FR3120489 B1 FR 3120489B1
Authority
FR
France
Prior art keywords
material layer
formed above
quartz material
sensor device
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2102073A
Other languages
English (en)
Other versions
FR3120489A1 (fr
Inventor
Sylvain Ballandras
Thierry Laroche
Julien Garcia
Emilie Courjon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Frecnsys SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Frecnsys SAS filed Critical Frecnsys SAS
Priority to FR2102073A priority Critical patent/FR3120489B1/fr
Priority to US18/549,023 priority patent/US20240154603A1/en
Priority to PCT/EP2022/055415 priority patent/WO2022184833A1/fr
Priority to JP2023547062A priority patent/JP2024512195A/ja
Priority to EP22713359.2A priority patent/EP4302401A1/fr
Publication of FR3120489A1 publication Critical patent/FR3120489A1/fr
Application granted granted Critical
Publication of FR3120489B1 publication Critical patent/FR3120489B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
    • G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
    • G01K11/265—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies using surface acoustic wave [SAW]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G01N29/2443—Quartz crystal probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2462—Probes with waveguides, e.g. SAW devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6459—Coupled resonator filters having two acoustic tracks being electrically coupled via one connecting electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6469—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes
    • H03H9/6476—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes the tracks being electrically parallel
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6486—Coupled resonator filters having crossing or intersecting acoustic tracks, e.g. intersection in a perpendicular or diagonal orientation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency

Abstract

La présente invention concerne un dispositif capteur à ondes acoustiques comprenant une surface de couche de matériau de quartz ; agencés le long d’un premier axe, un premier transducteur interdigité formé au-dessus de la surface plane de la couche de matériau de quartz, une première structure de réflexion formée au-dessus de la surface plane de la couche de matériau, et une deuxième structure de réflexion formée au-dessus de la surface plane de la couche de matériau de quartz ; et agencés le long d’un second axe, un second transducteur interdigité formé au-dessus de la surface plane de la couche de matériau de quartz, une troisième structure de réflexion formée au-dessus de la surface plane de la couche de matériau de quartz, et une quatrième structure de réflexion formée au-dessus de la surface plane de la couche de matériau de quartz ; et dans lequel le premier axe et le second axe sont inclinés l’un par rapport à l’autre selon un angle fini. Figure pour l’abrégé : Figure 2
FR2102073A 2021-03-03 2021-03-03 Dispositif capteur à ondes acoustiques à deux ports Active FR3120489B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2102073A FR3120489B1 (fr) 2021-03-03 2021-03-03 Dispositif capteur à ondes acoustiques à deux ports
US18/549,023 US20240154603A1 (en) 2021-03-03 2022-03-03 Two-port acoustic wave sensor device
PCT/EP2022/055415 WO2022184833A1 (fr) 2021-03-03 2022-03-03 Dispositif de capteur d'onde acoustique à deux orifices
JP2023547062A JP2024512195A (ja) 2021-03-03 2022-03-03 ２ポート弾性波センサデバイス
EP22713359.2A EP4302401A1 (fr) 2021-03-03 2022-03-03 Dispositif de capteur d'onde acoustique à deux orifices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2102073 2021-03-03
FR2102073A FR3120489B1 (fr) 2021-03-03 2021-03-03 Dispositif capteur à ondes acoustiques à deux ports

Publications (2)

Publication Number Publication Date
FR3120489A1 FR3120489A1 (fr) 2022-09-09
FR3120489B1 true FR3120489B1 (fr) 2023-10-20

Family

ID=76283844

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2102073A Active FR3120489B1 (fr) 2021-03-03 2021-03-03 Dispositif capteur à ondes acoustiques à deux ports

Country Status (5)

Country Link
US (1) US20240154603A1 (fr)
EP (1) EP4302401A1 (fr)
JP (1) JP2024512195A (fr)
FR (1) FR3120489B1 (fr)
WO (1) WO2022184833A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3094484B1 (fr) * 2019-03-29 2021-07-16 Frecnsys Dispositif résonateur
FR3100330A1 (fr) * 2019-09-04 2021-03-05 Frec'n'sys Capteurs de pression à ondes acoustiques différentiels

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2785473B1 (fr) * 1998-10-30 2001-01-26 Thomson Csf Filtre faibles pertes a ondes acoustiques de surface sur substrat de quartz de coupe optimisee
US7205701B2 (en) * 2004-09-03 2007-04-17 Honeywell International Inc. Passive wireless acoustic wave chemical sensor
DE102006027060B4 (de) * 2006-06-08 2010-04-01 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Oszillatorkreis mit akustischen Eintor-Oberflächenwellenresonatoren
CN102853934B (zh) * 2012-07-27 2015-04-15 上海赛赫信息科技有限公司 无线温度湿度传感器及系统和测量方法
FR3094484B1 (fr) * 2019-03-29 2021-07-16 Frecnsys Dispositif résonateur

Also Published As

Publication number Publication date
FR3120489A1 (fr) 2022-09-09
US20240154603A1 (en) 2024-05-09
WO2022184833A1 (fr) 2022-09-09
EP4302401A1 (fr) 2024-01-10
JP2024512195A (ja) 2024-03-19

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