FR3111085B1 - Installation et procédé de distribution d’un mélange de gaz - Google Patents

Installation et procédé de distribution d’un mélange de gaz Download PDF

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Publication number
FR3111085B1
FR3111085B1 FR2005922A FR2005922A FR3111085B1 FR 3111085 B1 FR3111085 B1 FR 3111085B1 FR 2005922 A FR2005922 A FR 2005922A FR 2005922 A FR2005922 A FR 2005922A FR 3111085 B1 FR3111085 B1 FR 3111085B1
Authority
FR
France
Prior art keywords
gas
flow
set point
gas mixture
mixing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2005922A
Other languages
English (en)
Other versions
FR3111085A1 (fr
Inventor
Vanina Todorova
HERVé DULPHY
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics Systems SA
Original Assignee
Air Liquide Electronics Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR2005922A priority Critical patent/FR3111085B1/fr
Application filed by Air Liquide Electronics Systems SA filed Critical Air Liquide Electronics Systems SA
Priority to US18/008,365 priority patent/US20230277993A1/en
Priority to KR1020227045309A priority patent/KR20230021674A/ko
Priority to PCT/EP2021/064478 priority patent/WO2021245000A1/fr
Priority to EP21729523.7A priority patent/EP4162521A1/fr
Priority to CN202180039659.6A priority patent/CN115917721A/zh
Priority to JP2022574653A priority patent/JP2023528067A/ja
Priority to TW110120009A priority patent/TW202206740A/zh
Publication of FR3111085A1 publication Critical patent/FR3111085A1/fr
Application granted granted Critical
Publication of FR3111085B1 publication Critical patent/FR3111085B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/2201—Control or regulation characterised by the type of control technique used
    • B01F35/2202—Controlling the mixing process by feed-back, i.e. a measured parameter of the mixture is measured, compared with the set-value and the feed values are corrected
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2111—Flow rate
    • B01F35/21112—Volumetric flow rate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2113—Pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2211—Amount of delivered fluid during a period
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Fluid Mechanics (AREA)
  • Dispersion Chemistry (AREA)
  • Accessories For Mixers (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

L’installation de distribution d’un mélange de gaz comprenant une source d’un premier gaz (1), une source d’un deuxième gaz (2), un dispositif mélangeur (3) relié fluidiquement à la source de premier gaz (1) et à la source de deuxième gaz (2), ledit dispositif mélangeur (3) étant configuré pour produire à une sortie (33) un mélange de gaz comprenant le premier gaz et le deuxième gaz, un premier organe régulateur de débit (41) et un deuxième organe régulateur de débit (42) configurés pour réguler respectivement le débit du premier gaz et le débit du deuxième gaz s’écoulant vers le dispositif mélangeur (3) suivant une première consigne de débit (D1) et une deuxième consigne de débit (D2) définissant en fonctionnement, un débit de production (DP) du mélange de gaz à la sortie (33) du dispositif mélangeur (3), une unité de commande (5) configurée pour commander les premier et deuxième organes régulateurs de débit (41, 42) de façon à ajuster la première consigne de débit (D1) et la deuxième consigne de débit (D2) selon des proportions respectives par rapport au débit de production (DP), lesdites proportions respectives étant déterminées en fonction d’au moins une teneur cible (C1, C2) du mélange de gaz en le premier gaz et/ou le deuxième gaz, un réservoir tampon (7) relié fluidiquement à la sortie (33) du dispositif mélangeur (3) d’une part et à une ligne de distribution (6) d’autre part, la ligne de distribution (6) étant configurée pour distribuer le mélange de gaz vers une unité consommatrice (10) avec un débit de consommation (DC) représentatif d’une consommation variable du mélange de gaz, au moins un capteur de mesure (8) configuré pour mesurer une grandeur physique dont la variation est représentative d’une variation du débit de consommation (DC) distribué par la ligne de distribution (6) et pour fournir un premier signal de mesure de ladite grandeur physique, l’unité de commande (5) étant reliée au capteur de mesure (8) et configurée pour élaborer un premier signal de commande à partir du premier signal de mesure, les organes régulateurs de débit (41, 42) étant configurés pour ajuster la première consigne de débit (D1) et la deuxième consigne de débit (D2) en réponse audit premier signal de commande. Figure de l’abrégé : Fig. 1
FR2005922A 2020-06-05 2020-06-05 Installation et procédé de distribution d’un mélange de gaz Active FR3111085B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR2005922A FR3111085B1 (fr) 2020-06-05 2020-06-05 Installation et procédé de distribution d’un mélange de gaz
KR1020227045309A KR20230021674A (ko) 2020-06-05 2021-05-31 가스 혼합물을 분배하기 위한 시설 및 방법
PCT/EP2021/064478 WO2021245000A1 (fr) 2020-06-05 2021-05-31 Installation et procédé de distribution d'un mélange de gaz
EP21729523.7A EP4162521A1 (fr) 2020-06-05 2021-05-31 Installation et procédé de distribution d'un mélange de gaz
US18/008,365 US20230277993A1 (en) 2020-06-05 2021-05-31 Installation and method for distributing a gas mixture
CN202180039659.6A CN115917721A (zh) 2020-06-05 2021-05-31 用于分配气体混合物的设备和方法
JP2022574653A JP2023528067A (ja) 2020-06-05 2021-05-31 ガス混合物を送達するためのプラント及び方法
TW110120009A TW202206740A (zh) 2020-06-05 2021-06-02 用於輸送氣體混合物的設備及方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2005922 2020-06-05
FR2005922A FR3111085B1 (fr) 2020-06-05 2020-06-05 Installation et procédé de distribution d’un mélange de gaz

Publications (2)

Publication Number Publication Date
FR3111085A1 FR3111085A1 (fr) 2021-12-10
FR3111085B1 true FR3111085B1 (fr) 2023-05-12

Family

ID=73013520

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2005922A Active FR3111085B1 (fr) 2020-06-05 2020-06-05 Installation et procédé de distribution d’un mélange de gaz

Country Status (8)

Country Link
US (1) US20230277993A1 (fr)
EP (1) EP4162521A1 (fr)
JP (1) JP2023528067A (fr)
KR (1) KR20230021674A (fr)
CN (1) CN115917721A (fr)
FR (1) FR3111085B1 (fr)
TW (1) TW202206740A (fr)
WO (1) WO2021245000A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117452866B (zh) * 2023-12-22 2024-03-22 中信戴卡股份有限公司 一种铝合金精炼动态智能控制方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2631856B1 (fr) * 1988-05-31 1991-09-13 Rhone Poulenc Chimie Procede de melange et de compression de gaz, a debit controle, stable en debit et en composition, a partir d'au moins deux sources sous pression
JP3174856B2 (ja) * 1993-05-07 2001-06-11 日本エア・リキード株式会社 混合ガス供給装置
KR100992773B1 (ko) * 2008-05-13 2010-11-05 주식회사 동부하이텍 반도체 제조 공정용 희석가스 공급장치 및 그 방법
FR2936038B1 (fr) 2008-09-16 2011-01-07 Air Liquide Installation miniaturisee de fabrication de melanges de gaz speciaux.

Also Published As

Publication number Publication date
JP2023528067A (ja) 2023-07-03
TW202206740A (zh) 2022-02-16
EP4162521A1 (fr) 2023-04-12
US20230277993A1 (en) 2023-09-07
WO2021245000A1 (fr) 2021-12-09
KR20230021674A (ko) 2023-02-14
FR3111085A1 (fr) 2021-12-10
CN115917721A (zh) 2023-04-04

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