FR3100924B1 - Traitement d’un film mince par plasma d’hydrogène et polarisation pour en améliorer la qualité cristalline - Google Patents
Traitement d’un film mince par plasma d’hydrogène et polarisation pour en améliorer la qualité cristalline Download PDFInfo
- Publication number
- FR3100924B1 FR3100924B1 FR1910128A FR1910128A FR3100924B1 FR 3100924 B1 FR3100924 B1 FR 3100924B1 FR 1910128 A FR1910128 A FR 1910128A FR 1910128 A FR1910128 A FR 1910128A FR 3100924 B1 FR3100924 B1 FR 3100924B1
- Authority
- FR
- France
- Prior art keywords
- thin film
- polarization
- improve
- treatment
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title abstract 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title abstract 2
- 229910052739 hydrogen Inorganic materials 0.000 title abstract 2
- 239000001257 hydrogen Substances 0.000 title abstract 2
- 230000010287 polarization Effects 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 239000004020 conductor Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000008521 reorganization Effects 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/584—Non-reactive treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/279—Diamond only control of diamond crystallography
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02488—Insulating materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02491—Conductive materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02502—Layer structure consisting of two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02527—Carbon, e.g. diamond-like carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
L’invention concerne un procédé de traitement d’un film mince en un matériau conducteur ou semi-conducteur pour en améliorer la qualité cristalline. Il comprend : - la fourniture d’un substrat comportant, sur l’une de ses faces, un film mince dudit matériau ; et - le traitement sous plasma polarisé de l’ensemble formé par le substrat et le film mince à une température et pendant une durée déterminées, de manière à obtenir une réorganisation cristalline sur une profondeur du film mince, le traitement sous plasma polarisé comprenant une polarisation électrique du film mince et une exposition du film ainsi polarisé à un plasma d’hydrogène, le traitement sous plasma polarisé étant réalisé à une température qui est inférieure aux températures de fusion du film mince et du substrat. Figure pour l’abrégé : aucune .
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1910128A FR3100924B1 (fr) | 2019-09-13 | 2019-09-13 | Traitement d’un film mince par plasma d’hydrogène et polarisation pour en améliorer la qualité cristalline |
EP20785807.7A EP4029051A1 (fr) | 2019-09-13 | 2020-09-11 | Traitement d'un film mince par plasma d'hydrogene et polarisation pour en ameliorer la qualite cristalline |
JP2022516129A JP2022548051A (ja) | 2019-09-13 | 2020-09-11 | 水素プラズマと分極化による薄膜の結晶品質を向上させるための処理 |
PCT/FR2020/051573 WO2021048507A1 (fr) | 2019-09-13 | 2020-09-11 | Traitement d'un film mince par plasma d'hydrogene et polarisation pour en ameliorer la qualite cristalline |
US17/642,530 US11898239B2 (en) | 2019-09-13 | 2020-09-11 | Treatment of a thin film by hydrogen plasma and polarisation in order to improve the crystalline quality thereof |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1910128 | 2019-09-13 | ||
FR1910128A FR3100924B1 (fr) | 2019-09-13 | 2019-09-13 | Traitement d’un film mince par plasma d’hydrogène et polarisation pour en améliorer la qualité cristalline |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3100924A1 FR3100924A1 (fr) | 2021-03-19 |
FR3100924B1 true FR3100924B1 (fr) | 2022-02-04 |
Family
ID=69903221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1910128A Active FR3100924B1 (fr) | 2019-09-13 | 2019-09-13 | Traitement d’un film mince par plasma d’hydrogène et polarisation pour en améliorer la qualité cristalline |
Country Status (5)
Country | Link |
---|---|
US (1) | US11898239B2 (fr) |
EP (1) | EP4029051A1 (fr) |
JP (1) | JP2022548051A (fr) |
FR (1) | FR3100924B1 (fr) |
WO (1) | WO2021048507A1 (fr) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10320133B4 (de) * | 2003-05-06 | 2011-02-10 | Universität Augsburg | Verfahren zur Herstellung von einkristallinen oder quasi-einkristallinen Diamantschichten und auf einem Körper angeordnete einkristalline oder quasi-einkristalline Diamantschicht |
JP4769428B2 (ja) * | 2004-05-25 | 2011-09-07 | 厚仁 澤邊 | ダイヤモンド膜成長基板の形成方法 |
JP5053553B2 (ja) * | 2006-03-08 | 2012-10-17 | 信越化学工業株式会社 | 単結晶ダイヤモンド成長用基材の製造方法 |
FR2940326B1 (fr) * | 2008-12-19 | 2011-03-25 | Centre Nat Rech Scient | Procede de fabrication de materiaux composites diamantes |
KR20140067956A (ko) * | 2010-11-04 | 2014-06-05 | 닛산 가가쿠 고교 가부시키 가이샤 | 플라즈마 어닐링 방법 및 그 장치 |
DE102017205417A1 (de) * | 2017-03-30 | 2018-10-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Ausbildung einer mit poly- oder einkristallinem Diamant gebildeten Schicht |
DE102017127010B4 (de) * | 2017-11-16 | 2021-12-09 | Infineon Technologies Ag | Verbundwafer und Verfahren zur Herstellung eines Halbleiterbauelements |
-
2019
- 2019-09-13 FR FR1910128A patent/FR3100924B1/fr active Active
-
2020
- 2020-09-11 JP JP2022516129A patent/JP2022548051A/ja active Pending
- 2020-09-11 US US17/642,530 patent/US11898239B2/en active Active
- 2020-09-11 WO PCT/FR2020/051573 patent/WO2021048507A1/fr unknown
- 2020-09-11 EP EP20785807.7A patent/EP4029051A1/fr active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2021048507A1 (fr) | 2021-03-18 |
US11898239B2 (en) | 2024-02-13 |
JP2022548051A (ja) | 2022-11-16 |
FR3100924A1 (fr) | 2021-03-19 |
US20220325405A1 (en) | 2022-10-13 |
EP4029051A1 (fr) | 2022-07-20 |
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Legal Events
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PLFP | Fee payment |
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PLSC | Publication of the preliminary search report |
Effective date: 20210319 |
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