FR3096857B1 - Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension - Google Patents

Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension Download PDF

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Publication number
FR3096857B1
FR3096857B1 FR1905719A FR1905719A FR3096857B1 FR 3096857 B1 FR3096857 B1 FR 3096857B1 FR 1905719 A FR1905719 A FR 1905719A FR 1905719 A FR1905719 A FR 1905719A FR 3096857 B1 FR3096857 B1 FR 3096857B1
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FR
France
Prior art keywords
electroacoustic transducer
high voltage
khz
transducer operating
miniaturized ultrasonic
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Active
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FR1905719A
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English (en)
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FR3096857A1 (fr
Inventor
Gwezheneg Lebelec
Pierre Nicole
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Alsymex Fr
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AER SAS
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Priority to FR1905719A priority Critical patent/FR3096857B1/fr
Priority to PCT/FR2020/000180 priority patent/WO2020240104A1/fr
Publication of FR3096857A1 publication Critical patent/FR3096857A1/fr
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Publication of FR3096857B1 publication Critical patent/FR3096857B1/fr
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Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

Transducteur électroacoustique capacitif ultrasonore miniaturisé, ayant une amplitude vibratoire de quelques dizaines de micromètres, une impédance acoustique Za et étant apte à fonctionner à des hautes tensions (alternatives ou continues) supérieures à 500 V et inférieures à 15000 V et à rayonner une pression acoustique à 1 m comprise entre 80 dB et 150 dB à une fréquence ultrasonore d’activation de bas niveau comprise entre 20 kHz et 110 kHz comprenant  un bloc solidaire indissociable (12) lequel comprend au moins un substrat (5, 2) sur lequel est déposé et/ou gravé deux électrodes (1, 7), au moins trois couches isolantes (3, 4, 8, 10) imperméables aux gaz et aux liquides, constituées de matériaux diélectriques de nature chimique et physique différente. Ledit transducteur comprenant une cavité (6) d’épaisseur EC supérieure à 10 µm comprise entre au moins deux couches isolantes (3, 4, 8, 10) à l’intérieur de laquelle règne une pression Pc supérieure à 10-6 mbar. Figure de l’abrégé : Figure 2a
FR1905719A 2019-05-29 2019-05-29 Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension Active FR3096857B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1905719A FR3096857B1 (fr) 2019-05-29 2019-05-29 Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension
PCT/FR2020/000180 WO2020240104A1 (fr) 2019-05-29 2020-05-29 Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1905719 2019-05-29
FR1905719A FR3096857B1 (fr) 2019-05-29 2019-05-29 Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension

Publications (2)

Publication Number Publication Date
FR3096857A1 FR3096857A1 (fr) 2020-12-04
FR3096857B1 true FR3096857B1 (fr) 2021-06-25

Family

ID=68987744

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Application Number Title Priority Date Filing Date
FR1905719A Active FR3096857B1 (fr) 2019-05-29 2019-05-29 Transducteur electroacoustique capacitif ultrasonore miniaturise fonctionnant a haute tension

Country Status (2)

Country Link
FR (1) FR3096857B1 (fr)
WO (1) WO2020240104A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115921259A (zh) * 2023-01-03 2023-04-07 京东方科技集团股份有限公司 一种超声换能单元及其制备方法、超声换能器件

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102159334A (zh) * 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 电容性微机械加工的超声换能器
US20100173437A1 (en) * 2008-10-21 2010-07-08 Wygant Ira O Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound
EP2595412B1 (fr) * 2011-03-24 2015-10-21 Olympus Medical Systems Corp. Oscillateur ultrasonore et dispositif de diagnostic ultrasonore
FR2974908B1 (fr) 2011-05-04 2014-01-31 Aer Velocimetre acoustique
FR3027398B1 (fr) 2014-10-21 2017-12-15 Aer Dispositif de mesure de grande precision de la vitesse d'un mobile par rapport a un fluide l'environnant

Also Published As

Publication number Publication date
FR3096857A1 (fr) 2020-12-04
WO2020240104A1 (fr) 2020-12-03

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