FR3077888B1 - Puce optoelectronique et procede de test de circuits photoniques d'une telle puce - Google Patents
Puce optoelectronique et procede de test de circuits photoniques d'une telle puce Download PDFInfo
- Publication number
- FR3077888B1 FR3077888B1 FR1851202A FR1851202A FR3077888B1 FR 3077888 B1 FR3077888 B1 FR 3077888B1 FR 1851202 A FR1851202 A FR 1851202A FR 1851202 A FR1851202 A FR 1851202A FR 3077888 B1 FR3077888 B1 FR 3077888B1
- Authority
- FR
- France
- Prior art keywords
- chip
- optoelectronic
- photonic circuits
- testing
- testing photonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/31728—Optical aspects, e.g. opto-electronics used for testing, optical signal transmission for testing electronic circuits, electro-optic components to be tested in combination with electronic circuits, measuring light emission of digital circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/31—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter and a light receiver being disposed at the same side of a fibre or waveguide end-face, e.g. reflectometers
- G01M11/3109—Reflectometers detecting the back-scattered light in the time-domain, e.g. OTDR
- G01M11/3127—Reflectometers detecting the back-scattered light in the time-domain, e.g. OTDR using multiple or wavelength variable input source
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/31—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter and a light receiver being disposed at the same side of a fibre or waveguide end-face, e.g. reflectometers
- G01M11/3109—Reflectometers detecting the back-scattered light in the time-domain, e.g. OTDR
- G01M11/3145—Details of the optoelectronics or data analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
- G01M11/332—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face using discrete input signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
- G01M11/335—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face using two or more input wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12033—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for configuring the device, e.g. moveable element for wavelength tuning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
- G02B6/2773—Polarisation splitting or combining
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2808—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
- G02B6/2813—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29332—Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/217—Multimode interference type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Health & Medical Sciences (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1851202A FR3077888B1 (fr) | 2018-02-13 | 2018-02-13 | Puce optoelectronique et procede de test de circuits photoniques d'une telle puce |
US16/249,546 US11555852B2 (en) | 2018-02-13 | 2019-01-16 | Optoelectronic chip and method for testing photonic circuits of such chip |
CN201910111836.1A CN110161634A (zh) | 2018-02-13 | 2019-02-12 | 光电芯片以及用于测试这种芯片的光子电路的方法 |
CN201920192164.7U CN209471277U (zh) | 2018-02-13 | 2019-02-12 | 光电芯片 |
US18/146,543 US20230136742A1 (en) | 2018-02-13 | 2022-12-27 | Optoelectronic chip and method for testing photonic circuits of such chip |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1851202A FR3077888B1 (fr) | 2018-02-13 | 2018-02-13 | Puce optoelectronique et procede de test de circuits photoniques d'une telle puce |
FR1851202 | 2018-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3077888A1 FR3077888A1 (fr) | 2019-08-16 |
FR3077888B1 true FR3077888B1 (fr) | 2020-02-28 |
Family
ID=62143354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1851202A Expired - Fee Related FR3077888B1 (fr) | 2018-02-13 | 2018-02-13 | Puce optoelectronique et procede de test de circuits photoniques d'une telle puce |
Country Status (3)
Country | Link |
---|---|
US (2) | US11555852B2 (zh) |
CN (2) | CN110161634A (zh) |
FR (1) | FR3077888B1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3077888B1 (fr) * | 2018-02-13 | 2020-02-28 | Stmicroelectronics (Crolles 2) Sas | Puce optoelectronique et procede de test de circuits photoniques d'une telle puce |
Family Cites Families (41)
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US5745619A (en) | 1996-06-07 | 1998-04-28 | Lucent Technologies Inc. | Low-loss optical power splitter for high-definition waveguides |
US5896193A (en) | 1997-02-14 | 1999-04-20 | Jds Fitel Inc. | Apparatus for testing an optical component |
US6091870A (en) * | 1998-02-20 | 2000-07-18 | Corning Incorporated | Wavelength division multiplexer/demultiplexer optical device |
US6043887A (en) | 1998-11-27 | 2000-03-28 | Allard; Louis B. | Polarimeter |
US6147757A (en) | 1999-02-23 | 2000-11-14 | Alliance Fiber Optics Products, Inc. | Apparatus and method employing depolarization to eliminate effect of polarization dependent loss |
EP1305589A1 (en) | 2000-07-21 | 2003-05-02 | Agilent Technologies, Inc. (a Delaware corporation) | Reflectometric insertion loss measurements for optical components |
US6822743B2 (en) | 2001-03-07 | 2004-11-23 | Paul Trinh | Integrated-optic channel monitoring |
US6731122B2 (en) | 2001-08-14 | 2004-05-04 | International Business Machines Corporation | Wafer test apparatus including optical elements and method of using the test apparatus |
US6882428B2 (en) | 2001-08-28 | 2005-04-19 | Agilent Technologies, Inc. | Optical analyzer and method for reducing relative intensity noise in interferometric optical measurements using a continuously tunable laser |
US7116851B2 (en) * | 2001-10-09 | 2006-10-03 | Infinera Corporation | Optical signal receiver, an associated photonic integrated circuit (RxPIC), and method improving performance |
EP1436870A2 (en) | 2001-10-09 | 2004-07-14 | Infinera Corporation | TRANSMITTER PHOTONIC INTEGRATED CIRCUITS (TxPIC) AND OPTICAL TRANSPORT NETWORKS EMPLOYING TxPICs |
US6856398B2 (en) | 2001-10-24 | 2005-02-15 | Exfo Electro-Optical Engineering Inc. | Method of and apparatus for making wavelength-resolved polarimetric measurements |
CA2417790C (en) | 2002-02-13 | 2010-03-23 | Jds Uniphase Inc. | Measuring response characteristics of an optical component |
US7006719B2 (en) * | 2002-03-08 | 2006-02-28 | Infinera Corporation | In-wafer testing of integrated optical components in photonic integrated circuits (PICs) |
US6943891B2 (en) | 2002-03-15 | 2005-09-13 | Agilent Technologies, Inc. | Determining optical characteristics of optical devices under test |
US6784984B2 (en) * | 2002-03-29 | 2004-08-31 | Nortel Networks, Ltd. | Method and apparatus for improved testing of optical circuit modules |
US7253906B2 (en) | 2002-06-24 | 2007-08-07 | Jds Uniphase Inc. | Polarization state frequency multiplexing |
US6947147B2 (en) | 2002-08-21 | 2005-09-20 | Agilent Technologies, Inc. | De-embedment of optical component characteristics and calibration of optical receivers using rayleigh backscatter |
JP3875160B2 (ja) | 2002-08-23 | 2007-01-31 | 株式会社アドバンテスト | 量子干渉を利用した光特性測定装置、方法、プログラムおよび該プログラムを記録した記録媒体 |
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WO2005029022A1 (en) | 2003-09-19 | 2005-03-31 | Queen's University At Kingston | Method and apparatus for directly measuring the phase change of an optical signal |
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CN108474643B (zh) | 2015-09-14 | 2020-04-24 | 统雷有限公司 | 用于一个或多个波长扫描激光器的设备和方法及其信号检测 |
US9791346B1 (en) * | 2016-04-20 | 2017-10-17 | Stmicroelectronics Sa | Semiconductor device and wafer with reference circuit and related methods |
US10042131B1 (en) * | 2017-04-05 | 2018-08-07 | Xilinx, Inc. | Architecture for silicon photonics enabling wafer probe and test |
FR3077887B1 (fr) | 2018-02-13 | 2021-07-23 | St Microelectronics Crolles 2 Sas | Puce optoelectronique et procede de test de circuits photoniques d'une telle puce |
FR3077888B1 (fr) | 2018-02-13 | 2020-02-28 | Stmicroelectronics (Crolles 2) Sas | Puce optoelectronique et procede de test de circuits photoniques d'une telle puce |
-
2018
- 2018-02-13 FR FR1851202A patent/FR3077888B1/fr not_active Expired - Fee Related
-
2019
- 2019-01-16 US US16/249,546 patent/US11555852B2/en active Active
- 2019-02-12 CN CN201910111836.1A patent/CN110161634A/zh active Pending
- 2019-02-12 CN CN201920192164.7U patent/CN209471277U/zh active Active
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2022
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Publication number | Publication date |
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CN110161634A (zh) | 2019-08-23 |
US20190250213A1 (en) | 2019-08-15 |
US20230136742A1 (en) | 2023-05-04 |
FR3077888A1 (fr) | 2019-08-16 |
US11555852B2 (en) | 2023-01-17 |
CN209471277U (zh) | 2019-10-08 |
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