FR3076916B1 - Modulateur de phase electro-optique - Google Patents

Modulateur de phase electro-optique Download PDF

Info

Publication number
FR3076916B1
FR3076916B1 FR1850290A FR1850290A FR3076916B1 FR 3076916 B1 FR3076916 B1 FR 3076916B1 FR 1850290 A FR1850290 A FR 1850290A FR 1850290 A FR1850290 A FR 1850290A FR 3076916 B1 FR3076916 B1 FR 3076916B1
Authority
FR
France
Prior art keywords
strip
electro
phase modulator
optical phase
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1850290A
Other languages
English (en)
Other versions
FR3076916A1 (fr
Inventor
Stephane Monfray
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Crolles 2 SAS
Original Assignee
STMicroelectronics Crolles 2 SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics Crolles 2 SAS filed Critical STMicroelectronics Crolles 2 SAS
Priority to FR1850290A priority Critical patent/FR3076916B1/fr
Priority to CN201910033040.9A priority patent/CN110045520B/zh
Priority to CN202310116215.9A priority patent/CN115903281A/zh
Priority to CN201920056890.6U priority patent/CN209471312U/zh
Priority to US16/247,096 priority patent/US10795189B2/en
Publication of FR3076916A1 publication Critical patent/FR3076916A1/fr
Priority to US17/009,468 priority patent/US11822164B2/en
Application granted granted Critical
Publication of FR3076916B1 publication Critical patent/FR3076916B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/06—Materials and properties dopant
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/104—Materials and properties semiconductor poly-Si
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/105—Materials and properties semiconductor single crystal Si
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/50—Phase-only modulation

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention concerne un modulateur de phase électro-optique comprenant un guide d'onde (100) comportant un empilement d'une première bande (101) en un matériau semiconducteur dopé d'un premier type de conductivité, d'une deuxième bande (103) en matériau conducteur ou en un matériau semiconducteur dopé du deuxième type de conductivité, et d'une troisième bande (105) en un matériau semiconducteur dopé du premier type de conductivité, la deuxième bande étant séparée de la première bande par une première couche d'interface (107) en un matériau diélectrique et de la troisième bande par une deuxième couche d'interface (109) en un matériau diélectrique.
FR1850290A 2018-01-15 2018-01-15 Modulateur de phase electro-optique Active FR3076916B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1850290A FR3076916B1 (fr) 2018-01-15 2018-01-15 Modulateur de phase electro-optique
CN201910033040.9A CN110045520B (zh) 2018-01-15 2019-01-14 电光相位调制器
CN202310116215.9A CN115903281A (zh) 2018-01-15 2019-01-14 电光相位调制器
CN201920056890.6U CN209471312U (zh) 2018-01-15 2019-01-14 电光相位调制器
US16/247,096 US10795189B2 (en) 2018-01-15 2019-01-14 Electro-optical phase modulator
US17/009,468 US11822164B2 (en) 2018-01-15 2020-09-01 Electro-optical phase modulator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1850290 2018-01-15
FR1850290A FR3076916B1 (fr) 2018-01-15 2018-01-15 Modulateur de phase electro-optique

Publications (2)

Publication Number Publication Date
FR3076916A1 FR3076916A1 (fr) 2019-07-19
FR3076916B1 true FR3076916B1 (fr) 2020-09-04

Family

ID=62067666

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1850290A Active FR3076916B1 (fr) 2018-01-15 2018-01-15 Modulateur de phase electro-optique

Country Status (3)

Country Link
US (2) US10795189B2 (fr)
CN (3) CN110045520B (fr)
FR (1) FR3076916B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3076916B1 (fr) * 2018-01-15 2020-09-04 St Microelectronics Crolles 2 Sas Modulateur de phase electro-optique
US20230030971A1 (en) * 2021-07-28 2023-02-02 Cisco Technology, Inc. Silicon germanium-based semiconductor-insulator-semiconductor capacitor (siscap) modulator

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5530777A (en) * 1992-09-28 1996-06-25 Matsushita Industrial Electric Co., Ltd. Optical modulation device
US6965128B2 (en) * 2003-02-03 2005-11-15 Freescale Semiconductor, Inc. Structure and method for fabricating semiconductor microresonator devices
US7127128B2 (en) * 2005-03-03 2006-10-24 Avanex Corporation Electro-optical device
WO2009020432A1 (fr) * 2007-08-08 2009-02-12 Agency For Science, Technology And Research Dispositif électrooptique et son procédé de fabrication
US7747122B2 (en) * 2008-09-30 2010-06-29 Intel Corporation Method and apparatus for high speed silicon optical modulation using PN diode
KR101239134B1 (ko) * 2008-12-10 2013-03-07 한국전자통신연구원 흡수 광변조기 및 그것의 제조 방법
SG173939A1 (en) * 2010-03-01 2011-09-29 Nec Corp Silicon-based electro-optic device
US8559769B2 (en) * 2011-01-27 2013-10-15 Alcatel Lucent All-optical phase shifter in silicon
JP6314972B2 (ja) * 2013-03-26 2018-04-25 日本電気株式会社 シリコンベース電気光学変調装置
US9766484B2 (en) * 2014-01-24 2017-09-19 Cisco Technology, Inc. Electro-optical modulator using waveguides with overlapping ridges
CN106170865B (zh) * 2014-04-18 2019-11-01 华为技术有限公司 具有透明导电和低折射率栅极的mos电容式光学调制器
US9891450B2 (en) * 2015-09-16 2018-02-13 Stmicroelectronics (Crolles 2) Sas Integrated electro-optic modulator
FR3041115A1 (fr) * 2015-09-16 2017-03-17 St Microelectronics Crolles 2 Sas Modulateur electro-optique integre
US9798166B1 (en) * 2017-01-24 2017-10-24 Mellanox Technologies Silicon Photonics Inc. Attenuator with improved fabrication consistency
FR3076916B1 (fr) * 2018-01-15 2020-09-04 St Microelectronics Crolles 2 Sas Modulateur de phase electro-optique

Also Published As

Publication number Publication date
US10795189B2 (en) 2020-10-06
US20190219847A1 (en) 2019-07-18
US20200400978A1 (en) 2020-12-24
CN110045520A (zh) 2019-07-23
US11822164B2 (en) 2023-11-21
CN110045520B (zh) 2023-02-28
FR3076916A1 (fr) 2019-07-19
CN209471312U (zh) 2019-10-08
CN115903281A (zh) 2023-04-04

Similar Documents

Publication Publication Date Title
US4006963A (en) Controllable, electro-optical grating coupler
FR3076916B1 (fr) Modulateur de phase electro-optique
EP3230793B1 (fr) Terminaison de modulateur électro-optique
US20080089634A1 (en) Segmented optical modulator
ES204001A1 (es) UN SISTEMA DE LiNEA DE TRANSMISIoN
EP3282306A1 (fr) Dispositif de modulation optique
US20150378238A1 (en) High-frequency circuit and optical modulator
FR3064083B1 (fr) Filtre interferentiel
ES309288A3 (es) Un dispositivo electrico de estado solido.
MX2020013455A (es) Elemento funcional que tiene propiedades opticas controlables electricamente.
Liero et al. 3D electrothermal simulations of organic LEDs showing negative differential resistance
US20170219854A1 (en) Integrated Optical Modulator
KR980005906A (ko) 반도체 장치
GB2407644B (en) A coplanar waveguide line
FR3076660B1 (fr) Dispositif integre de cellule capacitive de remplissage et procede de fabrication correspondant
NO116329B (fr)
FR3059464B1 (fr) Circuit electronique comprenant des tranchees d'isolation electrique
KR840002777A (ko) 마이크로웨이브 파장효과 트랜지스터
Biswas et al. High electron mobility transistor: physics-based TCAD simulation and performance analysis
ES2143986T3 (es) Transistor supraconductor con efecto de campo y procedimiento de una estructura multicapa tal como la utilizada en el transistor.
CN106298871B (zh) 半导体结构
US3344322A (en) Metal-oxide-semiconductor field effect transistor
FR3098977B1 (fr) Modulateur optique capacitif
MY193292A (en) Semiconductor device
US11402673B2 (en) Waveguide array

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20190719

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7