FR3074337B1 - Reseau neuromimetique et procede de fabrication associe - Google Patents

Reseau neuromimetique et procede de fabrication associe Download PDF

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Publication number
FR3074337B1
FR3074337B1 FR1701263A FR1701263A FR3074337B1 FR 3074337 B1 FR3074337 B1 FR 3074337B1 FR 1701263 A FR1701263 A FR 1701263A FR 1701263 A FR1701263 A FR 1701263A FR 3074337 B1 FR3074337 B1 FR 3074337B1
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France
Prior art keywords
electrode
stack
barrier layer
manufacturing process
associated manufacturing
Prior art date
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Active
Application number
FR1701263A
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English (en)
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FR3074337A1 (fr
Inventor
Manuel Bibes
Julie Grollier
Vincent Garcia
Nicolas Locatelli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Thales SA
Universite Paris Saclay
Original Assignee
Centre National de la Recherche Scientifique CNRS
Thales SA
Universite Paris Sud Paris 11
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Application filed by Centre National de la Recherche Scientifique CNRS, Thales SA, Universite Paris Sud Paris 11 filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1701263A priority Critical patent/FR3074337B1/fr
Priority to CN201880077656.XA priority patent/CN111712838B/zh
Priority to US16/768,549 priority patent/US11551749B2/en
Priority to EP18807648.3A priority patent/EP3718054A1/fr
Priority to PCT/EP2018/083087 priority patent/WO2019106127A1/fr
Publication of FR3074337A1 publication Critical patent/FR3074337A1/fr
Application granted granted Critical
Publication of FR3074337B1 publication Critical patent/FR3074337B1/fr
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/54—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using elements simulating biological cells, e.g. neuron
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/049—Temporal neural networks, e.g. delay elements, oscillating neurons or pulsed inputs
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/061—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using biological neurons, e.g. biological neurons connected to an integrated circuit
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/063—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/063—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
    • G06N3/065—Analogue means
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/221—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements using ferroelectric capacitors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G11C11/223—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements using MOS with ferroelectric gate insulating film
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/51—Insulating materials associated therewith
    • H01L29/516—Insulating materials associated therewith with at least one ferroelectric layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B51/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H01L2924/143—Digital devices
    • H01L2924/1434—Memory
    • H01L2924/1435—Random access memory [RAM]
    • H01L2924/1441—Ferroelectric RAM [FeRAM or FRAM]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Theoretical Computer Science (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Neurology (AREA)
  • Computational Linguistics (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Computing Systems (AREA)
  • Artificial Intelligence (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Semiconductor Memories (AREA)

Abstract

La présente invention a pour objet un réseau neuromimétique (10) comprenant un ensemble de neurones (20) et un ensemble de synapses (25), au moins un neurone (20) comprenant un premier empilement (35) de couches superposées, le premier empilement (35) comprenant successivement: - une première électrode (40), - une première couche barrière (50) réalisée en un matériau électriquement isolant, et - une deuxième électrode (45), la première électrode (40), la première couche barrière (50) et la deuxième électrode (45) formant une première jonction tunnel ferroélectrique, au moins une synapse (25) comprenant un deuxième empilement (52) de couches superposées, le deuxième empilement (52) comprenant successivement: - une troisième électrode (55), - une deuxième couche barrière (65) réalisée en un matériau électriquement isolant, et - une quatrième électrode (60), la troisième électrode (55), la deuxième couche barrière (65) et la quatrième électrode (60) formant une deuxième jonction tunnel ferroélectrique.
FR1701263A 2017-11-30 2017-11-30 Reseau neuromimetique et procede de fabrication associe Active FR3074337B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1701263A FR3074337B1 (fr) 2017-11-30 2017-11-30 Reseau neuromimetique et procede de fabrication associe
CN201880077656.XA CN111712838B (zh) 2017-11-30 2018-11-30 仿神经网络及其制造方法
US16/768,549 US11551749B2 (en) 2017-11-30 2018-11-30 Neuromimetic network and related production method
EP18807648.3A EP3718054A1 (fr) 2017-11-30 2018-11-30 Réseau neuromimétique et procédé de fabrication associé
PCT/EP2018/083087 WO2019106127A1 (fr) 2017-11-30 2018-11-30 Réseau neuromimétique et procédé de fabrication associé

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1701263A FR3074337B1 (fr) 2017-11-30 2017-11-30 Reseau neuromimetique et procede de fabrication associe
FR1701263 2017-11-30

Publications (2)

Publication Number Publication Date
FR3074337A1 FR3074337A1 (fr) 2019-05-31
FR3074337B1 true FR3074337B1 (fr) 2021-04-09

Family

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FR1701263A Active FR3074337B1 (fr) 2017-11-30 2017-11-30 Reseau neuromimetique et procede de fabrication associe

Country Status (5)

Country Link
US (1) US11551749B2 (fr)
EP (1) EP3718054A1 (fr)
CN (1) CN111712838B (fr)
FR (1) FR3074337B1 (fr)
WO (1) WO2019106127A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111598229B (zh) * 2020-05-11 2024-10-15 中国科学院微电子研究所 一种神经元电路、基于神经网络的集成电路和电子设备
US20230240152A1 (en) * 2022-01-25 2023-07-27 Eagle Technology , LLC Multiferroic tunnel junction memory device and related methods

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3193302B2 (ja) * 1996-06-26 2001-07-30 ティーディーケイ株式会社 膜構造体、電子デバイス、記録媒体および強誘電体薄膜の製造方法
FR2945147B1 (fr) * 2009-04-30 2012-03-30 Thales Sa Dispositif memristor a resistance ajustable grace au deplacement d'une paroi magnetique par transfert de spin et utilisation dudit memristor dans un reseau de neurones
FR2946788B1 (fr) * 2009-06-11 2016-11-11 Thales Sa Dispositif a resistance ajustable.
US8311965B2 (en) * 2009-11-18 2012-11-13 International Business Machines Corporation Area efficient neuromorphic circuits using field effect transistors (FET) and variable resistance material
CN103246904B (zh) * 2013-05-24 2016-04-06 北京大学 基于阻变忆阻器的时间关联学习神经元电路及其实现方法
US20140365413A1 (en) * 2013-06-06 2014-12-11 Qualcomm Incorporated Efficient implementation of neural population diversity in neural system
CN103346256A (zh) * 2013-07-03 2013-10-09 南京大学 一种基于铁电隧道结的忆阻器
WO2015001697A1 (fr) * 2013-07-04 2015-01-08 パナソニックＩｐマネジメント株式会社 Circuit de réseau neuronal et procédé d'apprentissage associé
CN105373829B (zh) * 2014-09-02 2018-05-04 北京大学 一种全连接神经网络结构
CN105160401B (zh) * 2015-08-27 2017-08-11 电子科技大学 一种基于忆阻器阵列的wta神经网络及其应用
WO2017039611A1 (fr) * 2015-08-31 2017-03-09 Hewlett Packard Enterprise Development Lp Empilements de matériaux pour memristances unipolaires à faible courant
US10650308B2 (en) * 2015-09-23 2020-05-12 Politecnico Di Milano Electronic neuromorphic system, synaptic circuit with resistive switching memory and method of performing spike-timing dependent plasticity
US10679121B2 (en) * 2015-12-30 2020-06-09 SK Hynix Inc. Synapse and a neuromorphic device including the same
CN105720194B (zh) * 2016-03-14 2018-05-15 广东工业大学 用于交叉点内存阵列用的电阻开关与选择器共存器件及制备方法和应用
US9767408B1 (en) * 2016-09-16 2017-09-19 International Business Machines Corporation Multi-memristive synapse with clock-arbitrated weight update
JP2019179499A (ja) * 2018-03-30 2019-10-17 ソニー株式会社 半導体装置及び積和演算装置
US10453528B1 (en) * 2018-06-14 2019-10-22 International Business Machines Corporation Controlling aggregate signal amplitude from device arrays by segmentation and time-gating

Also Published As

Publication number Publication date
CN111712838A (zh) 2020-09-25
EP3718054A1 (fr) 2020-10-07
CN111712838B (zh) 2024-05-24
FR3074337A1 (fr) 2019-05-31
US11551749B2 (en) 2023-01-10
US20200294581A1 (en) 2020-09-17
WO2019106127A1 (fr) 2019-06-06

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