FR3069368B1 - Canon a electrons - Google Patents

Canon a electrons Download PDF

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Publication number
FR3069368B1
FR3069368B1 FR1856844A FR1856844A FR3069368B1 FR 3069368 B1 FR3069368 B1 FR 3069368B1 FR 1856844 A FR1856844 A FR 1856844A FR 1856844 A FR1856844 A FR 1856844A FR 3069368 B1 FR3069368 B1 FR 3069368B1
Authority
FR
France
Prior art keywords
electron gun
gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1856844A
Other languages
English (en)
Other versions
FR3069368A1 (fr
Inventor
Akira Chiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Network and Sensor Systems Ltd
Original Assignee
NEC Network and Sensor Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Network and Sensor Systems Ltd filed Critical NEC Network and Sensor Systems Ltd
Publication of FR3069368A1 publication Critical patent/FR3069368A1/fr
Application granted granted Critical
Publication of FR3069368B1 publication Critical patent/FR3069368B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/484—Eliminating deleterious effects due to thermal effects, electrical or magnetic fields; Preventing unwanted emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02—Electrodes; Magnetic control means; Screens
    • H01J23/06—Electron or ion guns
    • H01J23/065—Electron or ion guns producing a solid cylindrical beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/02—Tubes with electron stream modulated in velocity or density in a modulator zone and thereafter giving up energy in an inducing zone, the zones being associated with one or more resonators
    • H01J25/10—Klystrons, i.e. tubes having two or more resonators, without reflection of the electron stream, and in which the stream is modulated mainly by velocity in the zone of the input resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/488—Schematic arrangements of the electrodes for beam forming; Place and form of the elecrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/029—Schematic arrangements for beam forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/22—Heaters

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microwave Tubes (AREA)
FR1856844A 2017-07-24 2018-07-24 Canon a electrons Active FR3069368B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017142457 2017-07-24
JP2017142457A JP7092470B2 (ja) 2017-07-24 2017-07-24 電子銃

Publications (2)

Publication Number Publication Date
FR3069368A1 FR3069368A1 (fr) 2019-01-25
FR3069368B1 true FR3069368B1 (fr) 2022-06-03

Family

ID=65023415

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1856844A Active FR3069368B1 (fr) 2017-07-24 2018-07-24 Canon a electrons

Country Status (3)

Country Link
US (1) US10475618B2 (fr)
JP (1) JP7092470B2 (fr)
FR (1) FR3069368B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111146055B (zh) * 2019-12-26 2023-09-19 上海联影医疗科技股份有限公司 X射线管、医疗成像设备及x射线管制造方法
RU2761107C1 (ru) * 2021-04-01 2021-12-06 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") Электронная пушка свч прибора
RU2766565C1 (ru) * 2021-05-25 2022-03-15 Акционерное Общество "Наука И Инновации" Катодный узел с профилированным тепловым зазором для мощной электронно-лучевой пушки
US11488799B1 (en) * 2022-07-22 2022-11-01 Pipl Limited Heaters for hollow cathodes

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686727A (en) * 1971-03-22 1972-08-29 Sylvania Electric Prod Method of fabricating a multibeam electron gun structure
JPS5340267A (en) * 1976-09-27 1978-04-12 Toshiba Corp Electron gun assembling body
US4091311A (en) * 1976-12-17 1978-05-23 United Technologies Corporation Modulatable, hollow beam electron gun
JPS59146850U (ja) 1984-02-09 1984-10-01 日本電気株式会社 セラミツク外囲部品を有する電子管
JPH01142148U (fr) 1988-03-24 1989-09-28
US4873468A (en) * 1988-05-16 1989-10-10 Varian Associates, Inc. Multiple sheet beam gridded electron gun
JPH05325776A (ja) * 1992-05-15 1993-12-10 Nec Corp マイクロ波管用陰極
GB9405139D0 (en) * 1994-03-16 1994-05-18 Eev Ltd Electron gun arrangements
US5623183A (en) * 1995-03-22 1997-04-22 Litton Systems, Inc. Diverging beam electron gun for a toxic remediation device with a dome-shaped focusing electrode
JP2000311635A (ja) * 1998-10-12 2000-11-07 Toshiba Corp カラー陰極線管
US6512235B1 (en) * 2000-05-01 2003-01-28 El-Mul Technologies Ltd. Nanotube-based electron emission device and systems using the same
JP3996442B2 (ja) 2002-05-27 2007-10-24 Ｎｅｃマイクロ波管株式会社 電子銃
JP4134000B2 (ja) * 2004-10-28 2008-08-13 Ｎｅｃマイクロ波管株式会社 電子銃
JP5140868B2 (ja) * 2007-07-06 2013-02-13 株式会社ネットコムセック 進行波管
JP2009252444A (ja) * 2008-04-03 2009-10-29 Nec Microwave Inc コレクタ電極及び電子管
US20100040201A1 (en) * 2008-08-14 2010-02-18 Varian Medical Systems, Inc. Cathode with a Coating Near the Filament and Methods for Making Same
FR2936354B1 (fr) * 2008-09-19 2012-09-21 Thales Sa Tube hyperfrequences avec dispositif d'extraction d'ions produits dans le tube
CN107481913B (zh) * 2016-06-08 2019-04-02 清华大学 一种电子束加工系统

Also Published As

Publication number Publication date
JP7092470B2 (ja) 2022-06-28
FR3069368A1 (fr) 2019-01-25
US10475618B2 (en) 2019-11-12
JP2019023958A (ja) 2019-02-14
US20190027335A1 (en) 2019-01-24

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