FR3059771B1 - Composant d'interferometre et son procede de fabrication - Google Patents

Composant d'interferometre et son procede de fabrication Download PDF

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Publication number
FR3059771B1
FR3059771B1 FR1761354A FR1761354A FR3059771B1 FR 3059771 B1 FR3059771 B1 FR 3059771B1 FR 1761354 A FR1761354 A FR 1761354A FR 1761354 A FR1761354 A FR 1761354A FR 3059771 B1 FR3059771 B1 FR 3059771B1
Authority
FR
France
Prior art keywords
manufacturing
interferometer component
interferometer
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1761354A
Other languages
English (en)
Other versions
FR3059771A1 (fr
Inventor
Andreas Merz
Benedikt Stein
Christoph Schelling
Ingo Herrmann
Martin Husnik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR3059771A1 publication Critical patent/FR3059771A1/fr
Application granted granted Critical
Publication of FR3059771B1 publication Critical patent/FR3059771B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
FR1761354A 2016-12-01 2017-11-29 Composant d'interferometre et son procede de fabrication Active FR3059771B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016223917.1A DE102016223917B4 (de) 2016-12-01 2016-12-01 Interferometerbauelement und Verfahren zum Herstellen eines Interferometerbauelements
DE102016223917.1 2016-12-01

Publications (2)

Publication Number Publication Date
FR3059771A1 FR3059771A1 (fr) 2018-06-08
FR3059771B1 true FR3059771B1 (fr) 2022-05-06

Family

ID=62163706

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1761354A Active FR3059771B1 (fr) 2016-12-01 2017-11-29 Composant d'interferometre et son procede de fabrication

Country Status (2)

Country Link
DE (1) DE102016223917B4 (fr)
FR (1) FR3059771B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021538A1 (de) 2006-05-08 2007-11-22 Frank Palme Interferometer
DE102008019600B4 (de) 2008-04-18 2021-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Vorrichtung in gestapelter Bauweise und Verfahren zur Herstellung derselben
JP5440110B2 (ja) * 2009-03-30 2014-03-12 株式会社リコー 分光特性取得装置、分光特性取得方法、画像評価装置、及び画像形成装置
JP5988690B2 (ja) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
JP6264810B2 (ja) * 2013-09-27 2018-01-24 セイコーエプソン株式会社 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

Also Published As

Publication number Publication date
DE102016223917A1 (de) 2018-06-07
DE102016223917B4 (de) 2019-12-05
FR3059771A1 (fr) 2018-06-08

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