FR3044824B1 - Transistor sbfet ameliore et procede de fabrication correspondant - Google Patents
Transistor sbfet ameliore et procede de fabrication correspondant Download PDFInfo
- Publication number
- FR3044824B1 FR3044824B1 FR1561963A FR1561963A FR3044824B1 FR 3044824 B1 FR3044824 B1 FR 3044824B1 FR 1561963 A FR1561963 A FR 1561963A FR 1561963 A FR1561963 A FR 1561963A FR 3044824 B1 FR3044824 B1 FR 3044824B1
- Authority
- FR
- France
- Prior art keywords
- sbfet
- transistor
- manufacturing
- improved
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66643—Lateral single gate silicon transistors with source or drain regions formed by a Schottky barrier or a conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0895—Tunnel injectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7839—Field effect transistors with field effect produced by an insulated gate with Schottky drain or source contact
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1561963A FR3044824B1 (fr) | 2015-12-08 | 2015-12-08 | Transistor sbfet ameliore et procede de fabrication correspondant |
US15/372,930 US9911827B2 (en) | 2015-12-08 | 2016-12-08 | SBFET transistor and corresponding fabrication process |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1561963 | 2015-12-08 | ||
FR1561963A FR3044824B1 (fr) | 2015-12-08 | 2015-12-08 | Transistor sbfet ameliore et procede de fabrication correspondant |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3044824A1 FR3044824A1 (fr) | 2017-06-09 |
FR3044824B1 true FR3044824B1 (fr) | 2018-05-04 |
Family
ID=55182449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1561963A Active FR3044824B1 (fr) | 2015-12-08 | 2015-12-08 | Transistor sbfet ameliore et procede de fabrication correspondant |
Country Status (2)
Country | Link |
---|---|
US (1) | US9911827B2 (fr) |
FR (1) | FR3044824B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200046837A (ko) * | 2018-10-25 | 2020-05-07 | 엘지디스플레이 주식회사 | 트랜지스터 및 전자장치 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2749977B1 (fr) * | 1996-06-14 | 1998-10-09 | Commissariat Energie Atomique | Transistor mos a puits quantique et procedes de fabrication de celui-ci |
JP3833903B2 (ja) | 2000-07-11 | 2006-10-18 | 株式会社東芝 | 半導体装置の製造方法 |
EP1683193A1 (fr) | 2003-10-22 | 2006-07-26 | Spinnaker Semiconductor, Inc. | Dispositif mosfet a barriere de schottky dynamique et procede de fabrication de celui-ci |
WO2007109658A2 (fr) * | 2006-03-20 | 2007-09-27 | Rochester Institute Of Technology | Circuits cmos avec source/drain partages et procedes associes |
US8178939B2 (en) * | 2009-06-21 | 2012-05-15 | Sematech, Inc. | Interfacial barrier for work function modification of high performance CMOS devices |
-
2015
- 2015-12-08 FR FR1561963A patent/FR3044824B1/fr active Active
-
2016
- 2016-12-08 US US15/372,930 patent/US9911827B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20170162672A1 (en) | 2017-06-08 |
FR3044824A1 (fr) | 2017-06-09 |
US9911827B2 (en) | 2018-03-06 |
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