FR3033554B1 - Procede de formation d'un dispositif en graphene - Google Patents

Procede de formation d'un dispositif en graphene Download PDF

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Publication number
FR3033554B1
FR3033554B1 FR1551931A FR1551931A FR3033554B1 FR 3033554 B1 FR3033554 B1 FR 3033554B1 FR 1551931 A FR1551931 A FR 1551931A FR 1551931 A FR1551931 A FR 1551931A FR 3033554 B1 FR3033554 B1 FR 3033554B1
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FR
France
Prior art keywords
forming
graphene film
graphene device
graphene
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1551931A
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English (en)
Other versions
FR3033554A1 (fr
Inventor
Dipankar KALITA
Vincent Bouchiat
Laetitia MARTY
Nedjma BENDIAB
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Grenoble Alpes
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Joseph Fourier Grenoble 1
Universite Grenoble Alpes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1551931A priority Critical patent/FR3033554B1/fr
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Joseph Fourier Grenoble 1, Universite Grenoble Alpes filed Critical Centre National de la Recherche Scientifique CNRS
Priority to US15/557,039 priority patent/US11577960B2/en
Priority to EP16709366.5A priority patent/EP3268312A1/fr
Priority to PCT/EP2016/054963 priority patent/WO2016142400A1/fr
Priority to CN201680026619.7A priority patent/CN107667071A/zh
Publication of FR3033554A1 publication Critical patent/FR3033554A1/fr
Application granted granted Critical
Publication of FR3033554B1 publication Critical patent/FR3033554B1/fr
Priority to US18/081,596 priority patent/US12054392B2/en
Priority to US18/652,932 priority patent/US20240279067A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/184Preparation
    • C01B32/186Preparation by chemical vapour deposition [CVD]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/011Arrangements for interaction with the human body, e.g. for user immersion in virtual reality
    • G06F3/014Hand-worn input/output arrangements, e.g. data gloves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/12Layered products comprising a layer of synthetic resin next to a fibrous or filamentary layer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/182Graphene
    • C01B32/194After-treatment
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
    • G06F3/0425Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means using a single imaging device like a video camera for tracking the absolute position of a single or a plurality of objects with respect to an imaged reference surface, e.g. video camera imaging a display or a projection screen, a table or a wall surface, on which a computer generated image is displayed or projected
    • G06F3/0426Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means using a single imaging device like a video camera for tracking the absolute position of a single or a plurality of objects with respect to an imaged reference surface, e.g. video camera imaging a display or a projection screen, a table or a wall surface, on which a computer generated image is displayed or projected tracking fingers with respect to a virtual keyboard projected or printed on the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2313/00Elements other than metals
    • B32B2313/04Carbon

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Multimedia (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

L'invention concerne un procédé de formation d'un dispositif en graphène, le procédé comprenant : former un film de graphène (100) sur un substrat ; déposer, par dépôt en phase gazeuse, un matériau polymère couvrant une surface du film de graphène (100) ; et enlever le substrat du film de graphène (100), le matériau polymère formant un support (102) pour le film de graphène (100).
FR1551931A 2015-03-09 2015-03-09 Procede de formation d'un dispositif en graphene Active FR3033554B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1551931A FR3033554B1 (fr) 2015-03-09 2015-03-09 Procede de formation d'un dispositif en graphene
EP16709366.5A EP3268312A1 (fr) 2015-03-09 2016-03-09 Procédé de formation d'un dispositif au graphène
PCT/EP2016/054963 WO2016142400A1 (fr) 2015-03-09 2016-03-09 Procédé de formation d'un dispositif au graphène
CN201680026619.7A CN107667071A (zh) 2015-03-09 2016-03-09 形成石墨烯装置的方法
US15/557,039 US11577960B2 (en) 2015-03-09 2016-03-09 Method of forming a graphene device using polymer material as a support for a graphene film
US18/081,596 US12054392B2 (en) 2015-03-09 2022-12-14 Method of forming a graphene device using polymer material as a support for a graphene film
US18/652,932 US20240279067A1 (en) 2015-03-09 2024-05-02 Method of forming a graphene device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1551931A FR3033554B1 (fr) 2015-03-09 2015-03-09 Procede de formation d'un dispositif en graphene
FR1551931 2015-03-09

Publications (2)

Publication Number Publication Date
FR3033554A1 FR3033554A1 (fr) 2016-09-16
FR3033554B1 true FR3033554B1 (fr) 2020-01-31

Family

ID=54186033

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1551931A Active FR3033554B1 (fr) 2015-03-09 2015-03-09 Procede de formation d'un dispositif en graphene

Country Status (5)

Country Link
US (3) US11577960B2 (fr)
EP (1) EP3268312A1 (fr)
CN (1) CN107667071A (fr)
FR (1) FR3033554B1 (fr)
WO (1) WO2016142400A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108793146A (zh) * 2018-07-03 2018-11-13 中国科学院上海微系统与信息技术研究所 一种转移石墨烯的方法

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EP3067073A1 (fr) 2015-03-09 2016-09-14 Centre National De La Recherche Scientifique Procédé de formation d'un dispositif médical contenant du graphène
US12059560B2 (en) 2015-03-09 2024-08-13 Centre National De La Recherche Scientifique Method of forming a device comprising graphene
FR3033554B1 (fr) 2015-03-09 2020-01-31 Centre National De La Recherche Scientifique Procede de formation d'un dispositif en graphene
CN108147400B (zh) * 2018-01-02 2021-01-26 京东方科技集团股份有限公司 一种石墨烯薄膜的转移方法及装置
CN109115327B (zh) * 2018-07-10 2021-01-15 杭州高烯科技有限公司 一种聚合物/金属/石墨烯复合膜及其在声波探测器中的应用
JP2022509999A (ja) * 2018-11-30 2022-01-25 ザ・リサーチ・ファウンデーション・フォー・ザ・ステート・ユニヴァーシティー・オブ・ニュー・ヨーク グラフェン積層構造
CN109399626B (zh) * 2018-12-20 2020-05-08 厦门大学 一种可控纳米裁剪石墨烯的方法
FR3131076B1 (fr) 2021-12-22 2024-04-19 Grapheal Procede de formation d’un dispositif comprenant du graphene

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108793146A (zh) * 2018-07-03 2018-11-13 中国科学院上海微系统与信息技术研究所 一种转移石墨烯的方法

Also Published As

Publication number Publication date
US11577960B2 (en) 2023-02-14
WO2016142400A1 (fr) 2016-09-15
US20230183071A1 (en) 2023-06-15
FR3033554A1 (fr) 2016-09-16
US12054392B2 (en) 2024-08-06
US20240279067A1 (en) 2024-08-22
EP3268312A1 (fr) 2018-01-17
CN107667071A (zh) 2018-02-06
US20180057361A1 (en) 2018-03-01

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