FR3024057B1 - Procede et station de traitement d'une boite de transport en materiau plastique pour le convoyage et le stockage atmospherique de substrats - Google Patents

Procede et station de traitement d'une boite de transport en materiau plastique pour le convoyage et le stockage atmospherique de substrats

Info

Publication number
FR3024057B1
FR3024057B1 FR1457174A FR1457174A FR3024057B1 FR 3024057 B1 FR3024057 B1 FR 3024057B1 FR 1457174 A FR1457174 A FR 1457174A FR 1457174 A FR1457174 A FR 1457174A FR 3024057 B1 FR3024057 B1 FR 3024057B1
Authority
FR
France
Prior art keywords
conveyance
substrates
station
treating
plastic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1457174A
Other languages
English (en)
Other versions
FR3024057A1 (fr
Inventor
Julien Palisson
Guet Catherine Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1457174A priority Critical patent/FR3024057B1/fr
Application filed by Adixen Vacuum Products SAS filed Critical Adixen Vacuum Products SAS
Priority to CN201580040238.XA priority patent/CN106573277B/zh
Priority to KR1020177003628A priority patent/KR20170037616A/ko
Priority to US15/325,337 priority patent/US10478872B2/en
Priority to EP15742191.8A priority patent/EP3171992A1/fr
Priority to JP2017503855A priority patent/JP6605578B2/ja
Priority to PCT/EP2015/065171 priority patent/WO2016012216A1/fr
Priority to TW104122045A priority patent/TWI669771B/zh
Publication of FR3024057A1 publication Critical patent/FR3024057A1/fr
Application granted granted Critical
Publication of FR3024057B1 publication Critical patent/FR3024057B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/40—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by burning out
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/005—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by infrared radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/0861—Cleaning crates, boxes or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/205—Conveying containers to or from the cleaning machines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Cleaning In General (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR1457174A 2014-07-24 2014-07-24 Procede et station de traitement d'une boite de transport en materiau plastique pour le convoyage et le stockage atmospherique de substrats Expired - Fee Related FR3024057B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1457174A FR3024057B1 (fr) 2014-07-24 2014-07-24 Procede et station de traitement d'une boite de transport en materiau plastique pour le convoyage et le stockage atmospherique de substrats
KR1020177003628A KR20170037616A (ko) 2014-07-24 2015-07-03 기판의 반송 및 대기 저장을 위한 플라스틱 운반 박스의 처리 방법 및 스테이션
US15/325,337 US10478872B2 (en) 2014-07-24 2015-07-03 Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates
EP15742191.8A EP3171992A1 (fr) 2014-07-24 2015-07-03 Procede et station de traitement d'une boîte de transport en matériau plastique pour le convoyage et le stockage atmosphérique de substrats
CN201580040238.XA CN106573277B (zh) 2014-07-24 2015-07-03 用于处理用于基板的输送和大气储存的由塑料材料制成的运输容器的方法和工作站
JP2017503855A JP6605578B2 (ja) 2014-07-24 2015-07-03 基板の搬送及び大気圧中保管用の、プラスチック製搬送ボックスを処理する方法、及びステーション
PCT/EP2015/065171 WO2016012216A1 (fr) 2014-07-24 2015-07-03 Procede et station de traitement d'une boîte de transport en matériau plastique pour le convoyage et le stockage atmosphérique de substrats
TW104122045A TWI669771B (zh) 2014-07-24 2015-07-07 用來處理用於基板的輸送及大氣儲存的塑膠搬運盒之方法及工作站

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1457174A FR3024057B1 (fr) 2014-07-24 2014-07-24 Procede et station de traitement d'une boite de transport en materiau plastique pour le convoyage et le stockage atmospherique de substrats

Publications (2)

Publication Number Publication Date
FR3024057A1 FR3024057A1 (fr) 2016-01-29
FR3024057B1 true FR3024057B1 (fr) 2016-08-26

Family

ID=51726733

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1457174A Expired - Fee Related FR3024057B1 (fr) 2014-07-24 2014-07-24 Procede et station de traitement d'une boite de transport en materiau plastique pour le convoyage et le stockage atmospherique de substrats

Country Status (8)

Country Link
US (1) US10478872B2 (fr)
EP (1) EP3171992A1 (fr)
JP (1) JP6605578B2 (fr)
KR (1) KR20170037616A (fr)
CN (1) CN106573277B (fr)
FR (1) FR3024057B1 (fr)
TW (1) TWI669771B (fr)
WO (1) WO2016012216A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7024435B2 (ja) * 2018-01-22 2022-02-24 株式会社デンソー プラズマ洗浄装置及びプラズマ洗浄方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5273589A (en) * 1992-07-10 1993-12-28 Griswold Bradley L Method for low pressure rinsing and drying in a process chamber
JP3576216B2 (ja) * 1994-08-16 2004-10-13 信越半導体株式会社 合成樹脂製収納ケースの洗浄方法
US5769953A (en) * 1995-05-01 1998-06-23 Bridgestone Corporation Plasma and heating method of cleaning vulcanizing mold for ashing residue
US5823416A (en) * 1995-07-28 1998-10-20 Matsushita Electric Industrial Co., Ltd. Apparatus and method for surface treatment, and apparatus and method for wire bonding using the surface treatment apparatus
US6026589A (en) * 1998-02-02 2000-02-22 Silicon Valley Group, Thermal Systems Llc Wafer carrier and semiconductor apparatus for processing a semiconductor substrate
US6230719B1 (en) 1998-02-27 2001-05-15 Micron Technology, Inc. Apparatus for removing contaminants on electronic devices
JP2000265275A (ja) 1999-03-15 2000-09-26 Central Glass Co Ltd クリーニング方法
US6564810B1 (en) * 2000-03-28 2003-05-20 Asm America Cleaning of semiconductor processing chambers
JP3495356B2 (ja) * 2001-11-26 2004-02-09 金平 福島 滅菌及びドライ洗浄装置
CN100374617C (zh) * 2002-05-24 2008-03-12 肖特股份公司 化学气相沉积涂涂料设备
JP4615246B2 (ja) * 2004-05-07 2011-01-19 株式会社デジタルネットワーク 洗浄方法
CA2494107A1 (fr) * 2005-01-21 2006-07-21 Pierre Dion Systemes de nettoyage et de decontamination pour les recipients, caisses, cageots et autres outils servant dans le secteur bio-agroalimentaire
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入系统
FR2920046A1 (fr) * 2007-08-13 2009-02-20 Alcatel Lucent Sas Procede de post-traitement d'un support de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs, et station de post-traitement pour la mise en oeuvre d'un tel procede
BRPI0803774B1 (pt) 2008-06-11 2018-09-11 Univ Federal De Santa Catarina Ufsc processo e reator de plasma para tratamento de peças metálicas
US20100126531A1 (en) * 2008-11-25 2010-05-27 Taiwan Semiconductor Manufacturing Company Method and apparatus for cleaning semiconductor device fabrication equipment using supercritical fluids
CN102420272B (zh) * 2011-12-14 2013-11-06 无锡迈纳德微纳技术有限公司 一种太阳能电池钝化层分层镀膜装置
CN204570033U (zh) * 2012-01-24 2015-08-19 应用材料公司 基板载具

Also Published As

Publication number Publication date
TW201622051A (zh) 2016-06-16
JP2017527108A (ja) 2017-09-14
US20170182526A1 (en) 2017-06-29
JP6605578B2 (ja) 2019-11-13
CN106573277B (zh) 2020-08-21
CN106573277A (zh) 2017-04-19
WO2016012216A1 (fr) 2016-01-28
EP3171992A1 (fr) 2017-05-31
KR20170037616A (ko) 2017-04-04
TWI669771B (zh) 2019-08-21
US10478872B2 (en) 2019-11-19
FR3024057A1 (fr) 2016-01-29

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