FR2998420B1 - Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium. - Google Patents

Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium.

Info

Publication number
FR2998420B1
FR2998420B1 FR1261116A FR1261116A FR2998420B1 FR 2998420 B1 FR2998420 B1 FR 2998420B1 FR 1261116 A FR1261116 A FR 1261116A FR 1261116 A FR1261116 A FR 1261116A FR 2998420 B1 FR2998420 B1 FR 2998420B1
Authority
FR
France
Prior art keywords
lithium
spraying
surface wave
elastic surface
wave transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1261116A
Other languages
English (en)
Other versions
FR2998420A1 (fr
Inventor
Sylvain Ballandras
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite de Franche-Comte
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite de Franche-Comte filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1261116A priority Critical patent/FR2998420B1/fr
Priority to PCT/EP2013/074347 priority patent/WO2014079912A1/fr
Publication of FR2998420A1 publication Critical patent/FR2998420A1/fr
Application granted granted Critical
Publication of FR2998420B1 publication Critical patent/FR2998420B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
FR1261116A 2012-11-22 2012-11-22 Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium. Active FR2998420B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1261116A FR2998420B1 (fr) 2012-11-22 2012-11-22 Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium.
PCT/EP2013/074347 WO2014079912A1 (fr) 2012-11-22 2013-11-21 Transducteur à ondes élastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1261116A FR2998420B1 (fr) 2012-11-22 2012-11-22 Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium.

Publications (2)

Publication Number Publication Date
FR2998420A1 FR2998420A1 (fr) 2014-05-23
FR2998420B1 true FR2998420B1 (fr) 2017-06-09

Family

ID=48128409

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1261116A Active FR2998420B1 (fr) 2012-11-22 2012-11-22 Transducteur a ondes elastiques de surface se propageant sur un substrat en niobate de lithium ou en tantalate de lithium.

Country Status (2)

Country Link
FR (1) FR2998420B1 (fr)
WO (1) WO2014079912A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107819449A (zh) * 2017-12-04 2018-03-20 中电科技集团重庆声光电有限公司 一种超宽带声表面波谐振器及滤波器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109891612A (zh) 2016-10-20 2019-06-14 天工方案公司 具有亚波长厚度的压电层的弹性波器件
FR3100998B1 (fr) * 2019-09-25 2022-06-03 Lille Ecole Centrale Dispositif pour nettoyer un support recouvert d’un liquide

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259802A (ja) * 1992-03-16 1993-10-08 Japan Energy Corp 弾性表面波装置
JP2005045432A (ja) * 2003-07-25 2005-02-17 Toyo Commun Equip Co Ltd 弾性表面波デバイス
JP2012060417A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107819449A (zh) * 2017-12-04 2018-03-20 中电科技集团重庆声光电有限公司 一种超宽带声表面波谐振器及滤波器

Also Published As

Publication number Publication date
WO2014079912A1 (fr) 2014-05-30
FR2998420A1 (fr) 2014-05-23

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