FR2995995B1 - Capteur de pression a base de nanojauges couplees a un resonateur - Google Patents

Capteur de pression a base de nanojauges couplees a un resonateur

Info

Publication number
FR2995995B1
FR2995995B1 FR1259067A FR1259067A FR2995995B1 FR 2995995 B1 FR2995995 B1 FR 2995995B1 FR 1259067 A FR1259067 A FR 1259067A FR 1259067 A FR1259067 A FR 1259067A FR 2995995 B1 FR2995995 B1 FR 2995995B1
Authority
FR
France
Prior art keywords
nanojauges
couplees
resonator
pressure sensor
sensor based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1259067A
Other languages
English (en)
French (fr)
Other versions
FR2995995A1 (fr
Inventor
Jean-Christophe Riou
Guillaume Lehee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1259067A priority Critical patent/FR2995995B1/fr
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to PCT/EP2013/070084 priority patent/WO2014049062A1/fr
Priority to CN201380050348.5A priority patent/CN104662400B/zh
Priority to RU2015115638A priority patent/RU2623694C1/ru
Priority to US14/431,507 priority patent/US9726562B2/en
Priority to BR112015006717-4A priority patent/BR112015006717B1/pt
Priority to CA2885523A priority patent/CA2885523A1/fr
Priority to EP13766375.3A priority patent/EP2901122B1/de
Publication of FR2995995A1 publication Critical patent/FR2995995A1/fr
Application granted granted Critical
Publication of FR2995995B1 publication Critical patent/FR2995995B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR1259067A 2012-09-26 2012-09-26 Capteur de pression a base de nanojauges couplees a un resonateur Active FR2995995B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1259067A FR2995995B1 (fr) 2012-09-26 2012-09-26 Capteur de pression a base de nanojauges couplees a un resonateur
CN201380050348.5A CN104662400B (zh) 2012-09-26 2013-09-26 由耦合到谐振器上的纳米计制成的压力传感器
RU2015115638A RU2623694C1 (ru) 2012-09-26 2013-09-26 Датчик давления, выполненный на основе нанотензометров, связанных с резонатором
US14/431,507 US9726562B2 (en) 2012-09-26 2013-09-26 Pressure sensor made from nanogauges coupled to a resonator
PCT/EP2013/070084 WO2014049062A1 (fr) 2012-09-26 2013-09-26 Capteur de pression a base de nanojauges couplees a un resonateur
BR112015006717-4A BR112015006717B1 (pt) 2012-09-26 2013-09-26 sensor de pressão à base de nanocalibradores acoplados a um ressonador
CA2885523A CA2885523A1 (fr) 2012-09-26 2013-09-26 Capteur de pression a base de nanojauges couplees a un resonateur
EP13766375.3A EP2901122B1 (de) 2012-09-26 2013-09-26 Drucksensor aus an einen resonator gekoppelten nanomessinstrumenten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1259067A FR2995995B1 (fr) 2012-09-26 2012-09-26 Capteur de pression a base de nanojauges couplees a un resonateur

Publications (2)

Publication Number Publication Date
FR2995995A1 FR2995995A1 (fr) 2014-03-28
FR2995995B1 true FR2995995B1 (fr) 2014-09-19

Family

ID=47257953

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1259067A Active FR2995995B1 (fr) 2012-09-26 2012-09-26 Capteur de pression a base de nanojauges couplees a un resonateur

Country Status (8)

Country Link
US (1) US9726562B2 (de)
EP (1) EP2901122B1 (de)
CN (1) CN104662400B (de)
BR (1) BR112015006717B1 (de)
CA (1) CA2885523A1 (de)
FR (1) FR2995995B1 (de)
RU (1) RU2623694C1 (de)
WO (1) WO2014049062A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3258235A1 (de) * 2016-06-16 2017-12-20 Huba Control Ag Differenzialdruckwandler
CN107329615B (zh) * 2017-06-30 2020-06-16 上海天马微电子有限公司 显示面板及显示装置
FR3086386B1 (fr) * 2018-09-21 2020-12-04 Commissariat Energie Atomique Dispositif de mesure comportant un fil semiconducteur suspendu
CN108958307A (zh) * 2018-09-30 2018-12-07 华南理工大学 柔性圆环板振动检测控制装置及方法
CN110672236A (zh) * 2019-10-31 2020-01-10 中电科技集团重庆声光电有限公司 基于静电驱动、差分压阻检测的谐振器及其压力传感器
US11850078B1 (en) * 2020-01-04 2023-12-26 Bertec Corporation Force measurement system
CN113218540A (zh) * 2021-05-07 2021-08-06 慧石（上海）测控科技有限公司 微机电谐振式压力敏感结构及压力测量方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
US7490519B2 (en) 2005-09-30 2009-02-17 General Electric Company System and method for sensing differential pressure
FR2917731B1 (fr) * 2007-06-25 2009-10-23 Commissariat Energie Atomique Dispositif resonant a detection piezoresistive realise en technologies de surface
CN101551283B (zh) * 2009-05-14 2010-10-20 上海交通大学 表面横波压力和温度传感器
FR2957414B1 (fr) * 2010-03-15 2012-09-28 Commissariat Energie Atomique Capteur de force a bruit reduit
CN102297741B (zh) * 2010-06-25 2013-06-05 中国科学院电子学研究所 一种基于微电子机械技术的硅谐振式气压传感器
CN102162756B (zh) * 2010-12-29 2012-03-21 厦门大学 一种全对称硅微谐振式压力传感器
FR2977319B1 (fr) * 2011-07-01 2014-03-14 Commissariat Energie Atomique Dispositif de mesure de pression a sensiblite optimisee
CN102494813A (zh) * 2011-12-02 2012-06-13 厦门大学 一种基于带有耦合梁差动结构的硅微谐振式压力传感器

Also Published As

Publication number Publication date
US20150241291A1 (en) 2015-08-27
RU2623694C1 (ru) 2017-06-28
BR112015006717B1 (pt) 2020-11-17
EP2901122B1 (de) 2022-07-13
BR112015006717A2 (pt) 2017-07-04
EP2901122A1 (de) 2015-08-05
CA2885523A1 (fr) 2014-04-03
WO2014049062A1 (fr) 2014-04-03
CN104662400A (zh) 2015-05-27
FR2995995A1 (fr) 2014-03-28
CN104662400B (zh) 2019-06-18
US9726562B2 (en) 2017-08-08

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