FR2990565B1 - Procede de realisation de detecteurs infrarouges - Google Patents
Procede de realisation de detecteurs infrarougesInfo
- Publication number
- FR2990565B1 FR2990565B1 FR1201324A FR1201324A FR2990565B1 FR 2990565 B1 FR2990565 B1 FR 2990565B1 FR 1201324 A FR1201324 A FR 1201324A FR 1201324 A FR1201324 A FR 1201324A FR 2990565 B1 FR2990565 B1 FR 2990565B1
- Authority
- FR
- France
- Prior art keywords
- infrared detectors
- producing infrared
- producing
- detectors
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
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- H01L27/144—Devices controlled by radiation
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- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/1469—Assemblies, i.e. hybrid integration
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1201324A FR2990565B1 (fr) | 2012-05-09 | 2012-05-09 | Procede de realisation de detecteurs infrarouges |
EP13721698.2A EP2847796A1 (fr) | 2012-05-09 | 2013-05-06 | Procédé de réalisation de détecteurs infrarouges |
PCT/EP2013/059421 WO2013167553A1 (fr) | 2012-05-09 | 2013-05-06 | Procédé de réalisation de détecteurs infrarouges |
US14/399,824 US9318527B2 (en) | 2012-05-09 | 2013-05-06 | Method for producing photosensitive infrared detectors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1201324A FR2990565B1 (fr) | 2012-05-09 | 2012-05-09 | Procede de realisation de detecteurs infrarouges |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2990565A1 FR2990565A1 (fr) | 2013-11-15 |
FR2990565B1 true FR2990565B1 (fr) | 2016-10-28 |
Family
ID=46940514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1201324A Expired - Fee Related FR2990565B1 (fr) | 2012-05-09 | 2012-05-09 | Procede de realisation de detecteurs infrarouges |
Country Status (4)
Country | Link |
---|---|
US (1) | US9318527B2 (fr) |
EP (1) | EP2847796A1 (fr) |
FR (1) | FR2990565B1 (fr) |
WO (1) | WO2013167553A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10571631B2 (en) | 2015-01-05 | 2020-02-25 | The Research Foundation For The State University Of New York | Integrated photonics including waveguiding material |
US10020343B2 (en) * | 2015-09-25 | 2018-07-10 | Flir Systems, Inc. | Wafer-level back-end fabrication systems and methods |
TWI597390B (zh) * | 2015-11-10 | 2017-09-01 | Jx Nippon Mining & Metals Corp | Electrolytic copper foil, manufacturing method of electrolytic copper foil, copper clad laminated board, printed wiring board, the manufacturing method of a printed wiring board, and the manufacturing method of an electronic device |
DE102015121066B4 (de) | 2015-12-03 | 2021-10-28 | Infineon Technologies Ag | Halbleitersubstrat-auf-halbleitersubstrat-package und verfahren zu seiner herstellung |
US10978508B2 (en) | 2018-10-16 | 2021-04-13 | L3 Cincinnati Electronics Corporation | Infrared detector having a directly bonded silicon substrate present on top thereof |
CN114220783A (zh) * | 2021-12-21 | 2022-03-22 | 中国科学院深圳先进技术研究院 | 一种混合键合结构及其制备方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5455202A (en) | 1993-01-19 | 1995-10-03 | Hughes Aircraft Company | Method of making a microelectric device using an alternate substrate |
US5353498A (en) | 1993-02-08 | 1994-10-11 | General Electric Company | Method for fabricating an integrated circuit module |
FR2781925B1 (fr) * | 1998-07-30 | 2001-11-23 | Commissariat Energie Atomique | Transfert selectif d'elements d'un support vers un autre support |
US20030113947A1 (en) | 2001-12-19 | 2003-06-19 | Vandentop Gilroy J. | Electrical/optical integration scheme using direct copper bonding |
US6962835B2 (en) * | 2003-02-07 | 2005-11-08 | Ziptronix, Inc. | Method for room temperature metal direct bonding |
JP4046067B2 (ja) | 2003-11-04 | 2008-02-13 | ソニー株式会社 | 固体撮像素子の製造方法 |
FR2876244B1 (fr) | 2004-10-04 | 2007-01-26 | Commissariat Energie Atomique | Composant muni d'un ensemble de micropointes conductrices dures et procede de connexion electrique entre ce composant et un composant muni de protuberances conductrices ductiles |
FR2938973B1 (fr) | 2008-11-27 | 2011-03-04 | Sagem Defense Securite | Cellules matricielles photosensibles dans l'infrarouge a base d'antimoniure sur substrat optiquement transparent et procede de fabrication associe |
JP4835710B2 (ja) * | 2009-03-17 | 2011-12-14 | ソニー株式会社 | 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、及び電子機器 |
US7820525B2 (en) * | 2009-03-25 | 2010-10-26 | E-Phocus | Method for manufacturing hybrid image sensors |
FR2947481B1 (fr) * | 2009-07-03 | 2011-08-26 | Commissariat Energie Atomique | Procede de collage cuivre-cuivre simplifie |
US8772717B2 (en) | 2009-08-10 | 2014-07-08 | Drs Rsta, Inc. | Radiation detector having a bandgap engineered absorber |
FR2949903A1 (fr) | 2009-09-07 | 2011-03-11 | Soc Fr Detecteurs Infrarouges Sofradir | Procede d'hybridation de composants electroniques, notamment de detection |
FR2963158B1 (fr) * | 2010-07-21 | 2013-05-17 | Commissariat Energie Atomique | Procede d'assemblage par collage direct entre deux elements comprenant des portions de cuivre et de materiaux dielectriques |
-
2012
- 2012-05-09 FR FR1201324A patent/FR2990565B1/fr not_active Expired - Fee Related
-
2013
- 2013-05-06 US US14/399,824 patent/US9318527B2/en not_active Expired - Fee Related
- 2013-05-06 EP EP13721698.2A patent/EP2847796A1/fr not_active Withdrawn
- 2013-05-06 WO PCT/EP2013/059421 patent/WO2013167553A1/fr active Application Filing
Also Published As
Publication number | Publication date |
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EP2847796A1 (fr) | 2015-03-18 |
US9318527B2 (en) | 2016-04-19 |
FR2990565A1 (fr) | 2013-11-15 |
WO2013167553A1 (fr) | 2013-11-14 |
US20150102447A1 (en) | 2015-04-16 |
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