FR2959015B1 - Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse - Google Patents

Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse

Info

Publication number
FR2959015B1
FR2959015B1 FR1052883A FR1052883A FR2959015B1 FR 2959015 B1 FR2959015 B1 FR 2959015B1 FR 1052883 A FR1052883 A FR 1052883A FR 1052883 A FR1052883 A FR 1052883A FR 2959015 B1 FR2959015 B1 FR 2959015B1
Authority
FR
France
Prior art keywords
pulse mode
luminescent discharge
discharge spectrometry
measuring luminescent
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1052883A
Other languages
English (en)
Other versions
FR2959015A1 (fr
Inventor
Patrick Chapon
Olivier Rogerieux
Agnes Tempez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Priority to FR1052883A priority Critical patent/FR2959015B1/fr
Priority to US13/640,116 priority patent/US8581180B2/en
Priority to PCT/FR2011/050865 priority patent/WO2011128600A1/fr
Priority to EP11730379.2A priority patent/EP2559056B1/fr
Priority to JP2013504321A priority patent/JP5965388B2/ja
Publication of FR2959015A1 publication Critical patent/FR2959015A1/fr
Application granted granted Critical
Publication of FR2959015B1 publication Critical patent/FR2959015B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/36—Radio frequency spectrometers, e.g. Bennett-type spectrometers, Redhead-type spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Electron Tubes For Measurement (AREA)
FR1052883A 2010-04-15 2010-04-15 Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse Active FR2959015B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1052883A FR2959015B1 (fr) 2010-04-15 2010-04-15 Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse
US13/640,116 US8581180B2 (en) 2010-04-15 2011-04-14 Method and device for measuring glow discharge spectrometry in pulsed mode
PCT/FR2011/050865 WO2011128600A1 (fr) 2010-04-15 2011-04-14 Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse
EP11730379.2A EP2559056B1 (fr) 2010-04-15 2011-04-14 Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse
JP2013504321A JP5965388B2 (ja) 2010-04-15 2011-04-14 パルス・モードにおけるグロー放電分光分析測定のための方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1052883A FR2959015B1 (fr) 2010-04-15 2010-04-15 Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse

Publications (2)

Publication Number Publication Date
FR2959015A1 FR2959015A1 (fr) 2011-10-21
FR2959015B1 true FR2959015B1 (fr) 2012-06-22

Family

ID=43303986

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1052883A Active FR2959015B1 (fr) 2010-04-15 2010-04-15 Procede et dispositif de mesure de spectrometrie de decharge luminescente en mode pulse

Country Status (5)

Country Link
US (1) US8581180B2 (fr)
EP (1) EP2559056B1 (fr)
JP (1) JP5965388B2 (fr)
FR (1) FR2959015B1 (fr)
WO (1) WO2011128600A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9620334B2 (en) * 2012-12-17 2017-04-11 Lam Research Corporation Control of etch rate using modeling, feedback and impedance match
FR3007140B1 (fr) * 2013-06-17 2016-06-10 Horiba Jobin Yvon Sas Procede et dispositif de spectrometrie de masse a decharge luminescente
FR3019298B1 (fr) * 2014-03-31 2016-04-15 Horiba Jobin Yvon Sas Procede et appareil de mesure d'un echantillon solide organique par spectrometrie de decharge luminescente
CN106465146B (zh) * 2014-05-05 2020-11-03 华为技术有限公司 Rcu和rf端口匹配的电调天线、基站和方法
US9875884B2 (en) * 2015-02-28 2018-01-23 Agilent Technologies, Inc. Ambient desorption, ionization, and excitation for spectrometry
JP6623557B2 (ja) * 2015-05-27 2019-12-25 株式会社島津製作所 Ｉｃｐ分析装置
KR101881536B1 (ko) * 2017-02-24 2018-07-24 주식회사 뉴파워 프라즈마 출력전류 제어가 가능한 전력공급장치 및 이를 이용한 전력공급방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982496A (ja) * 1995-09-12 1997-03-28 Jeol Ltd 高周波装置
JP2000150478A (ja) * 1998-11-12 2000-05-30 Matsushita Electronics Industry Corp プラズマ発生方法及びプラズマ発生装置
US6472822B1 (en) * 2000-04-28 2002-10-29 Applied Materials, Inc. Pulsed RF power delivery for plasma processing
JP4079919B2 (ja) * 2003-10-20 2008-04-23 株式会社堀場製作所 グロー放電発光分析装置及びグロー放電発光分析方法
JP2006078455A (ja) * 2004-09-13 2006-03-23 Horiba Ltd グロー放電発光分析装置、及びグロー放電発光分析方法
KR100915613B1 (ko) * 2007-06-26 2009-09-07 삼성전자주식회사 펄스 플라즈마 매칭시스템 및 그 방법
US7839223B2 (en) * 2008-03-23 2010-11-23 Advanced Energy Industries, Inc. Method and apparatus for advanced frequency tuning
US20090294275A1 (en) * 2008-05-29 2009-12-03 Applied Materials, Inc. Method of plasma load impedance tuning by modulation of a source power or bias power rf generator

Also Published As

Publication number Publication date
EP2559056A1 (fr) 2013-02-20
FR2959015A1 (fr) 2011-10-21
WO2011128600A1 (fr) 2011-10-20
EP2559056B1 (fr) 2019-04-17
JP5965388B2 (ja) 2016-08-03
US8581180B2 (en) 2013-11-12
JP2013524471A (ja) 2013-06-17
US20130200257A1 (en) 2013-08-08

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