FR2922203B1 - Procede de realisation d'une structure ayant un cordon de scellement ajoure et structure obtenue. - Google Patents

Procede de realisation d'une structure ayant un cordon de scellement ajoure et structure obtenue.

Info

Publication number
FR2922203B1
FR2922203B1 FR0707213A FR0707213A FR2922203B1 FR 2922203 B1 FR2922203 B1 FR 2922203B1 FR 0707213 A FR0707213 A FR 0707213A FR 0707213 A FR0707213 A FR 0707213A FR 2922203 B1 FR2922203 B1 FR 2922203B1
Authority
FR
France
Prior art keywords
making
seal cord
adjusted seal
structure obtained
adjusted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0707213A
Other languages
English (en)
French (fr)
Other versions
FR2922203A1 (fr
Inventor
Xavier Baillin
Jean Brun
Thierry Enot
David Henry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0707213A priority Critical patent/FR2922203B1/fr
Priority to EP08354068A priority patent/EP2050713B1/fr
Priority to US12/285,623 priority patent/US8112882B2/en
Priority to JP2008266367A priority patent/JP2009137002A/ja
Publication of FR2922203A1 publication Critical patent/FR2922203A1/fr
Application granted granted Critical
Publication of FR2922203B1 publication Critical patent/FR2922203B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/60—Seals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0172—Seals
    • B81C2203/019—Seals characterised by the material or arrangement of seals between parts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49146—Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor
    • Y10T29/49171—Assembling electrical component directly to terminal or elongated conductor with encapsulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49174—Assembling terminal to elongated conductor
    • Y10T29/49181—Assembling terminal to elongated conductor by deforming
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49204—Contact or terminal manufacturing
    • Y10T29/49208—Contact or terminal manufacturing by assembling plural parts
    • Y10T29/49218—Contact or terminal manufacturing by assembling plural parts with deforming

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
FR0707213A 2007-10-15 2007-10-15 Procede de realisation d'une structure ayant un cordon de scellement ajoure et structure obtenue. Expired - Fee Related FR2922203B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0707213A FR2922203B1 (fr) 2007-10-15 2007-10-15 Procede de realisation d'une structure ayant un cordon de scellement ajoure et structure obtenue.
EP08354068A EP2050713B1 (fr) 2007-10-15 2008-10-07 Procédé de réalisation d'une cavité ayant un cordon de scellement
US12/285,623 US8112882B2 (en) 2007-10-15 2008-10-09 Method for producing a structure
JP2008266367A JP2009137002A (ja) 2007-10-15 2008-10-15 穿孔されたシール・ストリップを有する構造体を製造する方法およびこの方法により得られる構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0707213A FR2922203B1 (fr) 2007-10-15 2007-10-15 Procede de realisation d'une structure ayant un cordon de scellement ajoure et structure obtenue.

Publications (2)

Publication Number Publication Date
FR2922203A1 FR2922203A1 (fr) 2009-04-17
FR2922203B1 true FR2922203B1 (fr) 2009-11-20

Family

ID=39487232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0707213A Expired - Fee Related FR2922203B1 (fr) 2007-10-15 2007-10-15 Procede de realisation d'une structure ayant un cordon de scellement ajoure et structure obtenue.

Country Status (4)

Country Link
US (1) US8112882B2 (https=)
EP (1) EP2050713B1 (https=)
JP (1) JP2009137002A (https=)
FR (1) FR2922203B1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4942671B2 (ja) * 2008-01-24 2012-05-30 株式会社フジクラ 半導体装置およびその製造方法
DE102009029180B4 (de) * 2009-09-03 2017-07-20 Robert Bosch Gmbh Mikrosystem
US9102517B2 (en) 2012-08-22 2015-08-11 International Business Machines Corporation Semiconductor structures provided within a cavity and related design structures
CN103395736B (zh) * 2013-08-09 2015-12-09 杭州士兰集成电路有限公司 Mems玻璃浆料键合结构及其制造方法
US20190202684A1 (en) * 2017-12-29 2019-07-04 Texas Instruments Incorporated Protective bondline control structure
EP4172258A1 (en) 2020-06-24 2023-05-03 Dow Global Technologies LLC Crosslinked compositions from olefin/silane interpolymers
CN114824148A (zh) * 2021-01-29 2022-07-29 上海和辉光电股份有限公司 一种oled封装结构及其制备方法和应用

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5837935A (en) * 1996-02-26 1998-11-17 Ford Motor Company Hermetic seal for an electronic component having a secondary chamber
US6428650B1 (en) * 1998-06-23 2002-08-06 Amerasia International Technology, Inc. Cover for an optical device and method for making same
US6136128A (en) * 1998-06-23 2000-10-24 Amerasia International Technology, Inc. Method of making an adhesive preform lid for electronic devices
US6374683B1 (en) * 1999-01-29 2002-04-23 Genomic Instrumentation Services, Inc. Pipetter
KR100347436B1 (ko) * 1999-12-16 2002-08-03 엘지.필립스 엘시디 주식회사 액정 표시장치의 씰 패턴 형성방법 및 그 방법에 의해제조된 씰 패턴
US6589625B1 (en) * 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6791660B1 (en) * 2002-02-12 2004-09-14 Seiko Epson Corporation Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances
JP4069639B2 (ja) * 2002-02-12 2008-04-02 セイコーエプソン株式会社 電気光学装置の製造方法
DE102004027501A1 (de) 2004-06-04 2005-12-22 Robert Bosch Gmbh Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren
US20060076631A1 (en) * 2004-09-27 2006-04-13 Lauren Palmateer Method and system for providing MEMS device package with secondary seal
US20060076634A1 (en) * 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
FR2901639B1 (fr) * 2006-05-24 2008-08-22 Commissariat Energie Atomique Micro-composant integre associant les fonctions de recuperation et de stockage de l'energie

Also Published As

Publication number Publication date
US20090094816A1 (en) 2009-04-16
EP2050713B1 (fr) 2012-05-23
JP2009137002A (ja) 2009-06-25
EP2050713A1 (fr) 2009-04-22
FR2922203A1 (fr) 2009-04-17
US8112882B2 (en) 2012-02-14

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20140630