FR2896807B1 - Structure multicouche mince, piece la comprenant et son procede de depot - Google Patents

Structure multicouche mince, piece la comprenant et son procede de depot

Info

Publication number
FR2896807B1
FR2896807B1 FR0600829A FR0600829A FR2896807B1 FR 2896807 B1 FR2896807 B1 FR 2896807B1 FR 0600829 A FR0600829 A FR 0600829A FR 0600829 A FR0600829 A FR 0600829A FR 2896807 B1 FR2896807 B1 FR 2896807B1
Authority
FR
France
Prior art keywords
piece
same
deposition method
multilayer structure
thin multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0600829A
Other languages
English (en)
Other versions
FR2896807A1 (fr
Inventor
Valerie Lucas
Mickael Joinet
Francis Teyssandier
Laurent Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EADS CCR
Original Assignee
EADS CCR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0600829A priority Critical patent/FR2896807B1/fr
Application filed by EADS CCR filed Critical EADS CCR
Priority to EP07703133A priority patent/EP1979505B1/fr
Priority to ES07703133T priority patent/ES2345910T3/es
Priority to PCT/EP2007/000779 priority patent/WO2007085494A1/fr
Priority to DE602007006626T priority patent/DE602007006626D1/de
Priority to US12/162,377 priority patent/US20090081433A1/en
Priority to RU2008135371/02A priority patent/RU2418883C2/ru
Priority to CNA2007800014638A priority patent/CN101360845A/zh
Priority to JP2008551733A priority patent/JP2009525397A/ja
Publication of FR2896807A1 publication Critical patent/FR2896807A1/fr
Application granted granted Critical
Publication of FR2896807B1 publication Critical patent/FR2896807B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
FR0600829A 2006-01-30 2006-01-30 Structure multicouche mince, piece la comprenant et son procede de depot Expired - Fee Related FR2896807B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0600829A FR2896807B1 (fr) 2006-01-30 2006-01-30 Structure multicouche mince, piece la comprenant et son procede de depot
ES07703133T ES2345910T3 (es) 2006-01-30 2007-01-30 Estructura multicapa de pelicula delgada, componente que comprende dicha estructura y su metodo de deposicion.
PCT/EP2007/000779 WO2007085494A1 (fr) 2006-01-30 2007-01-30 Structure multicouche en films fins, composant comprenant ladite structure et sa méthode de dépôt
DE602007006626T DE602007006626D1 (de) 2006-01-30 2007-01-30 Mehrschichtige dünnfilmstruktur, komponente mit dieser struktur und verfahren zu ihrer ablagerung
EP07703133A EP1979505B1 (fr) 2006-01-30 2007-01-30 Structure multicouche en films fins, composant comprenant ladite structure et sa méthode de dépôt
US12/162,377 US20090081433A1 (en) 2006-01-30 2007-01-30 Thin-film multilayer structure, component comprising said structure and its method of deposition
RU2008135371/02A RU2418883C2 (ru) 2006-01-30 2007-01-30 Тонкопленочная многослойная структура, компонент, включающий такую структуру, и способ ее осаждения
CNA2007800014638A CN101360845A (zh) 2006-01-30 2007-01-30 薄膜多层结构、包括所述结构的部件及其沉积方法
JP2008551733A JP2009525397A (ja) 2006-01-30 2007-01-30 薄膜多層構造体、該構造体を含む構成要素、および該構造体の堆積方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0600829A FR2896807B1 (fr) 2006-01-30 2006-01-30 Structure multicouche mince, piece la comprenant et son procede de depot

Publications (2)

Publication Number Publication Date
FR2896807A1 FR2896807A1 (fr) 2007-08-03
FR2896807B1 true FR2896807B1 (fr) 2008-03-14

Family

ID=36954446

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0600829A Expired - Fee Related FR2896807B1 (fr) 2006-01-30 2006-01-30 Structure multicouche mince, piece la comprenant et son procede de depot

Country Status (9)

Country Link
US (1) US20090081433A1 (fr)
EP (1) EP1979505B1 (fr)
JP (1) JP2009525397A (fr)
CN (1) CN101360845A (fr)
DE (1) DE602007006626D1 (fr)
ES (1) ES2345910T3 (fr)
FR (1) FR2896807B1 (fr)
RU (1) RU2418883C2 (fr)
WO (1) WO2007085494A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101736325B (zh) * 2010-01-05 2012-07-04 青岛科技大学 一种超硬氮铝化钛薄膜的微波等离子体制备方法
CN102358940B (zh) * 2011-10-12 2014-06-04 湖北久之洋红外系统股份有限公司 一种在物件基底上沉积抗腐蚀类金刚石薄膜的方法
KR20150005571A (ko) * 2012-05-03 2015-01-14 마그나 인터내셔널 인코포레이티드 비금속 코팅으로 코팅된 판금으로 형성된 자동차 부품
DE102013109646B4 (de) 2013-09-04 2021-12-02 Pictiva Displays International Limited Organisches optoelektronisches Bauelement
US10418243B2 (en) 2015-10-09 2019-09-17 Applied Materials, Inc. Ultra-high modulus and etch selectivity boron-carbon hardmask films
FR3075231B1 (fr) 2017-12-18 2019-11-15 Compagnie Generale Des Etablissements Michelin Sol et dispositif et procedes associes

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067901A (ja) * 1983-09-24 1985-04-18 Agency Of Ind Science & Technol 水素化及び弗素化した非晶質炭化ケイ素薄膜を用いた光学素子
JPS60184681A (ja) * 1984-03-02 1985-09-20 Sharp Corp コーティング用非晶質炭化珪素膜の形成方法
US5122431A (en) * 1988-09-14 1992-06-16 Fujitsu Limited Thin film formation apparatus
JP2761253B2 (ja) * 1989-08-11 1998-06-04 シャープ株式会社 光書込み形液晶表示装置
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
FR2736361B1 (fr) * 1995-07-03 1997-09-19 Aerospatiale Couche mince complexe, piece a faible coefficient de frottement revetue d'une telle couche et procede de realisation d'une telle piece
FR2856078B1 (fr) * 2003-06-16 2006-11-17 Commissariat Energie Atomique Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d'un tel revetement.
JP2005076099A (ja) * 2003-09-02 2005-03-24 Konica Minolta Holdings Inc 薄膜の製造方法とそれにより造られた薄膜、積層薄膜、透明プラスチックフィルム、及び積層薄膜付き有機ｅｌ素子

Also Published As

Publication number Publication date
CN101360845A (zh) 2009-02-04
EP1979505A1 (fr) 2008-10-15
WO2007085494A1 (fr) 2007-08-02
FR2896807A1 (fr) 2007-08-03
JP2009525397A (ja) 2009-07-09
EP1979505B1 (fr) 2010-05-19
ES2345910T3 (es) 2010-10-05
DE602007006626D1 (de) 2010-07-01
RU2008135371A (ru) 2010-03-10
RU2418883C2 (ru) 2011-05-20
US20090081433A1 (en) 2009-03-26

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120928

CL Concession to grant licences

Name of requester: ASTRIUM SAS, FR

Effective date: 20140408

Name of requester: AIRBUS FRANCE, FR

Effective date: 20140408

Name of requester: MBDA FRANCE, FR

Effective date: 20140408