FR2893611B1 - Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief - Google Patents

Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief

Info

Publication number
FR2893611B1
FR2893611B1 FR0553554A FR0553554A FR2893611B1 FR 2893611 B1 FR2893611 B1 FR 2893611B1 FR 0553554 A FR0553554 A FR 0553554A FR 0553554 A FR0553554 A FR 0553554A FR 2893611 B1 FR2893611 B1 FR 2893611B1
Authority
FR
France
Prior art keywords
geometry
producing
substrate
oxide ceramic
coating based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0553554A
Other languages
English (en)
Other versions
FR2893611A1 (fr
Inventor
Severine Lebrette
Philippe Boy
Philippe Belleville
Yves Montouillout
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0553554A priority Critical patent/FR2893611B1/fr
Priority to ES06819672T priority patent/ES2393204T3/es
Priority to EP06819672A priority patent/EP1969155B1/fr
Priority to PCT/EP2006/068767 priority patent/WO2007060180A1/fr
Priority to JP2008541743A priority patent/JP5208758B2/ja
Priority to US12/094,631 priority patent/US20080292790A1/en
Publication of FR2893611A1 publication Critical patent/FR2893611A1/fr
Application granted granted Critical
Publication of FR2893611B1 publication Critical patent/FR2893611B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1225—Deposition of multilayers of inorganic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1254—Sol or sol-gel processing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
FR0553554A 2005-11-23 2005-11-23 Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief Expired - Fee Related FR2893611B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0553554A FR2893611B1 (fr) 2005-11-23 2005-11-23 Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief
ES06819672T ES2393204T3 (es) 2005-11-23 2006-11-22 Procedimiento de realización de un revestimiento a base de un óxido cerámico adaptado a la geometría de un sustrato que presenta unos motivos en relieve
EP06819672A EP1969155B1 (fr) 2005-11-23 2006-11-22 Procede de realisation d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief
PCT/EP2006/068767 WO2007060180A1 (fr) 2005-11-23 2006-11-22 Procede de realisation d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief
JP2008541743A JP5208758B2 (ja) 2005-11-23 2006-11-22 レリーフ特性を有する基板の形状に適合する酸化物セラミックに基づく塗膜製造プロセス
US12/094,631 US20080292790A1 (en) 2005-11-23 2006-11-22 Process For Producing a Coating Based on an Oxide Ceramic that Conforms to the Geometry of a Substrate Having Features in Relief

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0553554A FR2893611B1 (fr) 2005-11-23 2005-11-23 Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief

Publications (2)

Publication Number Publication Date
FR2893611A1 FR2893611A1 (fr) 2007-05-25
FR2893611B1 true FR2893611B1 (fr) 2007-12-21

Family

ID=36118163

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0553554A Expired - Fee Related FR2893611B1 (fr) 2005-11-23 2005-11-23 Procede de realisaion d'un revetement a base d'une ceramique oxyde conforme a la geometrie d'un substrat presentant des motifs en relief

Country Status (6)

Country Link
US (1) US20080292790A1 (fr)
EP (1) EP1969155B1 (fr)
JP (1) JP5208758B2 (fr)
ES (1) ES2393204T3 (fr)
FR (1) FR2893611B1 (fr)
WO (1) WO2007060180A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2967992B1 (fr) 2010-11-26 2015-05-29 Commissariat Energie Atomique Preparation de sols d'oxydes metalliques stables, utiles notamment pour la fabrication de films minces a proprietes optiques et resistants a l'abrasion
FR2981064B1 (fr) 2011-10-07 2014-11-28 Commissariat Energie Atomique Procede de preparation d'un materiau sur un substrat par voie sol-gel
CN103693682A (zh) * 2014-01-07 2014-04-02 哈尔滨工业大学 ZnTiO3多孔纳米材料的合成方法
EP2947178A1 (fr) * 2014-05-21 2015-11-25 IMEC vzw Revêtement conforme sur des substrats tridimensionnels
US9443782B1 (en) * 2015-08-11 2016-09-13 Freescale Semiconductor, Inc. Method of bond pad protection during wafer processing
FR3045036B1 (fr) * 2015-12-15 2017-12-22 Commissariat Energie Atomique Procede de preparation d'une solution sol-gel utilisable pour la preparation d'une ceramique de titanate de baryum dope par du hafnium et/ou par au moins un element lanthanide
CN111908833B (zh) * 2020-07-22 2021-11-02 电子科技大学 一种锆钛酸铅气凝胶复合涂层的制备方法
CN114293179B (zh) * 2021-12-08 2024-02-06 重庆材料研究院有限公司 一种贵金属热电偶用氧化铪涂层的制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276543A (en) * 1979-03-19 1981-06-30 Trw Inc. Monolithic triple diffusion analog to digital converter
US5670432A (en) * 1996-08-01 1997-09-23 Taiwan Semiconductor Manufacturing Company, Ltd. Thermal treatment to form a void free aluminum metal layer for a semiconductor device
JP3451623B2 (ja) * 1996-10-28 2003-09-29 セイコーエプソン株式会社 インクジェット記録ヘッド
US6328433B1 (en) * 1998-01-22 2001-12-11 Seiko Epson Corporation Piezoelectric film element and ink-jet recording head using the same
JP2002110344A (ja) * 2000-09-29 2002-04-12 Tdk Corp 薄膜ｅｌ素子及びその製造方法
FR2829757B1 (fr) * 2001-09-20 2004-07-09 Commissariat Energie Atomique Procede de preparation d'un sol stable de zircono-titanate de plomb et procede de preparation de films a partir dudit sol
KR100486727B1 (ko) * 2002-11-14 2005-05-03 삼성전자주식회사 평판형 렌즈의 제조방법

Also Published As

Publication number Publication date
US20080292790A1 (en) 2008-11-27
FR2893611A1 (fr) 2007-05-25
JP2009516634A (ja) 2009-04-23
ES2393204T3 (es) 2012-12-19
WO2007060180A1 (fr) 2007-05-31
JP5208758B2 (ja) 2013-06-12
EP1969155A1 (fr) 2008-09-17
EP1969155B1 (fr) 2012-08-15

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ST Notification of lapse

Effective date: 20160729