FR2845026B1 - PIEZOELECTRIC MICROMANIPULATOR, IN PARTICULAR FOR MICROROBOTICS - Google Patents

PIEZOELECTRIC MICROMANIPULATOR, IN PARTICULAR FOR MICROROBOTICS

Info

Publication number
FR2845026B1
FR2845026B1 FR0211934A FR0211934A FR2845026B1 FR 2845026 B1 FR2845026 B1 FR 2845026B1 FR 0211934 A FR0211934 A FR 0211934A FR 0211934 A FR0211934 A FR 0211934A FR 2845026 B1 FR2845026 B1 FR 2845026B1
Authority
FR
France
Prior art keywords
electrodes
finger
micromanipulator
microrobotics
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0211934A
Other languages
French (fr)
Other versions
FR2845026A1 (en
Inventor
Nicolas Chaillet
Joel Agnus
Lit Pierre De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Nationale Superieure de Mecanique et des Microtechniques
Original Assignee
Ecole Nationale Superieure de Mecanique et des Microtechniques
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Nationale Superieure de Mecanique et des Microtechniques filed Critical Ecole Nationale Superieure de Mecanique et des Microtechniques
Priority to FR0211934A priority Critical patent/FR2845026B1/en
Priority to PCT/FR2003/002805 priority patent/WO2004028756A2/en
Priority to AU2003282189A priority patent/AU2003282189A1/en
Publication of FR2845026A1 publication Critical patent/FR2845026A1/en
Application granted granted Critical
Publication of FR2845026B1 publication Critical patent/FR2845026B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2045—Cantilevers, i.e. having one fixed end adapted for in-plane bending displacement

Abstract

The invention relates to a micromanipulator comprising at least one finger (11) which is made from a piezoelectric material and which is equipped with electrodes (2). Moreover, one free end (110) of the aforementioned finger can be deflected along two mutually orthogonal axes (Y, Z) by applying a suitable configuration of electric potentials to the electrodes. According to the invention, the finger (11) is formed through the alternate stacking of an even number of piezoelectric plates (30) and electrodes (211, 212) which are reciprocally connected both mechanically and electrically, said stack being formed on either side of a central electric potential surface (20) which serves as a reference electrode. The structure of the inventive micromanipulator is such that it can be made using techniques which are immediately accessible to persons skilled in the art.
FR0211934A 2002-09-26 2002-09-26 PIEZOELECTRIC MICROMANIPULATOR, IN PARTICULAR FOR MICROROBOTICS Expired - Fee Related FR2845026B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0211934A FR2845026B1 (en) 2002-09-26 2002-09-26 PIEZOELECTRIC MICROMANIPULATOR, IN PARTICULAR FOR MICROROBOTICS
PCT/FR2003/002805 WO2004028756A2 (en) 2002-09-26 2003-09-24 Piezoelectric micromanipulator which is especially intended for microbotics and method of implementing same
AU2003282189A AU2003282189A1 (en) 2002-09-26 2003-09-24 Piezoelectric micromanipulator which is especially intended for microbotics and method of implementing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0211934A FR2845026B1 (en) 2002-09-26 2002-09-26 PIEZOELECTRIC MICROMANIPULATOR, IN PARTICULAR FOR MICROROBOTICS

Publications (2)

Publication Number Publication Date
FR2845026A1 FR2845026A1 (en) 2004-04-02
FR2845026B1 true FR2845026B1 (en) 2005-06-03

Family

ID=31985267

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0211934A Expired - Fee Related FR2845026B1 (en) 2002-09-26 2002-09-26 PIEZOELECTRIC MICROMANIPULATOR, IN PARTICULAR FOR MICROROBOTICS

Country Status (3)

Country Link
AU (1) AU2003282189A1 (en)
FR (1) FR2845026B1 (en)
WO (1) WO2004028756A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2955655B1 (en) 2010-01-27 2012-04-20 Univ Franche Comte DEVICE FOR MEASURING THE POSITIONING OF A MICRO-ACTUATOR
FR2975935B1 (en) 2011-06-06 2013-07-05 Centre Nat Rech Scient TOOL FOR MICROTECHNIC CLIP
WO2013085475A2 (en) 2011-12-05 2013-06-13 Akpinar Muhammet Yahya Improved emergency hammer having automatic mechanism

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4610475A (en) * 1984-09-06 1986-09-09 Microflex Technology, Inc. Piezoelectric polymer micromanipulator
WO1990003044A1 (en) * 1988-09-12 1990-03-22 Microflex Technology, Inc. Protected piezoelectric polymer bimorph
US5170089A (en) * 1989-12-20 1992-12-08 General Electric Company Two-axis motion apparatus utilizing piezoelectric material
WO2002045181A1 (en) * 2000-11-28 2002-06-06 Sae Magnetics (H.K.) Ltd. Head gimbal assembly with piezoelectric microactuator

Also Published As

Publication number Publication date
WO2004028756A3 (en) 2004-05-06
AU2003282189A8 (en) 2004-04-19
FR2845026A1 (en) 2004-04-02
AU2003282189A1 (en) 2004-04-19
WO2004028756A2 (en) 2004-04-08

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Legal Events

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Year of fee payment: 15

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Effective date: 20180531