FR2837839B1 - Procede de fabrication du revetement d'un substrat metallique - Google Patents

Procede de fabrication du revetement d'un substrat metallique

Info

Publication number
FR2837839B1
FR2837839B1 FR0303762A FR0303762A FR2837839B1 FR 2837839 B1 FR2837839 B1 FR 2837839B1 FR 0303762 A FR0303762 A FR 0303762A FR 0303762 A FR0303762 A FR 0303762A FR 2837839 B1 FR2837839 B1 FR 2837839B1
Authority
FR
France
Prior art keywords
coating
producing
metal substrate
substrate
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0303762A
Other languages
English (en)
Other versions
FR2837839A1 (fr
Inventor
Christian Bayer
Stockhausen Alexander Fon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2837839A1 publication Critical patent/FR2837839A1/fr
Application granted granted Critical
Publication of FR2837839B1 publication Critical patent/FR2837839B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR0303762A 2002-03-27 2003-03-27 Procede de fabrication du revetement d'un substrat metallique Expired - Fee Related FR2837839B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002113661 DE10213661A1 (de) 2002-03-27 2002-03-27 Verfahren zur Herstellung einer Beschichtung eines metallischen Substrates

Publications (2)

Publication Number Publication Date
FR2837839A1 FR2837839A1 (fr) 2003-10-03
FR2837839B1 true FR2837839B1 (fr) 2006-10-20

Family

ID=27815978

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0303762A Expired - Fee Related FR2837839B1 (fr) 2002-03-27 2003-03-27 Procede de fabrication du revetement d'un substrat metallique

Country Status (4)

Country Link
CH (1) CH696336A5 (fr)
DE (1) DE10213661A1 (fr)
FR (1) FR2837839B1 (fr)
NL (1) NL1023024C2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045473A1 (de) * 2004-09-20 2006-03-23 Franz Xaver Meiller Fahrzeug- Und Maschinenfabrik - Gmbh & Co Kg Lastentransportbehälter und Verfahren zur Herstellung von Laderaumbegrenzungsblechen für Lastentransportbehälter
JP4066440B2 (ja) * 2006-05-17 2008-03-26 トーヨーエイテック株式会社 ダイヤモンド様薄膜を備えた医療器具及びその製造方法
DE102007047629A1 (de) * 2007-04-13 2008-10-16 Stein, Ralf Verfahren zum Aufbringen einer hochfesten Beschichtung auf Werkstücke und/oder Werkstoffe
TWI399451B (zh) * 2008-09-05 2013-06-21 Yu Hsueh Lin 傳動機構之表面鍍膜方法
JP5741891B2 (ja) * 2009-06-19 2015-07-01 株式会社ジェイテクト Ｄｌｃ膜形成方法
US8900291B2 (en) 2009-08-17 2014-12-02 Kawasumi Laboratories, Inc. Medical instrument and metal product
AT510420B1 (de) * 2011-04-08 2012-04-15 Bosch Gmbh Robert Verfahren zum gasnitrieren von hochdruckkomponenten
DE102019206420A1 (de) 2019-05-03 2020-11-05 Robert Bosch Gmbh Verfahren zum Beschichten einer mechanisch hochbelasteten Oberfläche eines Bauteils sowie beschichtetes Bauteil selbst

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1006711A3 (nl) * 1992-12-02 1994-11-22 Vito Werkwijze voor het aanbrengen van een diamantachtige koolstoflaag op staal, ijzer of legeringen daarvan.
US5643637A (en) * 1994-03-18 1997-07-01 General Electric Company Method of grading the electric field of an electrode
US5840427A (en) * 1996-05-21 1998-11-24 Teledyne Industries Incorporated Method for making corrosion resistant electrical components
GB2313533A (en) * 1996-05-22 1997-12-03 Vitek Research Corp Coated fishing fly
EP0856592A1 (fr) * 1997-02-04 1998-08-05 N.V. Bekaert S.A. Revêtement comprenant des couches semblable à du diamant et nanocomposite semblable à du diamant
DE19709673C2 (de) * 1997-03-11 2001-01-04 Heraeus Kulzer Gmbh & Co Kg Verfahren zur Behandlung von Oberflächen
US6015597A (en) * 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
KR20010043555A (ko) * 1998-05-12 2001-05-25 조셉 제이. 스위니 진공 프로세싱 시스템에서 예비세정용 산소-아르곤 가스혼합물
US6280834B1 (en) * 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate

Also Published As

Publication number Publication date
DE10213661A1 (de) 2003-10-16
NL1023024A1 (nl) 2003-09-30
FR2837839A1 (fr) 2003-10-03
CH696336A5 (de) 2007-04-30
NL1023024C2 (nl) 2004-11-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20131129