FR2798195B1 - Caracterisation de zones de silicium-germanium sur silicium - Google Patents

Caracterisation de zones de silicium-germanium sur silicium

Info

Publication number
FR2798195B1
FR2798195B1 FR9911142A FR9911142A FR2798195B1 FR 2798195 B1 FR2798195 B1 FR 2798195B1 FR 9911142 A FR9911142 A FR 9911142A FR 9911142 A FR9911142 A FR 9911142A FR 2798195 B1 FR2798195 B1 FR 2798195B1
Authority
FR
France
Prior art keywords
silicon
characterization
germanium
zones
germanium zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9911142A
Other languages
English (en)
Other versions
FR2798195A1 (fr
Inventor
Didier Dutartre
Jean Claude Oberlin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9911142A priority Critical patent/FR2798195B1/fr
Priority to US09/652,682 priority patent/US6238941B1/en
Publication of FR2798195A1 publication Critical patent/FR2798195A1/fr
Application granted granted Critical
Publication of FR2798195B1 publication Critical patent/FR2798195B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR9911142A 1999-09-02 1999-09-02 Caracterisation de zones de silicium-germanium sur silicium Expired - Fee Related FR2798195B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9911142A FR2798195B1 (fr) 1999-09-02 1999-09-02 Caracterisation de zones de silicium-germanium sur silicium
US09/652,682 US6238941B1 (en) 1999-09-02 2000-08-31 Characterizing of silicon-germanium areas on silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9911142A FR2798195B1 (fr) 1999-09-02 1999-09-02 Caracterisation de zones de silicium-germanium sur silicium

Publications (2)

Publication Number Publication Date
FR2798195A1 FR2798195A1 (fr) 2001-03-09
FR2798195B1 true FR2798195B1 (fr) 2001-11-16

Family

ID=9549579

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9911142A Expired - Fee Related FR2798195B1 (fr) 1999-09-02 1999-09-02 Caracterisation de zones de silicium-germanium sur silicium

Country Status (2)

Country Link
US (1) US6238941B1 (fr)
FR (1) FR2798195B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6498078B2 (en) * 2000-09-05 2002-12-24 The Regents Of The University Of California Method for enhancing the solubility of boron and indium in silicon
US20060084919A1 (en) * 2004-10-18 2006-04-20 Shaw Thomas J Fixed-dose syringe with limited aspiration
WO2012038853A1 (fr) 2010-09-22 2012-03-29 Koninklijke Philips Electronics N.V. Procédé de production d'oxyde nitrique
US10319872B2 (en) 2012-05-10 2019-06-11 International Business Machines Corporation Cost-efficient high power PECVD deposition for solar cells

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9226552D0 (en) * 1992-12-21 1993-02-17 Philips Electronics Uk Ltd A method of determining a given characteristic of a material sample
US5530732A (en) 1994-05-24 1996-06-25 Mitsubishi Denki Kabushiki Kaisha Method and apparatus for evaluating thin-film multilayer structure
JPH09297112A (ja) * 1996-03-08 1997-11-18 Mitsubishi Heavy Ind Ltd 構造パラメータ解析装置及び解析方法

Also Published As

Publication number Publication date
FR2798195A1 (fr) 2001-03-09
US6238941B1 (en) 2001-05-29

Similar Documents

Publication Publication Date Title
DE60008517D1 (de) Derivatisiertes poröses silicium
DE60004614D1 (de) Integrierte Halbleitervorrichtung
DE60036594D1 (de) Feldeffekt-Halbleiterbauelement
DE69936526D1 (de) Silizium dünnschicht photoelektrische vorrichtung
DE60041674D1 (de) Abrichtvorrichtung und Poliervorrichtung
DE69903783D1 (de) Nitrid-Halbleitervorrichtung und ihr Herstellungsverfahren
DE69937739D1 (de) Halbleitervorrichtung
DE69942813D1 (de) Halbleitervorrichtung
NO20003015D0 (no) Overflatemontert RC-anordning
DE60035580D1 (de) Halbleiter
DE60027510D1 (de) Halbleiterscheibe Poliervorrichtung
DE69902021D1 (de) Poliervorrichtung
DE69941201D1 (de) Hochfrequenz-Halbleiteranordnung
DE60044777D1 (de) Siliziumwafer und dessen herstellung
ES1050639Y (es) Dispositivo de soporte de ducha
DE69839597D1 (de) Hochfrequenzhalbleiteranordnung
DE60000900D1 (de) Klebstoff und Halbleiterbauelemente
FI19992855A (fi) Valaisuolosuhteiden mittaus
DE59913522D1 (de) Siliziumcarbid-junction-feldeffekttransistor
PT1022396E (pt) Combinacao de duche
DE60001434T2 (de) Klebstoff und Halbleiterbauelemente
DE60010837D1 (de) Optische Halbleitervorrichtung und zugehöriges Herstellungsverfahren
DE60008047D1 (de) Feldeffekt-Halbleiteranordnung
DE69927476D1 (de) Halbleiteranordnung
DE60019144D1 (de) Halbleitervorrichtung

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20090529